Etching characteristics of holographic grating on chalcogenide As-Ge-Se-S thin films (칼코게나이드 As-Ge-Se-S 박막에서 홀로그래픽 격자의 에칭 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2001.07a
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- pp.644-647
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- 2001