• Journal of Welding and Joining
• /
• 제20권3호
• /
• pp.109-115
• /
• 2002

In this study high power Nd:YAG laser welding of structural steel was investigated. For the test steel blocks of $50{\times}50{\times}200mm$ were cut and machined, and bead-on-plate weld was made on the machined surface. Argon, nitrogen, helium, dry air or mixed gases were used to find the effect of shielding conditions on the bead formation. Results demonstrated that there were Fe I rich region and Fe II rich region in the laser induced plasma column based on the spectral analysis with S-2000 field spectrometer The Fe I region was located at the root of the column near keyhole opening. On the other hand, Fe II region was found at the middle of the plasma column. In the Nd:YAG laser welding, Fe I region emitted continuum which had peak value at wave length of around 710nm, and Fe II region had the peak at 580nm. In the welding of steel by $CO_2$ laser, however, no continuum was observed. There showed two groups of strong spikes in the $CO_2$ laser welding; the first group was displayed at the wave band of 450-560nm. This spike group emitted stronger intensity of light and sharper peaks than those group at 680-800nm.

• 한국세라믹학회지
• /
• 제53권6호
• /
• pp.628-634
• /
• 2016

The 8 wt% yttria($Y_2O_3$) stabilized zirconia ($ZrO_2$), 8YSZ, a typical thermal barrier coating (TBC) for turbine systems, was fabricated under different starting powder conditions and coating parameters by atmospheric plasma spray (APS) coating process. Four different starting powders were prepared by conventional spray dry method with different additive and process parameter conditions. As a result, large- and small-size spherical-type particles and Donut-type particles were obtained. Dense structure of 8YSZ coating was produced when small size spherical-type or Donut-type particles were used. On the other hand, 8YSZ coating with a porous structure was formed from large-size spherical-type particles. Furthermore, a segmented coating structure with vertical cracks was observed after post heat treatment on the surface of dense structured coating by argon plasma flame at an appropriate gun distance and power condition.

• 한국조명전기설비학회:학술대회논문집
• /
• 한국조명전기설비학회 1998년도 학술발표회논문집
• /
• pp.131-133
• /
• 1998

Electron temperature, electron density and electron energy distribution function were measured in Radio-Frequency Inductively Coupled Plasma(RFICP) using a probe method. Measurements were conducted in argon discharge for pressure from 10 mTorr to 40 mTorr and input rF power from 100W to 600W and flow rate from 3 sccm to 12 sccm. Spatial distribution of electron temperature, electron density and electron energy distribution function were measured for discharge with same aspect ratio (R/L=2). Electron temperature was found to depend on pressure, but only weakly on power. Electron density and electron energy distribution function strongly depended on both pressure and power. Electron density and electron energy distribution function increased with increasing flow rate. Radial distribution of the electron density and electron energy distribution function were peaked in the plasma center. Normal distribution of the electron density, electron energy distribution function were peaked in the center between quartz plate and substrate. These results were compared to a simple model of ICP, finally, we found out the generation mechanism of Radio-Frequency Inductively Coupled Plasma.

• 전기학회논문지
• /
• 제64권4호
• /
• pp.567-572
• /
• 2015

Discharge characteristics of linear microwave plasma were investigated by using fluid simulation of 2D axis-symmetry based on finite elements method. The microwave power was 2.45 GHz TEM mode and transmitted through linear antenna. Resistive power and pressure were considered simulation variables and argon was used for working gas. A decrease of electron density along the quartz tube was observed in low power condition but relatively uniform plasmas were generated in chamber by increasing the resistive power. The electron temperature was highly detected near the surface of quartz tube because the electron was heated only dielectric surface. The power transmission efficiency decreased and characteristics of surface plasma were observed in high electron density condition.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 1999년도 춘계학술대회 논문집
• /
• pp.406-409
• /
• 1999

Experimental Investigations were carried out to remove NOx, SOx simultaneously from simulated flue gas[NO(0.02%)-SO$_2$(0.08%)-$CO_2$-Air-$N_2$] by using a plasma chemical reaction. Ammonia gas(14.81%) balanced by argon was diluted by all and was Introduced to mall simulated flue gas duct through NH$_3$ Injection system which is in downstream of reactor. The NH$_3$ molecular ratio(MR) was determined based on (NH3) to [NO+S0$_2$]. MR is 1, 1.5, 2.5. The NOx removal rate significantly increased with increasing NaOH bubble quantity. The SO$_2$ removal rate was not significantly effected by applied voltage, however it fairly Increased with increasing NH$_3$ molecule ratio. By-product aerosol particle was observed by XRD(X-ray diffraction) after sampling, The NOx, SOx removal rates, when H2O vapour bubbled by dry all was injected to plasma reactor, were better than those of other cases. When aqueous NaOH solution(20%) bubbled by 2.5( ι /min) of $N_2$ and 0.5 ( ι /min) NH$_3$(MR=1.5) were injected to simulated flue gas, The NOx. SOx removal rate was 95 ~ 100[%]

• 전기학회논문지P
• /
• 제59권4호
• /
• pp.417-422
• /
• 2010

Atmosphere Plasma of Gas Discharge (APGD) has been used in plasma sources for material processing such as etching, deposition, surface modification and so on due to having no thermal damages. The APGD researches on AC source with high frequency have been mainly processed. However, DC APGD studies have been not. In order to understand APGD further, it is necessary to study on fundamental properties of DC APGD. In this paper, we developed a one-dimensional fluid simulation model with capacitively coupled plasma chamber at the atmosphere pressure (760 [Torr]). Nine kinds of Ar discharge particles such as electron (e), positive ions ($Ar^+$, $Ar_2^+$) and neutral particles ($Ar_m^*$, $Ar_r^*$, $Ar_h^*$, $Ar_2^*$(1), $Ar_2^*$(3) and Ar gas) are considered in the computation. The simulation was worked at the current range of 1~15 [mA]. The characteristics of voltage-current were calculated and the structure of Joule heating were discussed. The spatial distributions of Ar DC APGD and the mechanism of power consumption were also investigated.

• 한국표면공학회:학술대회논문집
• /
• 한국표면공학회 2003년도 추계학술발표회초록집
• /
• pp.54-54
• /
• 2003

DLC films were deposited on Si(100) substrates by inductively coupled plasma (ICP) assisted chemical vapor deposition (CVD). A mixture of acetylene (C$_2$H$_2$) and argon (Ar) gases was used as the precursor and plasma source, respectively. The structure of the films was characterized by the Raman spectroscopy. Results from the Raman spectroscopy analysis indicated that the property change of the DLC films is due to the sp$^3$ and sp$^2$ ratio in the films under various conditions such as ICP power, working pressure and RF substrate bias. The hydrogen content in the DLC films was determined by an electron recoil detector (ERB). The roughness of the films was measured by atomic force microscope (Am). A microhardness tester was used for the hardness and elastic modulus measurement. The DLC film showed a maximum hardness of 37㎬. In this work, the relationship between deposition parameters and mechanical properties were discussed.

• 반도체디스플레이기술학회지
• /
• 제22권4호
• /
• pp.7-12
• /
• 2023

The edge ring placed on the outside of the electrostatic chuck (ESC) is a key component for protecting the ESC and controlling the etching uniformity of the edge of the wafer. Therefore, it is very important to understand the etching phenomenon of edge rings for edge ring management and equipment homeostasis. In this study, a specimen with SiO₂ hard mask and underlying Si mold was installed on the edge ring surface and the etching results were measured by varying the edge ring 2MHz RF power. By developing PI-VM model with high prediction accuracy and analyzing the roles of key parameters in the model, we were able to evaluate the effect of plasma and sheath characteristics around the edge ring on edge ring erosion. This analysis method provided information necessary for edge ring maintenance and operation.

• Elastomers and Composites
• /
• 제35권1호
• /
• pp.63-70
• /
• 2000

아연 도금된 강철 타이어 코드의 접착성 향상을 위하여 아르곤 플라즈마로 에칭후 아세틸렌 또는 부타디엔 플라즈마 고분자 중합으로 코팅하였다. 플라즈마 고분자 중합은 10W, 30분, 30mTorr에서 실시하였으며, 아르곤 에칭은 90W, 30초, 30mTorr에서 실시하였다. 타이어 코드의 접착력은 TACT으로 측정하였으며, 파괴 표면을 주사전자현미경으로 분석하였다. 또한 플라즈마고분자로 코팅된 타이어 코드의 표면을 FT-IR, Alpha-step 및 접촉각 측정기로 분석하여 접착 메카니즘을 규명하고자 하였다.

• 대한용접접합학회:학술대회논문집
• /
• 대한용접접합학회 2002년도 Proceedings of the International Welding/Joining Conference-Korea
• /
• pp.612-619
• /
• 2002

The dynamic behavior of Al-Mg alloys plasma was very unstable and this instability was closely related to the unstable motion of keyhole during laser irradiation. The keyhole fluctuated both in size and shape and its fluctuation period was about 440 ${\mu}{\textrm}{m}$. This instability has been estimated to be caused by the evaporation phenomena of metals with different boiling point and latent heats of vaporization. Therefore, the authors have conducted the spectroscopic diagnostics of plasma induced in the pulsed YAG laser welding of Al-Mg alloys in air and argon atmospheres. In the air environment, the identified spectra were atomic lines of Al, Mg, Cr, Mn, Cu, Fe and Zn, and singly ionized Mg line, as well as strong molecular spectrum of AlO, MgO and AIH. It was confirmed that the resonant lines of Al and Mg were strongly self-absorbed, in particular in the vicinity of pool surface. The self-absorption of atomic Mg line was more eminent in alloys containing higher Mg. These facts showed that the laser-induced plasma was relatively a low temperature and high density metallic vapor. The intensities of molecular spectra of AlO and MgO were different each other depending on the power density of laser beam. Under the low power density irradiation condition, the MgO band spectra were predominant in intensity, while the AlO spectra became much stronger in higher power density. In argon atmosphere the band spectra of MgO and AlO completely vanished, but AlH molecular spectra was detected clearly. The hydrogen source was presumably the hydrogen solved in the base Metal, absorbed water on the surface oxide layer or H$_2$ and $H_2O$ in the shielding gas. The temporal change in spectral line intensities was quite similar to the fluctuation of keyhole. The time average plasma temperature at 1 mm high above the surface of A5083 alloy was determined by the Boltzmann plot method of atomic Cr lines of different excitation energy. The obtained electron temperature was 3, 280$\pm$150 K which was about 500 K higher than the boiling point of pure aluminum. The electron number density was determined by measuring the relative intensities of the spectra1lines of atomic and singly ionized Magnesium, and the obtained value was 1.85 x 1019 1/㎥.