Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2003.10a
- /
- Pages.54-54
- /
- 2003
THE EFFECT OF THE HIGH DENSITY PLASMA ON THE DIAMOND-LIKE CARBON FILMS
- Kim, H. (School of Materials Science Engineering, Seoul National University) ;
- D.H. Jung (School of Materials Science Engineering, Seoul National University) ;
- Park, B. (School of Materials Science Engineering, Seoul National University) ;
- K. C. Yoo (School of Materials Science Engineering, Seoul National University) ;
- Lee, J. J. (School of Materials Science Engineering, Seoul National University) ;
- J. H. Joo (Department of Materials Science and Engineering, Kunsan National University)
- Published : 2003.10.01
Abstract
DLC films were deposited on Si(100) substrates by inductively coupled plasma (ICP) assisted chemical vapor deposition (CVD). A mixture of acetylene (C