• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.190-194
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• 2002

In this study, the etching of Au thin films have been performed in an inductively coupled CF4/Cl2/Ar plasma. The etch properties were measured as the CF4 adds from 0 % to 30 % to the Cl2/(Cl2 + Ar) gas mixing ratio of 0.2. Other parameters were fixed at a rf power of 700 W, a dc bias voltage of 150 V, a chamber pressure of 15 mTorr, and a substrate temperature of $30^{\circ}C$. The highest etch rate of the Au thin film was 370 nm/min at a 10 % additive CF4 into Cl2/(Cl2 + Ar) gas mixing ratio of 0.2. The surface reaction of the etched Au thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. From x-ray photoelectron spectroscopy (XPS) analysis, the intensities of Au peaks are changed. There is a chemical reaction between Cl and Au. Au-Cl is hard to remove on the surface because of its high melting point and the etching products can be sputtered by Ar ion bombardment. We obtained the cleaned and steep profile.

• 대한금속재료학회지
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• 제46권3호
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• pp.125-130
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• 2008

Conventional plasma carburizing or nitriding for austenitic stainless steels results in a degradation of corrosion resistance. However, a low temperature plasma surface treatment can improve surface hardness without deteriorating the corrosion resistance. The 2-step low temperature plasma processes (the combined carburizing and post nitriding) offers the increase of both surface hardness and thickness of hardened layer and corrosion resistance than the individually processed low temperature nitriding and low temperature carburizing techniques. In the present paper, attempts have been made to investigate the influence of the introduction of Ar gas (0~20%) in nitriding atmosphere during low temperature plasma nitriding at $370^{\circ}C$ after low temperature plasma carburizing at $470^{\circ}C$. All treated specimens exhibited the increase of the surface hardness with increasing Ar level in the atmosphere and the surface hardness value reached up to 1050 HV0.1, greater than 750 $HV_{0.1}$ in the carburized state. The expanded austenite phase (${\gamma}_N$) was observed on the most of the treated surfaces. The thickness of the ${\gamma}_N$ layer reached about $7{\mu}m$ for the specimen treated in the nitriding atmosphere containing 20% Ar. In case of 10% Ar containing atmosphere, the corrosion resistance was significantly enhanced than untreated austenitic stainless steels, whilst 20% Ar level in the atmosphere caused to form CrN in the N-enriched layer (${\gamma}_N$), which led to the degradation of corrosion resistance compared with untreated austenitic stainless steels.

• 한국자동차공학회논문집
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• 제5권5호
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• pp.140-156
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• 1997

The combustion characteristics of DI Diesel engine using turbocharging and EGR are numerically studied. Computations are carried out for the wide range of trubochyarged pressures, EGR ratios, and Ar/He dilution. Numerical results indicate that the Ar/He dilution in the intake gas significantly influence the engine performance, the spray combustion process, and the pollutant formation.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.58-61
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• 2002

SBT thin films were etched at different content of Cl$_2$in Cl$_2$/Ar plasma. We obtained the maximum etch rate of 883 ${\AA}$/min at Cl$_2$(20%)/Ar(80%). As Cl$_2$ gas increased in Cl$_2$/Ar plasma, the etch rate decreased. The maximum etch rate may be explained by variation of volume density for Cl atoms and by the concurrence of two etching mechanisms such as physical sputtering and chemical reaction with formation of low-volatile products, which can be desorbed only by ion bombardment. The variation of volume density for Cl, F and Ar atoms and ion current density were measured by the optical emission spectroscopy and Langmuir probe. To evaluate the physical damage due to plasma, X-ray diffraction and atomic force microscopy analysis carried out. After etching process, P-E hysteresis loops were measured by ferroelectric workstation.

• 한국자기학회지
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• 제6권2호
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• pp.98-105
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• 1996

스퍼터링 방법으로 제작된 NiFe 박막에서 Ar 압력이 자기 및 자기저항 성질에 미치는 여향을 조사하였다. 타겟으로는 Ni$_{81}$$Fe_{19}$ 조성의 합금타겟을 사용하였다. TEM을 써서 박막의 미세구조를 조사하였으며, 보자력과 포화자화는 VSM으로 측정하였다. 합금박막의 조성은 ICPS로 분석 확인하였다. 10 mTorr 이상의 높은 Ar 압력에서 제작된 박막에서 갈라진 틈새(crack-like void)를 갖는 주상구조가 관찰되었다. 이러한 주상 결정립경계(columnar grain boundary)가 자화 과정에서 자구벽 핀닝자리(pinning site)가 되어, Ar 압력이 커짐에 따라 보자력이 증가 하였으며, 박막의 밀도가 감소하여 포화자화가 줄어드는 것을 볼 수 있었다. 한편, Ar 압력이 증가하면서 자기저항비가 감소하는 결과를 얻었다. 결정립 경계 산란과 결정립간 터널링에 의한 박막의 비저항의 증가가 이러한 자기저항비 감소의 주원인임을 알 수 있었다.다.

• KSBB Journal
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• 제27권5호
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• pp.308-312
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• 2012

Argon-plasma jet (Ar-PJ) is generated by ionizing Ar gas, and the resulting Ar-PJ consists of a mixture of neutral particles, positive ions, negative electrons, and various reactive species. Although Ar-PJ has been used in various biomedical applications, little is known about the biological effects on cells located near the plasma-exposed region. Here, we investigated the effects of the Ar-PJ on actin cytoskeleton of mouse embryonic fibroblasts (MEFs) in response to indirect as well as direct exposure to Ar-PJ. This Ar-PJ was generated at 500 mL/min of flow rate and 100 V electric power by our device mainly consisting of electrodes, dielectrics, and a high-voltage power supply. Because actin cytoskeleton is the key cellular machinery involved in cellular movement and is implicated in regulation of cancer metastasis and thus resulting in a highly desirable cancer therapeutic target, we examined the actin filament architectures in Ar-PJ-treated MEFs by staining with an actin-specific phalloidin labeled with fluorescent dye. Interestingly, the Ar-PJ treatment causes destabilization of actin filament architectures in the regions indirectly exposed to Ar-PJ, but no differences in MEFs treated with Ar gas alone and in untreated cell control, indicating that this phenomenon is a specific cellular response against Ar-PJ in the live cells, which are indirectly exposed to Ar-PJ. Collectively, our study raises the possibility that Ar-PJ may have potential as anti-cancer drug effect through direct destabilization of the actin cytoskeleton.

• 한국식품과학회지
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• 제50권3호
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• pp.316-323
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• 2018

본 연구에서는 온도별 포장기체에 따른 곶감의 저장 중 이화학적, 미생물학적 변화를 분석하여, 품질특성을 비교 하였다. 상주 둥시 품종의 곶감을 온도별 (-10, $10^{\circ}C$)로 60일간 저장하였으며, 이화학적 변화는 색도, 텍스처, 수분을 분석하였고, 미생물학적 변화는 효모와 곰팡이 수를 측정하였으며, 마지막으로 관능검사를 통해 품질 특성을 조사하였다. 내부색도는 $10^{\circ}C$에서, 질소구와 Ar구가 유사하게, $-10^{\circ}C$에서 Ar구가 확연하게 무처리구와 이산화탄소에 비해 변화가 적었으며, 그에 따라 계산된 색차값은 이산화탄소 구에서 가장 높았고 지속적으로 증가하였다. 텍스처는 $10^{\circ}C$에서는 저장 40일차까지 Ar구가 가장 변화가 적었으며, 전반적으로 모든 온도에서 텍스처의 변화는 질소에서 가장 적었다. 수분함량은 Ar는 유지되거나 증가하는 모습을 보였다. 곰팡이와 효모 수는 $-10^{\circ}C$에서 Ar구가 유의적으로 다른 구에 비해 집락 수가 감소하였다. 마지막으로 관능검사 결과, 40일차까지 $10^{\circ}C$에서는 색, 향, 전반적 기호도 항목에서 대조구 다음으로 이산화탄소가 낮은 점수를 받았으며, Ar구는 색, 겉모양, 향, 전반적 기호도 항목에서 유의적으로 높은 점수를 나타냈다. $-10^{\circ}C$에서는 전체기간 동안 Ar가 겉모양을 제외하고 가장 높은 값을 보였다. 따라서 본 연구를 통해, 곶감을 포장함에 있어 기체 치환포장은 유통과 저장 과정에서 곶감의 품질을 향상시킬 수 있는 중요한 인자임을 확인 할 수 있었으며, 그 중에서 이산화탄소 기체 포장은 부적절 한 것으로 보인다. 또한 질소와 아르곤 기체 치환포장이 고부가가치의 고품질 곶감 생산에 효과가 있을 것으로 사료된다.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 1991년도 춘계연구발표회 논문개요집
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• pp.87-88
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• 1991

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2008년도 추계학술대회 초록집
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• pp.74-76
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• 2008

• 열처리공학회지
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• 제27권2호
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• pp.65-71
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• 2014

SMF9060 material is a Fe-based powder sintered alloy that is used for several automobile components such as Synchronize Hub, oil pump and transmission. These components are required excellent wear resistance and durability. In this study, we have performed a dry wear test at the ambient air and Ar gas conditions in the room temperature, and a lubricant wear test at the room temperature and engine oil temperature of $100^{\circ}C$. The amount of wear volume and coefficient friction are measured by a Profilometer and a Ball on disk type wear tester. The wear volume in Ar gas condition was a little higher than that in the ambient air condition. However the wear volume in the lubricant wear condition was much lower than in the dry wear condition. XRD analysis of the debris in Ar gas condition showed that the oxide film was not formed.