• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2006년도 추계학술대회 발표 논문집
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• pp.68-71
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• 2006

Multi-component $ZnO-In_2O_3-SnO_2$ thin films have been prepared by RF magnetron co-sputtering using targets composed of $In_3Sn_4O_{12}$(99.99%) [1] and ZnO(99.99%) at room temperature. $In_3Sn_4O_{12}$ contains less In than commercial ITO, so that it lowers cost. Working pressure was held at 3 mtorr flowing Ar gas 20 sccm and sputtering time was 30 min. RF power ratio [RF1 / (RFI + RF2)] of two guns in sputtering system was varied from 0 to 1. Each RF power was varied $0{\sim}100W$ respectively. The thickness of the films was $350{\sim}650nm$. The composit ion concentrations of the each film were measured with EPMA, AES and XPS. The low resistivity of $1-2\;{\times}\;10^3$ and an average transmittance above 80% in the visible range were attained for the films over a range of ${\delta}\;(0.3\;{\leq}\;{\delta}\;{\leq}\;0.5)$. The films also showed a high chemical stability with time and a good uniformity.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2002년도 Proceedings of the International Welding/Joining Conference-Korea
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• pp.620-625
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• 2002

Considering the fuel consumption of car, a light structure of aluminum alloys is desired for car body nowadays. However, fusion welding of aluminum alloys has some problems of reduction of joint efficiency, porosity formation and hot cracking. ill the present work, investigation to improve the joint performance of laser welded joint has been carried out by addition of Cu, Ni, and Zr to A6N01 alloy welds. Aluminum alloy plate of 2.0mm in thickness with filler metal bar was welded by twin beam Nd:YAG laser facility (total power:5kW). The filler metals were prepared by changing the chemical compositions for adding the elements into the weld metal. Thirteen filler metal bars were prepared and pre-placed into the base metal before welding. Ar gas shielding with a flow rate of 10 l/min was used. The defocusing distance is kept at 0 mm. At travel speeds of 3 to 9 m/min and at laser power of 5kW (front beam 2kW rear beam 3kW), full penetration welds were obtained, whereas at travel speeds of 12 to 18 m/min and same power, partial penetration was observed. The joint efficiency of laser-welded joint was improved by the addition of Cu, Ni, and Zr due to the solid solution hardening, grain refining and precipitation hardening. The type of hardening has been further considered by metallurgical examination.

• 한국세라믹학회지
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• 제54권4호
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• pp.323-330
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• 2017

To understand the defect chemistry of multiferroic $BiFeO_3-based$ systems, we synthesized nonstoichiometric $Bi_{1+x}FeO_{3{\pm}{\delta}}$ ceramics by conventional solid-state reaction method and studied their structural, dielectric and high-temperature charge transport properties. Incorporation of an excess amount of $Bi_2O_3$ lowered the Bi deficiency in $BiFeO_3$. Polarization versus electric field (P-E) hysteresis loop and dielectric properties were found to be improved by the $Bi_2O_3$ addition. To better understand the defect effects on the multiferroic properties, the high temperature equilibrium electrical conductivity was measured under various oxygen partial pressures ($pO_2{^{\prime}}s$). The charge transport behavior was also examined through thermopower measurement. It was found that the oxygen vacancies contribute to high ionic conduction, showing $pO_2$ independency, and the electronic carrier is electron (n-type) in air and Ar gas atmospheres.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.787-790
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• 2003

A rf triode magnetron sputtering system is designed and installed its construction in vacuum chamber. In order to calibrate the rf triode magnetron sputtering for thin films deposition processes, the effects of different glow discharge conditions were investigated in terms of the deposition rate measurements. The basic parameters for calibrating experiment in this sputtering system are rf power input, gas pressure, plasma current, and target-to-substrate distance. Because a knowledge of the deposition rate is necessary to control film thickness and to evaluate optimal conditions which are an important consideration in preparing better thin films, the deposition rates of copper as a testing material under the various sputtering conditions are investigated. Furthermore, a triode sputtering system designed in our team is simulated by the SIMION program. As a result, it is sure that the simulation of electron trajectories in the sputtering system is confined directly above the target surface by the force of $E{\times}B$ field. Finally, some teats with the above 4 different sputtering conditions demonstrate that the deposition rate of rf triode magnetron sputtering is relatively higher than that of the conventional sputtering system. This means that the higher deposition rate is probably caused by a high ion density in the triode and magnetron system. The erosion area of target surface bombarded by Ar ion is sputtered widely on the whole target except on both magnet sides. Therefore, the designed rf triode magnetron sputtering is a powerful deposition system.

• 한국전기전자재료학회논문지
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• 제28권3호
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• pp.185-190
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• 2015

In this study, we fabricated the indium gallium zinc oxide (IGZO), zinc oxide (ZnO), aluminum zinc oxide (AZO). oxide and silver are deposited by magnetron sputtering and thermal evaporator, respectively transparency and energy bandgap were changed by the thickness of silver layer. To fabricate metal oxide metal (OMO) structure, IGZO sputtered on a corning 1,737 glass substrate was used as bottom oxide material and then silver was evaporated on the IGZO layer, finally IGZO was sputtered on the silver layer we get the final OMO structure. The radio-frequency power of the target was fixed at 30 W. The chamber pressure was set to $6.0{\times}10^{-3}$ Torr, and the gas ratio of Ar was fixed at 25 sccm. The silver thickness are varied from 3 to 15 nm. The OMO thin films was analyzed using XRD. XRD shows broad peak which clearly indicates amorphous phase. ZnO, AZO, OMO show the peak [002] direction at $34^{\circ}$. This indicate that ZnO, AZO OMO structure show the crystalline peak. Average transmittance of visible region was over 75%, while that of infrared region was under 20%. Energy band gap of OMO layer was increased with increasing thickness of Ag layer. As a result total transmittance was decreased.

• 대한전자공학회논문지
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• 제26권6호
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• pp.48-56
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• 1989

밀착형 1차원 영상감지소자로서 팩시밀리에 사용될 광도전막을 사일랜듸 글로방전 분해법으로 제작하였다. 우선 rf전력, 사일랜유량, 분위기 가스압, $H_2/SiH_4$비 및 기판온도의 증착조건에 따른 단층광전도막의 전기적 및 광학적특성을 조사하였다. 이 단층구조 영상감지막은 광전감도 0.85와 100lux 조도하에서 $I_{ph}/I_d=100$을 나타내었다. 그러나 이러한 단층박막은 양 전극으로 부터의 캐리어주입으로 인해 큰 암전류도 0.2nA 이하를 나타내었다. 또한 다층막은 단층막에 비해 단파장 가시광영역이 보상되어 팩시밀리용 1차원 영상감지소자에 사용될 만한 결과를 나타내었다.

• 대기
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• 제18권1호
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• pp.55-70
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• 2008

The global time slice approach is a transient experiment using high resolution atmosphere-only model with boundary condition from the low resolution globally coupled ocean-atmosphere model. The present study employs this "time slice concept" using ECHAM4 atmosphere-only model at a horizontal resolution of T106 with the lower boundary forcing obtained from a lower-resolution (T42) greenhouse gas + aerosol forcing experiment performed using the ECHO-G/S (ECHAM4/HOPE-G) coupled model. In order to assess the impact of horizontal resolution on simulated East Asian summer monsoon climate, the differences in climate response between the time slice experiments of the present and that of IPCC SRES AR4 participating 21 models including coarser (T30) coupled model are compared. The higher resolution model from time slice experiment in the present climate show successful performance in simulating the northward migration and the location of the maximum rainfall during the rainy season over East Asia, although its rainfall amount was somewhat weak compared to the observation. Based on the present climate simulation, the possible change of East Asian summer monsoon rainfall in the future climate by the IPCC SRES A1B scenario, tends to be increased especially over the eastern part of Japan during July and September. The increase of the precipitation over this region seems to be related with the weakening of northwestern part of North Pacific High and the formation of anticyclonic flow over the south of Yangtze River in the future climate.

• 센서학회지
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• 제24권4호
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• pp.264-269
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• 2015

An infrared (IR) bolometer measures the change of resistance by absorbing incident IR radiation and generates a signal as a function of the radiation intensity. Since a bolometer requires temperature stabilization and light filtering except for the infrared rays, it is essential for the device to be packaged meeting conditions that above mentioned. Minimization of heat loss is needed in order to stabilize temperature of bolometer. Heat loss by conduction or convection requires a medium, so the heat loss will be minimized if the medium is a vacuum. Therefore, vacuum packaging for bolometer is necessary. Another important element in bolometer packaging is germanium (Ge) window, which transmits IR radiation to heat the bolometer. To ensure a complete transmittance of IR light, anti-reflection (AR) coatings are deposited on both sides of the window. Although the transmittance of Ge window is high for IR rays, it is difficult to use frequently in low-price IR bolometer because of its high price. In this paper, we fabricated IR window by utilizing silicon (Si) substrate instead of Ge in order to reduce the cost of bolometer packaging. To enhance the IR transmittance through Si substrate, it is textured using Reactive Ion Etching (RIE). The texturing process of Si substrate is performed along with the change of experimental conditions such as gas ratio, pressure, etching time and RF power.

• 신재생에너지
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• 제9권2호
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• pp.23-29
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• 2013

Furnace and laser is currently the most important doping process. However furnace is typically difficult appling for selective emitters. Laser requires an expensive equipment and induces a structural damage due to high temperature using laser. This study has developed a new atmospheric pressure plasma source and research atmospheric pressure plasma doping. Atmospheric pressure plasma source injected Ar gas is applied a low frequency (a few 10 kHz) and discharged the plasma. We used P type silicon wafers of solar cell. We set the doping parameter that plasma treatment time was 6s and 30s, and the current of making the plasma is 70 mA and 120 mA. As result of experiment, prolonged plasma process time and highly plasma current occur deeper doping depth and improve sheet resistance. We investigated doping profile of phosphorus paste by SIMS (Secondary Ion Mass Spectroscopy) and obtained the sheet resistance using generally formula. Additionally, grasped the wafer surface image with SEM (Scanning Electron Microscopy) to investigate surface damage of doped wafer. Therefore we confirm the possibility making the selective emitter of solar cell applied atmospheric pressure plasma doping with phosphorus paste.

• 비파괴검사학회지
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• 제33권2호
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• pp.205-211
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• 2013

초음파 감쇠를 이용하여 티타늄 용접부에 대해 기계적 특성, 파단면 및 초음파특성을 연구하였다. 준비된 티타늄 시험편은 아르곤 가스를 이용하여 제작하였다. 티타늄 용접 시험편이 파단 되었을 때 변화하는 초음파 신호변화를 확인하기 위해서 인장시험을 실시하였다. 주사전자현미경을 이용하여 파단면을 관찰하고, 4 MHz 수직 탐촉자를 이용하여 초음파 시계열 신호를 획득하였다. 티타늄 판재에서 용접부는 모재부와 열영향부에 비하여 기계적 특성이 떨어지며 파단면분석을 통해 용접부의 입자크기가 모재부보다 큼을 확인할 수 있었다. RMS 신호 처리한 초음파 포락선의 면적과 인장강도의 상관관계를 나타내었다. 따라서 초음파를 이용하여 티타늄 용접부의 건전성 평가 방법이 유용함을 알 수 있었다.