Study on RF Plasma Modeling Between Unequal-Sized Electrodes Using One-dimensional Fluid Method (비대칭 전극계에서의 1차원적 RF 플라즈마 모델링에 관한 연구)
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- Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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- v.18 no.5
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- pp.35-41
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- 2004