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http://dx.doi.org/10.5207/JIEIE.2004.18.5.035

Study on RF Plasma Modeling Between Unequal-Sized Electrodes Using One-dimensional Fluid Method  

So Soon-Youl (훗가이도대학교 정보과학연구과 전자정보전공)
Lim Jang-Seob (목포해양대학교 해양전자통신공학부)
Publication Information
Journal of the Korean Institute of Illuminating and Electrical Installation Engineers / v.18, no.5, 2004 , pp. 35-41 More about this Journal
Abstract
In computational study on RF(Radio Frequency) plasmas, a 1D fluid models with an advantage of a short computational time are often adopted. However, in order to obtain realistic calculation results under a typical chamber geometry with unequal-sized electrodes, modeling of the plasma space is an issue to be investigated. In this paper, it is focused on that how much a 1D model can approximate a 2D model. 1D fluid models with unequal-sized electrodes, which have spherical and frustum geometry systems, were developed and their results were compared with those of 2D model with Gaseous Electronic Conference cell structure. Behavior of $N_2$ RF plasmas has been simulated using 1D and 2D fluid models and a technique to take account of unequal-sized electrodes in a 1D fluid models has been examined. Features of the plasma density and the electric potential were discussed as characteristic quantities representing the asymmetry of the chamber geometry.
Keywords
RF(Radio frequency) Plasmas; Fluid Models; Plasma Space; Electric Potential;
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