• Membrane Journal
• /
• v.26 no.4
• /
• pp.291-300
• /
• 2016

Techniques for selectively separating molecules of gas and liquid states using various separation membranes have been widely used in variety of applications such as chemical, biological, pharmaceutical, and petrochemical industries. As the nanochannel diameter, inter-channel distance and length of the nanochannel of the anodic aluminum oxide (AAO) membranes can be precisely controlled, various studies to effectively separate mixture of various molecules using AAO membrane have been widely carried out. In this study, we fabricated AAO membranes of cylindrical nanochannels of various diameter sizes and of through-hole structure, that is, nanochannels of which both ends of each nanochannel are open. Using those AAO membranes of through-hole nanochannel structure, we studied the selective permeation polymer chains dissolved in a solvent based on hydraulic volume of the polymer chains. We found a precise, quantitative relationship between the radius of gyration of polymer chains that permeated through nanochannels inside AAO membrane and the diameter of nanochannels. In addition, we demonstrate that the behavior of the polymer solution flowing through nanochannel of the AAO membrane can be successfully described with the Hagen-Poiseuille relationship. It is, therefore, possible to theoretically interpret the nanoflow of the solution flowing inside the cylindrical nanochannel.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2003.03a
• /
• pp.53-53
• /
• 2003

There has been increasing interest in the fabrication of nano-sized structures because of their various advantages and applications. Anodic Aluminum Oxide (AAO) is one of the most successful methods to obtain highly ordered nano pores and channels. Also It can be obtained diverse pore diameter, density and depth through the control of anodization condition. The three types of substrates were used for anodization; sheets of Aluminum on Si wafer and Aluminum on Mo-coated Si wafer. In Aluminum sheet, a highly ordered array of nanoholes was formed by the two step anodization in 0.3M oxalic acid solutions at 10$^{\circ}C$ After the anodization, the remained aluminum was removed in a saturated HgCl$_2$ solution. Subsequently, the barrier layer at the pore bottom was opened by chemical etching in phosphoric acid. Finally, we can obtain the through-channel membrane. In these processes, the effect of various parameters such as anodizing voltage, anodizing time, pore widening time and pre-heat treatment are characterized by FE-SEM (HITACH-4700). The pore size. density and growth rate of membrane are depended on the anodizing voltage and temperature respectively. The pore size is proportional to applied voltage and pore widening time The pore density can be controlled by anodizing temperature and voltage.

• Korean Journal of Materials Research
• /
• v.12 no.7
• /
• pp.540-544
• /
• 2002

Hydration treatments were performed on the pure aluminum substrate at $100^{\circ}C$ followed by anodizing and heat treatments on the layers. The transformation behaviors of the oxide layers according to the hydration treatment were studied using TEM, XRD, RBS etc. Above $90^{\circ}C$ the hydrous oxide film could be formed, which were turned out to be hydrous oxides(AlOOH $nH_2$O). The anodization on the hydrous oxide film was more effective for the transition of amorphous anodic oxides to the crystalline $\Upsilon-Al_2$ $O_3$ comparing with the case for anodizing on the aluminum substrate without hydration treatment And additional heat treatments were also helpful for the acceleration of the transformation of the hydrous oxide to $\Upsilon-Al_2$ $O_3$. During the heat treatment the interface between $\Upsilon-Al_2$ $O_3$and the hydrous oxide layers migrated to the outer side of hydrous layer.

• Journal of Electrical Engineering and Technology
• /
• v.10 no.6
• /
• pp.2364-2367
• /
• 2015

In this study, we fabricated an electrolyte-insulator-metal (EIM) device incorporating a high-k Al₂O₃ sensing membrane using a porous anodic aluminum oxide (AAO) through a two-step anodizing process for pH detection. The structural properties were observed by field-emission scanning electron microscopy (FE-SEM) and X-ray diffraction patterns (XRD). Electrochemical measurements taken consisted of capacitance-voltage (C-V), hysteresis voltage and drift rates. The average pore diameter and depth of the AAO membrane with a pore-widening time of 20 min were 123nm and 273.5nm, respectively. At a pore-widening time of 20 min, the EIM device using anodic aluminum oxide exhibited a high sensitivity (56mV/pH), hysteresis voltage (6.2mV) and drift rate (0.25mV/pH).

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.33-33
• /
• 2011

반도체 산업기술이 발달함에 따라 고청정 공정 환경이 요구되고 있으며, 반도체 공정용 장비에 이용되는 부품 중 양극산화피막법(Anodizing)으로 피막을 성장시킨 anodic aluminum oxide (AAO)부품은 플라즈마에 의해 화학적, 물리적 침식이 발생하여 코팅막과 모재에 손상을 일으키며 코팅막이 깨지거나 박리되면서 다량의 Particle이 생성됨으로써 공정상의 여러 가지 문제를 야기 시킨다고 알려져 있다. 하지만 코팅막을 평가하는 방법은 거의 전무하며 기본물성 측정방법인 피막두께, 내전압, 임피던스, 내식성 측정방법을 통하여 여러 기본물성측정방법으로 부품의 평가기술을 연구하였다. 본 연구에서는 이러한 진공 부품의 하나인 anodic aluminum oxide (AAO)부품샘플을 누설전류 및 내전압 측정하여 샘플의 전기적 특성을 측정하였고, 표면 미세구조의 변화를 관찰하였다. 부식실험으로는 HCl 가스를 발생시켜 부식정도를 알아봤으며, 부식처리와 플라즈마 처리 모두 코팅 막의 손상과 전기적 특성의 감소를 보였다. 진공장비 전극 부품평가의 유익한 평가 항목으로서 플라즈마 데미지를 주는 도중에 실시간으로 부품평가에 따른 Particle을 측정함으로써 ISPM 장비를 이용하여 진공 장비용 코팅부품이 플라즈마공정에서 발생하는 오염입자를 측정할 수 있는 방법을 연구하였다. 이러한 결과를 이용하여 진공공정에서 사용되는 코팅부품이 플라즈마에 의한 손상정도를 정량화 하고 평가방법을 개발하여 진공장비용 공정 중 실시간으로 부품의 성능평가가 가능하고 코팅부품 신뢰성 향상이 가능할 것으로 본다.

• Journal of the Korean Ceramic Society
• /
• v.45 no.4
• /
• pp.191-195
• /
• 2008

Highly ordered silver nanowire with a diameter of 10 nm was arrayed by electroless deposition in a porous anodic aluminum oxide(AAO) membrane. The AAO membrane was fabricated electrochemically in an oxalic acid solution via a two-step anodization process, while growth of the silver nanowire was initiated by using electroless deposition at the long-range-ordered nanochannels of the AAO membrane followed by thermal reduction of a silver nitrate aqueous solution by increasing the temperature up to $350^{\circ}C$ for an hour. An additional electro-chemical procedure was applied after the two-step anodization to control the pore size and channel density of AAO, which enabled us to fabricate highly-ordered silver nanowire on a large scale. Electroless deposition of silver nitrate aqueous solution into the AAO membrane and thermal reduction of silver nanowires was performed by increasing the temperature up to $350^{\circ}C$ for 1 h. The morphologies of silver nanowires arrayed in the AAO membrane were investigated using SEM. The chemical composition and crystalline structure were confirmed by XRD and EDX. The electroless-deposited silver nanowires in AAO revealed a well-crystallized self-ordered array with a width of 10 nm.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.33 no.2
• /
• pp.114-117
• /
• 2020

In this study, we performed the deposition of Al thin film using a DC magnetron sputtering method. To evaluate electrical and structural properties, the growth conditions were changed in terms of two functions, namely, sputtering power ranging from 41.6 to 216 W and film growth rate ranging from 5.35 to 26.39 nm/min. The growth rate and the microstructure were characterized by a scanning electron microscopy and X-ray diffraction analysis. The plane of crystalline growth showed that the preferential (111) direction and defects due to the grain boundary increased with DC power. The resistivity of the Al film over 50 nm showed a constant value by horizontal grain growth. Our results can be applicable for the preparation of nano-templates for anodic aluminum oxide.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2007.08a
• /
• pp.593-596
• /
• 2007

A possibility of manufacturing bendable ac-PDP using aluminum electrode with anodic aluminum oxide dielectric material system on PET film substrate was explored. For this structure, PET film with fence-structured aluminum electrodes was used for front plate and PET film with barrier ribs of UV curable resin for the rear plate. The results demonstrate that it is feasible to manufacture the bendable ac-PDPs using those material system and are expected to expand the applications of plasma display panels.

• Journal of the Korean institute of surface engineering
• /
• v.54 no.5
• /
• pp.222-229
• /
• 2021

Icing causes various serious problems, where water vapor or water droplets adhere at cold conditions. Therefore, understanding of ice adhesion on solid surface and technology to reduce de-icing force are essential for surface finishing of metallic materials used in extreme environments and aircrafts. In this study, we controlled wettability of aluminum alloy using anodic oxidation, hydrophobic coating and lubricant-impregnation. In addition, surface porosity of anodized oxide layer was controlled to realize superhydrophilicity and superhydrophobicity. Then, de-icing force on these surfaces with a wide range of wettability and mobility of water was measured. The results show that the enhanced wettability of hydrophilic surface causes strong adhesion of ice. The hydrophobic coating on the nanoporous anodic oxide layer reduces the adhesion of ice, but the volume expansion of water during the freezing diminishes the effect. The lubricant-impregnated surface shows an extremely low adhesion of ice, since the lubricant inhibits the direct contact between ice and solid surface.

• Korean Journal of Materials Research
• /
• v.13 no.9
• /
• pp.593-597
• /
• 2003

Anodic aluminum oxide (AAO) membrane was made of aluminum sheet (99.6%, 0.2 mm thickness). The regular array of hexagonal nano pores or channels were prepared by two step anodization process. A detail description of the AAO fabrication is presented. After the 1st anodization in oxalic acid (0.3 M) at 45 V, The formed AAO was removed by etching in a solution of 6 wt% $H_3$$PO_4$＋1.8 wt% $H_2$$CrO_4$. The regular arrangement of the pores was obtained by the 2nd anodization, which was carried out in the same condition as the 1st anodization. Subsequently, the alumina barrier layer at the bottom of the channel layer was removed in phosphoric acid (1M) after removing of aluminum. Pore diameter, density, and thickness could be controlled by the anodization process parameters such as applied voltage, anodizing time, pore widening time, etc. The pore diameter is proportional to the applied voltage and pore widening time. The pore density and thickness can be controlled by anodization temperature and voltage.