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http://dx.doi.org/10.5370/JEET.2015.10.6.2364

Structural and Electrical Properties of an Electrolyte-insulator-metal Device with Variations in the Surface Area of the Anodic Aluminum Oxide Template for pH Sensors  

Kim, Yong-Jun (Dept. of Ceramic Engineering, RIGET, Gyeongsang National University)
Lee, Sung-Gap (Dept. of Ceramic Engineering, RIGET, Gyeongsang National University)
Yeo, Jin-Ho (Dept. of Ceramic Engineering, RIGET, Gyeongsang National University)
Jo, Ye-Won (Dept. of Ceramic Engineering, RIGET, Gyeongsang National University)
Publication Information
Journal of Electrical Engineering and Technology / v.10, no.6, 2015 , pp. 2364-2367 More about this Journal
Abstract
In this study, we fabricated an electrolyte-insulator-metal (EIM) device incorporating a high-k Al2O3 sensing membrane using a porous anodic aluminum oxide (AAO) through a two-step anodizing process for pH detection. The structural properties were observed by field-emission scanning electron microscopy (FE-SEM) and X-ray diffraction patterns (XRD). Electrochemical measurements taken consisted of capacitance-voltage (C-V), hysteresis voltage and drift rates. The average pore diameter and depth of the AAO membrane with a pore-widening time of 20 min were 123nm and 273.5nm, respectively. At a pore-widening time of 20 min, the EIM device using anodic aluminum oxide exhibited a high sensitivity (56mV/pH), hysteresis voltage (6.2mV) and drift rate (0.25mV/pH).
Keywords
Nanostructures; Electrochemical properties;
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