• 센서학회지
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• 제13권3호
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• pp.182-187
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• 2004

The fluorinated amorphous carbon thin films (a-C:F) were deposited by PECVD(plasma enhanced chemical vapor deposition). The precursors were $C_{4}F_{8}$ which had a similar ratio of target film's carbon to fluorine ratio, and $Si_{2}H_{6}$/He for capturing excessive fluorine ion. We varied deposition condition of temperature and working pressure to survey the effect of each changes. We measured dielectric constant, composition, and etc. At low temperature the film adhesion to substrate was very poor although the growth rate was very high, the growth rate was very low at high temperature. The EDS(energy dispersive spectroscopy) result showed carbon and fluorine peak for films and Si peak for substrate. There was no oxygen peak.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.366-366
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• 2008

Amorphous carbon (a-C) is an interesting materials and its characteristics can be varied by tuning it $sp^3$ fractions. The $sp^3$ fraction in a-C films depends on the kinetic energy of the deposited carbon ions. In this work, a-C films was synthesized on Si(100) and glass substrates at room temperature by closed-field unbalanced magnetron (CFUBM) sputtering with the increase of graphite target power density. The structural and physical properties of films were investigated by using Raman spectroscopy, X-ray photoelectron spectrometer (XPS), nano- indentation, atomic force microscope (AFM) and contact-angle measurement. We obtained the good tribological properties, such as high hardness up to 26 GPa., friction coefficient lower than 0.1 and the smooth surface (rms roughness: 0.12 nm). The increase of the physical properties with the increase of target power density are related to the increase of nano-clusters in the carbon network. Also, these results might be due to the increase of the subplantation and resputtering by the increase of ions density in the plasma.

• 한국주조공학회지
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• 제31권5호
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• pp.267-273
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• 2011

Erosion and thermal shock resistance of several refractory materials have been investigated, which are expected to be used as nozzles in a planar flow casting equipment for amorphous alloys. The test was conducted on five materials; graphite, boron nitride, fused silica, alumina and zirconia. Test specimens were preheated and dipped into the melt of carbon steel and amorphous alloys. Some test specimens were rotated to develop high erosion and to shorten the test periods. Fused silica and boron nitride specimens showed the excellent erosion and thermal shock resistance irrespective of the kind of melt and melting atmosphere.

• 공업화학
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• 제26권1호
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• pp.80-85
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• 2015

본 연구에서는 리튬이차전지의 음극활물질인 실리콘/탄소 복합소재를 제조하여 전기화학적 특성을 확인하였다. 실리콘/탄소 합성물은 마그네슘의 열 환원 반응을 통해 SBA-15 (Santa Barbara Amorphous material No. 15)를 제조한 후 페놀 수지의 탄화 과정을 통해 합성하였다. 실리콘/탄소를 음극으로 제조하여 충방전, 사이클, 순환전압전류, 임피던스 테스트를 통해 분석하였다. 실리콘에 코팅된 탄소는 전기 전도도를 향상시켜 Rct값을 235 ohm (silicon)에서 30 ohm (실리콘/탄소)으로 낮추었고 리튬의 탈 삽입 시에 발생하는 실리콘의 팽창을 억제하여 전극을 안정화시키는 효과를 보여주었다. 실리콘/탄소 전극을 사용한 리튬이차전지는 1,348 mAh/g의 용량을 나타내었고 50사이클 동안 76%의 안정성을 보여주었다.

• Journal of Information Display
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• 제2권3호
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• pp.72-77
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• 2001

Amorphous silicon thin-film transistors (a-Si TFTs) were incorporated into Mo-tip-based triode-type field emitters and diode-type ones of carbon nanotubes for an active-matrix cathode (AMC) plate of field emission displays. Also, we developed a novel surface-treatment process for the Mo-tip fabrication, which gleatly enhanced in the stability of field emission. The field emission currents of AMC plates on glass substrate were well controlled by the gate bias of a-Si TFTs. Active-matrix field emission displays (AMFEDs) with these AMC plates were demonstrated in a vacuum chamber, showing low-voltage matrix addressing, good stability and reliability of field emission, and highly uniform light emissions from the anode plate with phosphors. The optimum design of AMFEDs including a-Si TFTs and a new light shield/focusing grid is discussed.

• 한국전기전자재료학회논문지
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• 제28권11호
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• pp.694-697
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• 2015

We investigated the characterizations of carbon films fabricated by dual magnetron sputtering under various RF powers for the improvement of physical properties in carbon fiber (CF). All sputtered carbon films exhibited amorphous structure, regardless of RF powers, resulting in uniform and smooth surfaces. The hardness and elastic modulus are increased with the increase of RF power, and the adhesion and friction properties of carbon films were improved with the increase of RF power. In the results, The increase of RF power in the sputtering method improved tribological properties of the carbon films, and these attributes can be expected to improve the physical properties of the carbon fiber reinforcement plastics.

• 한국레이저가공학회지
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• 제5권2호
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• pp.17-22
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• 2002

Characteristics of micro carbon structures fabricated with laser-induced chemical vapor deposition (LCVD) are investigated. An argon ion laser (λ＝514.5nm) and ethylene gas were utilized as the energy source and precursor, respectively. The laser beam was focused onto a graphite substrate to produce carbon deposit through thermal decomposition of the precursor. Average growth rate of a carbon rod increased for increasing laser power and pressure. Micro carbon rods with good surface quality were obtained at near the threshold condition. Micro carbon rods with aspect ratio of about 100 and micro tubular structures were fabricated to demonstrate the possible application of this method to the fabrication of three-dimensional microstructures. Laser Raman spectroscopic analysis of the micro carbon structures revealed that the carbon rods are consisting of amorphous carbon.

• 한국진공학회지
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• 제7권3호
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• pp.242-247
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• 1998

DC saddle-field-plasma-enhanced chemical-vapor deposition(PECVD) 장치를 이용 하여 상온에서 p-type Si(100)기판위에 hydrogenated amorphous carbon nitride [a-C:H(N)] 박막을 증착하였다. 원료가스인 $CH_4$과 $N_2$의 전체압력은 90mTorr로 고정하고 $N_2/CH_4$비를 0 에서 4까지 변화하면서 제작한 a-C:H(N)박막의 미세구조의 변화를 연구하였다. 진공조의 도달 진공도는 $1\times10^{-6}$Torr이고, 본 실험시 $N_2+CH_4$가스의 유량은 5sccm으로 고정하고 배 기량을 조절하여 진공조의 가스 압력을 90mTorr로 고정하였으며 기판에 200V의 직류 bias 전압을 인가하였다. $\alpha$-step과 X-ray photoelectron spectroscopy(XPS)를 이용한 분석결과 $N_2/CH_4$비가 0에서 0.5로 증가함에 따라 박막 두께는 4840$\AA$에서 2600$\AA$으로 급격히 감소하 였으며, 박막내의 탄소에 대한 질소함유량(N/C비)는 N2/CH4비가 4일 때 최대 0.25로 증가하 는 것을 확인하였다. 또한 XPS 스펙트럼의 fitting 결과 $N_2/CH_4$비가 증가할수록 CN결합이 증가하였다. Fourier Transformation Infrared(FT-IR) 분석결과 $N_2/CH_4$비가 증가함에 따라 박막내의 C-H결합은 감소하고, N-H, C≡N결합은 증가하였다. Optical bandgap 측정 결과 $N_2/CH_4$비가 0에서 4로 증가함에 따라 a-C:H(N)박막의 bandgap 에너지는 2.53eV에서 2.3eV 로 감소하는 것을 확인하였다.

• 한국건설순환자원학회논문집
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• 제6권4호
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• pp.357-364
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• 2018

플라이애시는 콘크리트의 혼화재로서 사용되는 재료로, 이를 콘크리트 제조에 사용할 경우 시멘트 사용량 감소 및 내화학성 증가와 같은 성능 향상을 기대할 수 있다. 하지만 플라이애시는 미연탄소 함유량 및 표면에 존재하는 유리질의 박막과 같은 문제점이 지적되고 있다. 다량의 미연탄소를 함유하는 플라이애시를 사용하여 콘크리트를 제조할 경우, AE제의 흡착 현상에 의해 슬럼프가 저하되는 문제점이 동반된다. 또한, 입자 표면에 존재하는 유리질 박막은 플라이애시로부터 반응성 물질이 용출되는 것을 방해하여 화학 반응이 일어나지 못하게 만드는 역할을 한다. 지금까지 이러한 플라이애시의 문제점을 해결하기 위하여 플라즈마를 이용한 표면개질 방안이 연구되었으나, 플라즈마는 $O_2$가 활성기체로서 사용될 경우 $O_3$를 발생시키는 문제점을 지니고 있다. 따라서 본 연구에서는 아크방전을 이용해 플라이애시의 표면을 개질하는 방안에 관한 연구를 진행하였으며, 그에 따른 플라이애시의 물리 화학적 특성 변화를 확인하였다. 실험 결과, 아크방전을 이용해 플라이애시의 표면을 개질할 경우 미연탄소가 제거되며 유리질 박막이 파괴되는 것을 확인하였다.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.59-60
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• 2002

In this digest, we briefly review our current molecular dynamics (MD) simulations that utilize both the reactive empirical bond order potential (REBO) and the adaptive intermolecular REBO (AIREBO) potential energy functions. The AIREBO potential includes intermolecular interactions, so that self·assembled monolayers, and liquids, can be modeled. We have examined the mechanical and tribological properties of model self assembled monolayers and amorphous carbon films. Self-assembled monolayers are modeled by covalently bonding hydrocarbon chains to diamond substrates. Because the REBO potentials can model chemical reactions, specific compression and sliding induced chemical reactions were identified.