Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.06a
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- Pages.366-366
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- 2008
The effect of target power density on physical and structural properties of amorphous carbon films prepared by CFUBM sputtering
비대칭 마그네트론 스퍼터링으로 합성된 비정질 탄소박막의 물리적, 구조적 특성에서 타겟 파워 밀도의 영향
- Lee, Jae-Hee (Sungkyunkwan Univ.) ;
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Park, Yong-Seob
(Sungkyunkwan Univ.) ;
- Park, Jae-Wook (Sungkyunkwan Univ.) ;
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Hong, Byung-You
(Sungkyunkwan Univ.)
- Published : 2008.06.19
Abstract
Amorphous carbon (a-C) is an interesting materials and its characteristics can be varied by tuning it