• The Transactions of The Korean Institute of Electrical Engineers
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• v.66 no.6
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• pp.962-967
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• 2017

The Diamond-Like-Carbon (DLC) coating is a new carbon-based amorphous material. Carbon ions in the plasma are electrically accelerated and collide with the substrate to form a thin film. This film has similar properties to diamonds such as high surface hardness, low coefficient of friction, corrosion resistance and durability that do not react with acids and bases. Also, since there is no thermal deformation, it can be printed at room temperature. and coated on almost all materials such as paper, polymer, ceramics and various metals even aspheric lens it is possible to mirror surface coating with excellent surface roughness. In this paper, we have analyzed the DLC film formed by Filtered Arc Ion Plating (Filtered AIP) process.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.10a
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• pp.200-200
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• 2009

아크이온플래이팅 기술과 DC 마그네트론 스퍼터링 기술이 결합된 하이브리드 코팅 시스템을 이용하여 STS 304와 Si 기판에 4성분계 CrAlCxN1-x 코팅을 증착하였다. 합성된 CrAlCxN1-x 코팅은 주로 유도결합형로 f구성되었다. CrAlCxN1-x 코팅의 carbon 함량이 0.17 at.%일 때 약 34 GPa을 나타내었으며 마찰계수는 carbon 함량이 0에서 1 at.%로 증가함에 따라 0.82에서 0.38까지 크게 감소하였다. 이는 코팅 표면과 steel 볼 사이에 amorphous carbon layer가 형성되어 고체윤활제로 작용한 것으로 사료된다.

• Tribology and Lubricants
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• v.35 no.6
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• pp.362-368
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• 2019

In this study, mechanical and tribological properties were investigated by varying the process temperature (50, 100, 125 and 150℃) to reduce internal stress. The internal stress reduction by thermal dissociation ta-C coating film with increasing temperature is confirmed through the curvature radius of the ta-C coating according to the temperature of the SUS plate. As the coating temperature increased, the mechanical properties (hardness, modulus, toughness) deteriorated, which is in agreement with the Raman analysis results. As the temperature increased, the sp² phase ratio increased owing to the dissociation of the sp³ phase. The friction and wear properties are related to the process temperature during ta-C coating. Low friction and wear properties are observed in high hardness samples manufactured at 50℃, and wear resistance properties decreased with increasing temperature. The contact area is expected to increase owing to the decrease of hardness(72 GPa to 39 GPa) and fracture toughness with increasing temperature which accelerated wear because of the debris generated. It was confirmed that at process temperature of over than 100℃, the bond structure of the carbon film changed, and the effect of excellent internal stress was reduced. However, the wear resistance simultaneously decreased owing to the reduction in fracture toughness. Therefore, in order to increase industrial utilization, optimum temperature conditions that reduce internal stress and retain mechanical properties.

• Journal of the Korean Vacuum Society
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• v.12 no.1
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• pp.35-39
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• 2003

Using RF plasma enhanced chemical vapor deposition, amorphous carbon films were grown in pure methane plasma. Field electron emission of these films were examined at a function of deposition temperature. It was found that the electron emission current of the sample prepared at deposition temperature above $600^{\circ}C$ was considerably improved. The film grown at deposition temperature of $800^{\circ}C$ had the best threshold field of 8 V/$\mu\textrm{m}$ in this experiment. According to the results of Raman spectroscopy. growth of graphite crystallites was promoted with higher deposition temperatures. Moreover the surface morphology was abruptly changed at deposition temperature above $600^{\circ}C$. We discuss the field electron emission characteristics of amorphous carbon films with regard to the structural feature and surface morphology.

• Journal of the Korean Ceramic Society
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• v.40 no.12
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• pp.1213-1219
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• 2003

Porous ceramics for microoganism carriers were prepared with amorphous alumina and pore formers by hydrothermal reaction, burn-out and wash-out method. Activated carbon with average size of 67,222, and 405 $\mu\textrm{m}$, organic polymer and inorganic salt were used as pore formers. Specimens were hydrothermally treated at 200$^{\circ}C$ for 24 h, heat-treated at 650$^{\circ}C$ for 5 h, and washed out at 80$^{\circ}C$ for 48 h. The formation of crystalline phase, porosity, pore size distribution and compressive strength were measured. The specimen with activated carbon was transformed to boehmite phase, but organic polymer and inorganic salt inhibited the aquohydroxoy complex gel and crystalline formation. The porous ceramics for microoganism carriers using activated carbon as a pore formers was successfully prepared, which is composed of ${\gamma}$-alumina phase with porosity of above 70 vol% and the compressive strength of 40 kgf/$\textrm{cm}^2$.

• 한국해양학회지
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• v.22 no.2
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• pp.87-104
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• 1987

The middle Cretaceous stratigraphec section of Deep Sea Drilling Project (DSDP) Site 530 in the Angola Basin is characterized by cyclic interbeds of organic-carbon-rich black shales and organic-carbon-poor red and green claystones, namely the black shale sequence. A number of samples from the black shale sequence were analyzed for the typesand distribution of insoluble sedimentary organic matter(kerogen) in order to give more information on the depositional conditions of the black shales in the Angola Basin. The dominant type of kerogen in the black shale sequence at Site 530 is amorphous organic matter mainly of marine planktonic algal origin. It probably consists of remains of some unfossiliqed dinoflagellates. The cyclic preservation of organic-carbon-rich black shales in the Angola Basin during the mid-Cretaceous could be explained by the low dissolved-oxygen concentration in the warm, saline deep and bottom waters combined with the sluggish circulation within the highly restricted basin, and the periodic high productivity in the surface waters.

• Korean Journal of Metals and Materials
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• v.49 no.4
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• pp.321-328
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• 2011

The 30 nm-thick Ni layers was deposited on a flexible polyimide substrate with an e-beam evaporation. Subsequently, we deposited a Si layer using a catalytic CVD (Cat-CVD) in a hydride amorphous silicon (${\alpha}$-Si:H) process of $T_{s}=180^{\circ}C$ with varying thicknesses of 55, 75, 145, and 220 nm. The sheet resistance, phase, degree of the crystallization, microstructure, composition, and surface roughness were measured by a four-point probe, HRXRD, micro-Raman spectroscopy, FE-SEM, TEM, AES, and SPM. We confirmed that our newly proposed Cat-CVD process simultaneously formed both NiSi and crystallized Si without additional annealing. The NiSi showed low sheet resistance of < $13{\Omega}$□, while carbon (C) diffused from the substrate led the resistance fluctuation with silicon deposition thickness. HRXRD and micro-Raman analysis also supported the existence of NiSi and crystallized (>66%) Si layers. TEM analysis showed uniform NiSi and silicon layers, and the thickness of the NiSi increased as Si deposition time increased. Based on the AES depth profiling, we confirmed that the carbon from the polyimide substrate diffused into the NiSi and Si layers during the Cat-CVD, which caused a pile-up of C at the interface. This carbon diffusion might lessen NiSi formation and increase the resistance of the NiSi.

• The Journal of Engineering Research
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• v.5 no.1
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• pp.73-87
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• 2004

The synthesis and crystallization of amorphous calcium carbonate($CaCO_3$.$nH_2 O$) obtained from gas-liquid reaction between aqueous solution of calcium hydroxide and carbon dioxide at 15~$50^{\circ}C$ are investigated by electrical conductometry, XRD and TEM. The results are as follows: The initial reaction products prior to the formation of precipitated calcium carbonate is amorphous calcium carbonate. The electrical conductivity values in the slurry are decreased during the formation of amorphous calcium carbonate which covers particle surface of calcium hydroxide and retard the dissolution of calcium hydroxide into the solution. that amorphous calcium carbonate is unstable in the aqueous solution and crystallizes finally to calcite by the through-solution reaction. While amorphous calcium carbonate crystallizes into chain-like calcite, the conductivity values are recovered rapidly and the apparent viscosity of slurry containing higher concentration of calcium hydroxide increase. At below pH 9.5, chain-like calcite separates into individual particles to form precipitated calcium carbonate. The formation and synthetic temperature range of amorphous calcium carbonate is most suitable a primary decreasing step(a-step) at $15^{\circ}C$ in the electrical conductometry.

• ETRI Journal
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• v.26 no.3
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• pp.257-261
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• 2004

We grew amorphous SiCN films by pulsed laser deposition using mixed targets. The targets were fabricated by compacting a mixture of SiC and $SiC-{Si_3}{N_4}$ powders. We controlled the film stoichiometry by varying the mixing ratio of the target and the target-to-substrate distance. The mixing ratio of the target had a dominant effect on the film composition. We consider the structures of the SiCN films deposited using 30~70 wt.% SiC in the target to be an intermediate phase of SiC and $SiN_x$. This provides the possibility of growing homogeneous SiCN films with a mixed target at a moderate target-to-substrate distance.

• Journal of the Korean Vacuum Society
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• v.6 no.S1
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• pp.137-140
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• 1997

A cathodic arc with beam filter is employed for the deposition of metallic and hydrogen-free amorphous carbon films. A solenoid filter is used to prevent macropaticles and nonionized atoms from reaching the substrate. The detail transport characters of the filter are presented in the paper. With an optmum filter arrangement we are able to obtain a filter output of 18.4% of the total number of ions produced by the vacuum arc discharge. The deposited amorphous cabon thin film contains no hydrogen and a high fraction of $sp^3$ is determined by XPS. A dense Ti film deposited on H13 steel improves the corrosion resistance of the H13 steel and significant improvements of corrosion resistance were observed by implanting Ti, C in the film.