Electrical Characteristic of AI/AIN/GaAs MIS capacitor Fabricated by Reactive Sputtering Method for the (NH4)2S Treatment (반응성 스퍼터링법으로 AI/AIN/GaAs 커패시터 제조시 (NH4)2S 처리에 따른 전기적 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.20 no.1
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- pp.8-13
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- 2007