Electrical Characteristic of AI/AIN/GaAs MIS capacitor Fabricated by Reactive Sputtering Method for the (NH4)2S Treatment |
Chu, Soon-Nam
(경원전문대학 전기제어시스템과)
Kwon, Jung-Youl (경원전문대학 전기제어시스템과) Park, Jung-Cheul (경원전문대학 전자정보과) Lee, Heon-Yong (명지대학교 전기공학과) |
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