• Proceedings of the Materials Research Society of Korea Conference
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• 2009.11a
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• pp.44.2-44.2
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• 2009

Polycrystalline materials suchas yttria and alumina have been applied as a plasma resisting material for the plasma processing chamber. However, polycrystal line material may easily generate particles and the particles are sources of contamination during the plasma enhanced process. Amorphous material can be suitable to prevent particle generation due to absence of grain-boundaries. We manufactured nitrogen-containing $SiO_2-Al_2O_3-Y_2O_3$ based glasses with various contents of silicon and fixed nitrogen content. The thermal properties, mechanical properties and plasma etching rate were evaluated and compared for the different composition samples. The plasma etching behavior was estimated using XPS with depth profiling. From the result, the plasma etching rate highly depends on the silicon content and it may results from very low volatile temperature of SiF4 generated during plasma etching. The silicon concentration at the plasma etched surface was very low besides the concentration of yttrium and aluminum was relatively high than that of silicon due to high volatile temperature of fluorine compounds which consisted with aluminum and yttrium. Therefore, we conclude that the samples having low silicon content should be considered to obtain low plasma etching rate for the plasma resisting material.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.7
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• pp.667-672
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• 2006

Ferroelectric $Pb(Zr_{0.52}Ti_{0.48})O_3$ (PZT(52/48)) thick films were fabricated by the screen-Printing method on the alumina substrates, and $PbTiO_3$ (PT) Precursor solution, which prepared by sol-gel method, was spin-coated on the PZT(52/48) thick films to obtain a densification. Its structural and electrical properties of the PZT(52/48) thick films with the treatment of PT precursor solution coating were investigated. The particle size of the thick films was increased with increasing the number of coatings and the thickness of the PZT-6 (6: number of coatings) films was about $60{\mu}m$. The relative dielectric constant increased and the dielectric loss decreased with increasing the number of PT sol coatings. The relative dielectric constant and dielectric loss of the PZT-6 thick film were 475 and 2 %, respectively. The remanent polarization, coercive field and breakdown strength of the PZT-6 film were $32.6{\mu}C/cm^2$, 15 kV/cm and 60 kV/cm, respectively.

• Journal of the Korea Computer Industry Society
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• v.8 no.1
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• pp.17-22
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• 2007

Carbon nanotubes (CNTs) were grown by a thermal chemical vapor deposition (CVD) method, which has been regarded as one of the most promising candidates for the synthesis of CNTs due to low cost and high growth yield. The Ethylene $(C_2H_4)$, hydrogen $(H_2)$ and Argon(Ar) gases were used for the growth of CNTs at $700^{\circ}C$. As a catalyst for CNTs growth, Fe thin film and Iron nitrate and Molybdenyl acetylacetonate solution with alumina nano-particle were prepared on $SiO_2/Si$ substrate. The growth properties of CNTs were analyzed by SEM and AFM.

• Aerospace Engineering and Technology
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• v.7 no.2
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• pp.131-143
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• 2008

Slag mass deposition was required to predict performance accurately of KSLV-I kick motor(KM) system. The validation of the numerical analysis was performed with mass flow rate measured at 4th ground test of the KM. The study described here included internal flow field of KM at various time steps during burning. Slag mass accumulation was computed through the aluminum oxide particle paths to deviate from the gas flow streamlines in flight. These numerical analysis was performed with Fluent 6.3 program The effects for the acceleration, origins and diameters of the aluminum oxide particles was analyzed, finally the total slag mass accumulation was acquired. We confirmed that the slag mass deposition was agreement well with predicted slag mass based on kick motor the grounded test.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.6
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• pp.499-502
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• 2008

In this work, Ga-doped ZnO (GZO) thin films for gas sensor application were deposited on low temperature co-fired ceramics (LTCC) substrates, by RF magnetron sputtering method. The LTCC substrate is one of promising materials for this application since it has many advantages (e.g., low cost production, high manufacturing yields and easy realizing 3D structure etc.). The LTCC substrates with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The structural properties of the fabricated GZO thin film with thickness of 50 nm is analyzed by X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM). The film shows good adhesion to the substrate. The GZO gas sensors are tested by gas measurement system and show fast response and recovery characteristics to $NO_x$ gas that is 27.2 and 27.9 sec, recpectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.57-58
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• 2006

In MIM (metal insulator metal) capacitor, Ru (ruthenium) has been suggested as new bottom electrode due to its excellent electrical performance, a low leakage of current and compatibility to the high dielectric constant materials. In this case of Ru bottom electrode, CMP (chemical mechanical planarization) process was needed m order to planarize and isolate the bottom electrode. In this study, the effect of chemical A on polishing and etching behavior was investigated as functions of chemical A concentration, abrasive particle and pressure. Chemical A was used as oxidant and etchant. The thickness of passivation layer on the treated Ru surface increased with the increase of chemical A concentration. The etch rate and removal rate of Ru were increased by the addition of chemical A. The removal rate was highest m slurry of pH 9 with the addition of 0.1 M chemical A and 2 wt% alumina at 4 psi. The maximum removal rate is about 80 nm/min.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2009.05a
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• pp.53-56
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• 2009

In this paper, performance evaluation of catalyst for hydrogen peroxide thruster with drying condition is described. Platinum was selected as a catalyst, and alumina of pellet type was chosen as a catalyst support. Evaporation method known as general method for catalyst production was used to make the catalyst. From previous experiments, it is favorable during catalyst making process that solution of active material has low pH level. Therefore, some kinds of low pH level solution had been tested. The drying temperatures are 25, 50, 70, and $90^{\circ}C$. From experimental results, it shows better performance that drying temperature was $90^{\circ}C$ since the catalyst particle could not be crystallized but be evenly spreaded out due to the rapid evaporation of solvent.

• Journal of the Korean GEO-environmental Society
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• v.9 no.7
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• pp.37-43
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• 2008

The unconfined compressive strength of soil-cement mixed with red mud, an industrial by-product of alumina production, was investigated in the laboratory. The investigation involved laboratory tests under the various conditions such as red mud content, cement content, fly ash content and ratio of soil replacement with sands. The unconfined compressive strength tests were performed at 7, 14 and 21 days after specimen preparation. Results of the study show that the unconfined compressive strength increased as red mud and fly ash content decreased and cement content increased. Increasing the soil replacement ratio with sands had an insignificant effect on compressive strength because the soil had a similar particle size as the replacement sands.

• Journal of the Korean Ceramic Society
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• v.28 no.4
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• pp.338-346
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• 1991

The alumina-titania composite powders coated with Al2O3 were prepared by the method of hydrolysis-deposition of mixed aluminium salt solution of Al2(SO)4-Al(NO3)3-Urea. The effects of coating-process parameters on the characteristics of coated composite powders were also investigated. As the content of TiO2 dispersed in deionized water increased, the coated composite powders were found to be more uniform in size and unagglomerated. When TiO2 powders were coated for 30 min, the optimum TiO2 content in the coating process was 400 mg/ι. The size of TiO2 particle was increased approximately from 0.7${\mu}{\textrm}{m}$ to 1.0${\mu}{\textrm}{m}$ through coating of Al2O3. The IEP of coated composite powders was pH=8.3 identical to the value of aluminium hydroxides and the zeta-potential showed nearly similar values each other. When heat treating coated composite powders at 130$0^{\circ}C$, only two phases of TiO2(rutile) and Al2TiO5 were observed. These results showed that the suface of TiO2 could be uniformly coated with the aluminium hydroxide.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.27 no.5
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• pp.223-228
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• 2017

Aluminum nitride (AlN) powder was successfully synthesized at low temperature via carbothermal reduction and nitridation (CRN) assisted by microwave heating. The synthesis processes of AlN powder were investigated with X-ray diffraction, FE-SEM, FT-IR and TGA/DSC. Aluminum nitrate was used as an oxidizer and aluminum source, urea as fuel, and glucose as carbon source. These starting materials were mixed with D.I water and reacted in a flask at $100^{\circ}C$ for 20 minutes. After the reaction was finished, black foamy intermediate product was formed, which was considered to be an amorphous $Al_2O_3$ particles through intermediate product obtained by solution combustion synthesis (SCS) at the results of X-ray diffraction patterns and FT-IR. This intermediate product was nitridated at temperatures of $1300^{\circ}C$ and $1400^{\circ}C$ in $N_2$ atmosphere by a microwave heating furnace and then decarbonated at $600^{\circ}C$ for 2 hours in air. It should be noticed from FE-SEM images that as nitridated particles, identified as AlN from X-ray diffraction patterns, are covered with carbon residues. After decarbonating the nitridated powders, the spherical pure AlN powders were obtained without alumina and their particle sizes were dependent on the nitridating temperature with high temperature of $1400^{\circ}C$ giving large particles of around 70~100 nm.