Browse > Article
http://dx.doi.org/10.4313/JKEM.2008.21.6.499

Ga doped ZnO Thin Films for Gas Sensor Application  

Hwang, Hyun-Suk (요업기술원 융합기술본부)
Yeo, Dong-Hun (요업기술원 융합기술본부)
Kim, Jong-Hee (요업기술원 융합기술본부)
Song, Joon-Tae (성균관대학교 정보통신공학부)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.21, no.6, 2008 , pp. 499-502 More about this Journal
Abstract
In this work, Ga-doped ZnO (GZO) thin films for gas sensor application were deposited on low temperature co-fired ceramics (LTCC) substrates, by RF magnetron sputtering method. The LTCC substrate is one of promising materials for this application since it has many advantages (e.g., low cost production, high manufacturing yields and easy realizing 3D structure etc.). The LTCC substrates with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The structural properties of the fabricated GZO thin film with thickness of 50 nm is analyzed by X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM). The film shows good adhesion to the substrate. The GZO gas sensors are tested by gas measurement system and show fast response and recovery characteristics to $NO_x$ gas that is 27.2 and 27.9 sec, recpectively.
Keywords
Ga doped ZnO (GZO); Gas sensor; Low temperature co-fired ceramics (LTCC)$NO_x$;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 V. Khranovskyy, U. Grossner, O. Nilsen, V. Lazorenko, G. V. Lashkarev, B. G. Svensson, and R. Yakimova, 'Structural and morphological properties of ZnO:Ga thin films', Thin Solid Films, Vol. 515, p. 472, 2006   DOI   ScienceOn
2 P. K. Song, M. Watanbe, M. Kon, A. Mitsui, and Y. Shigesato, 'Electrical and optical properties of gallium-doped zinc oxide films deposited by dc magnetron sputtering', Thin Solid Films, Vol. 411, p. 82, 2002   DOI   ScienceOn
3 F. Chaabouni, M. Abaab, and B. Rezig, 'Metrological characteristics of ZNO oxygen sensor at room temperature', Sens. Actuators B, Vol. 100, p. 200, 2004   DOI   ScienceOn
4 Z. Topalian, J. M. Smulko, G. A. Niklasson, and C. G. Granqvist, 'Resistance noise in $TiO_2$-based thin film gas sensors under ultraviolet irradiation', Journal of Physics: Conference series, Vol. 76, p. 012056, 2007   DOI   ScienceOn
5 A. Nemeth, E. Horvath, Z. Labadi, L. Fedak, and I. Barsony, 'Single step deposition of different morphology ZnO gas sensing films', Sens. Actuators B, Vol. 127, p. 157, 2007   DOI   ScienceOn
6 G. N. Chaudharil, D. R. Bambolel, A. B. Bodadel, and P. R. Padolel, 'Characterization of nanosized $TiO_2$ based $H_2S$ gas sensor', J. Mater. Sci., Vol. 41, p. 4860, 2006   DOI
7 T. Pisarkiewicz, A. Sutor, P. Potempa, W. Maziarz, H. Thust, and T. Thelemann, 'Microsensor based on low temperature cofired ceramics and gas-sensitive thin film', Thin Solid Films, Vol. 436, p. 84, 2003   DOI   ScienceOn
8 S. C. Navale, V. Ravi, I. S. Mulla, S. W. Gosavi, and S. K. Kulkarni, 'Low temperature synthesis and Nox sensing properties of nanostructured Al-doped ZnO', Sens. Actuators B, Vol. 126, p. 382, 2007   DOI   ScienceOn
9 Y. S. Lee, B. S. Joo, N. J. Choi, B. H. Kang, and Y. S. Chang, 'Pattern recognition of a gas sensor array using impedance', J. Korean Phys. Soc., Vol. 37, No. 6, p. 862, 2000   DOI   ScienceOn
10 J. Xu, Q. Pan, Y. Shun, and Z. Tian, 'Grain size control and gas sensing properties of ZnO gas sensor', Sens. Actuators B, Vol. 66, p. 277, 2000   DOI   ScienceOn
11 P. S. Cho, K. W. Kim, and J. H. Lee, '$NO_2$ sensing characteristics of ZnO nanorods prepared by hydrothermal methoed', J. Electroceram., Vol. 17, p. 975, 2006   DOI
12 N. Koshizaki and T. Oyama, 'Sensing characteristics of ZnO-based Nox sensor', Sens. Actuators B, Vol. 66, p. 119, 2000   DOI   ScienceOn
13 이우선, 최권우, 박진성, 서용진, '가스센서 적용을 위한 S$NO_2$ 박막의 CMP 특성 연구', 전기전자재료학회논문지, 17권, 12호, p. 1296, 2004
14 J. F. Chang, H. K. Kuo, I. C. Leu, and M. H. Hon, 'The effects of thicknes and operation temperature on ZnO:Al thin film CO gas sensor', Sens. Actuators B, Vol. 24, p. 258, 2002
15 C. M. Ghimbeu, J. Schoonman, M. Lumbreras, and M. Siadat, 'Electorstatic spary deposited zinc oxide films for gas sensor application', Appl. Surf. Sci., Vol. 253, p. 7483, 2007   DOI   ScienceOn