• Journal of the Korean Ceramic Society
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• v.46 no.3
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• pp.306-312
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• 2009

The size of various alumina ceramics used in semiconductor and display industry is also required to increase with increase in wafer and panel size. In this research, large alumina ceramics was fabricated by filter pressing of alumina slurry using commercial powder and thereafter sintering at $1600^{\circ}C$ in gas furnace. The characteristics of large alumina ceramics thereby were compared to those of small alumina ceramics prepared by pressure forming such as uniaxial pressing and CIP. Careful control of properties of alumina slurry and filter pressing made the fabrication of large alumina ceramics possible, and its characteristics were equivalent to those of small alumina ceramics. The large alumina ceramics, prepared by sintering the green body of 63% relative density at $1600^{\circ}C$, exhibited both dense microstructure corresponding to 98.5% of relative density and 99.8% of high purity as in starting powder.

• Journal of the Korean Ceramic Society
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• v.53 no.5
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• pp.548-556
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• 2016

Recently, porous alumina-based ceramics have been extensively applied in the semi-conductor and display industries, because of their high mechanical strength, high chemical resistance, and high thermal resistance. However, the high electrical resistance of alumina-based ceramics has a negative effect in many applications due to the generation of static electricity. The low electrical resistance and high air permeability are key aspects in using porous alumina-based ceramics as vacuum chucks in the semi-conductor industry. In this study, we tailored the pore structure of porous alumina-based ceramics by adjusting the mixing ratio of the starting alumina, which has different particle sizes. And the electrical resistance was controlled by using chemical additives. The characteristics of the specimens were studied using scanning electron microscopy, mercury porosimetry, capillary flow porosimetry, a universal testing machine, X-ray diffraction, and a high-resistance meter.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09b
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• pp.1099-1100
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• 2006

The mechanical properties of ceramics materials can be tailored by designing their microstructures. We have reported that development of texture can be controlled by slip casting in a strong magnetic field followed by heating even for diamagnetic ceramics such as alumina. A strong magnetic field of 12T was applied to the suspension indcuding alumina powder to rotate each particle during slip casting. The sintering was conducted at the desired temperature in air without a magnetic field. C-axis of alumina was parallel to the magnetic field. Bending strength of textured alumina depended on the direction of oriented microstructure.

• Journal of the Korean Ceramic Society
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• v.54 no.4
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• pp.331-339
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• 2017

Porous alumina-based ceramics are of special interest due to their outstanding mechanical properties and their thermal and chemical stability. Nevertheless, the high electrical resistance of alumina-based ceramics, due to the generation of static electricity, leads to difficulty in applying a vacuum chuck in the semi-conductor process. Therefore, development of alumina-based ceramics for applications with vacuum chucks aims to have primary properties of low electrical resistance and high air permeability. In this study, we tailored the electrical resistance of porous alumina-based ceramics by adjusting the amount of $MnO_2$ (with $TiO_2$ fixed at an amount of 2 wt%) and by using coarse alumina powder for high air permeability. The characteristics of the specimens were studied using scanning electron microscopy, mercury porosimeter, capillary flow porosimetry, universal testing machine, X-ray diffraction and high-resistance meter.

• Journal of the Korean Ceramic Society
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• v.52 no.6
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• pp.403-409
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• 2015

Porous alumina ceramics are involved in many industrial applications due to the exceptional properties of these products. This study addresses the preparation of porous alumina ceramics using hollow microspheres as a pore-forming agent and slip casting as a green-body-forming technique. A uniform distribution of pores is a basic requirement of a porous material. This study investigates three different slurry systems, i.e., as-prepared alumina slurry, alumina slurry electrostatically dispersed by hydrochloric acid (HCl), and slurry dispersed by the commercial dispersant 'Darvan C-N'. At a low viscosity, the hollow microspheres in the slurry tend to float, which causes a non-uniform pore distribution. To avoid this phenomenon, the viscosity of the slurry was increased to the extent that the movement of hollow microspheres ceased in the slurry. As a result, a uniform pore distribution was achieved.

• Journal of the Korean Ceramic Society
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• v.33 no.5
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• pp.547-555
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• 1996

Porous alumina ceramics were fabricated by pseudo-boehmite phydosol-gel process within/without commercial $\alpha$-alumina particles average 1 and 40 micron respectively. The pore characteristics of fired specimens were studied by the measurement of bulk density total porosity thyermal analysis pore volume pore distribution BET area XRD and SEM. with increasing of firing temperature pore volume and BET surface area were decreased and the average pore size was increased to approximately 146$\AA$ upto 80$0^{\circ}C$ by de-watering of [OH] and formation of $\alpha$-alumina. The fired relative density of the alumina-dispersed specimen with average 1 micron particle was increased with the amounts of dispersed particle by bimodal packing theory which is compared to the ones of specimen including of average 40 micron particle. It was confirmed that the percola-tion threshold in porous ceramics with coarser particle (40 micron) has formed between the transformed-alumina from hydrogel and dispersed-alumina of above 50 vol% particle and the total porosity was increased at the threshold point above.

• Journal of the Korean Ceramic Society
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• v.47 no.6
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• pp.529-533
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• 2010

Porous frit-bonded alumina ceramics were fabricated using alumina and frit as raw materials. The effects of frit content and sintering temperature on microstructure, porosity, and flexural strength were investigated at low temperature of $750{\sim}850^{\circ}C$. Increased addition of frit content or higher sintering temperature resulted in improved flexural strength of porous frit-bonded alumina ceramics. It was possible to produce frit-bonded alumina ceramics with porosities ranging from 35% to 40%. A maximum strength of 52MPa was obtained at a porosity of ~38% when 90 wt% alumina and 10 wt% frit powders were used.

• Transactions of the Korean Society of Mechanical Engineers
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• v.14 no.3
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• pp.547-553
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• 1990

With alumina ceramics to copper brazement of cylindrical shape, the thermal stress analysis was carried out by finite element method. Elastic and plastic behaviour was considered to copper, but only elastic behaviour was considered to alumina. Also material properties of alumina and copper were considered in not constant values but variable functions dependent on temperature. The result of analysis is shown that maximum tensile longitudinal stress is occurred at perimeter of alumina side interface and maximum compressive radial and tangential stresses are occurred at center of alumina side interface. Because of bending effect, tensile raidial and tangential stresses are occurred at near bottom of alumina, far from interface.

• Journal of the Korean Ceramic Society
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• v.46 no.4
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• pp.385-391
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• 2009

Need for plasma resistant ceramic materials has been continuously increased in semiconductor and display industry requiring plasma processing to realize ultra fine circuit process. Among promising candidates, alumina ceramics have still some advantages with respect to its economic aspect. In this study, fabrication of plasma resistant alumina ceramics was tried, and its processing optimization was also aimed. Careful processing control and thereby uniform microstructure of $Al_2O_3$ gave rise to enhanced plasma resistance, even comparable to market-governing commercial $Al_2O_3$. A further study is needed concerning ${\beta}-Al_2O_3$ materials system, presumably playing a decisive role in decreasing plasma resistance of $Al_2O_3$ ceramics.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09b
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• pp.1107-1108
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• 2006

The coating of conductive polypyrrole (Ppy) on nonconductive ceramic substrates was performed by polymerization of pyrrole (Py) in an aqueous solution. The Ppy film was characterized by scanning electron microscopy and conductivity measurements. Electrophoretic deposition of bimodal alumina suspension prepared with a phosphate ester was performed using Ppy film as a cathode. Fabrication of alumina ceramics with irregular shapes or complicated patterns were also attempted by sintering the deposits together with the Ppy coated substrates in air.