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http://dx.doi.org/10.4191/kcers.2016.53.5.548

Optimization for Permeability and Electrical Resistance of Porous Alumina-Based Ceramics  

Kim, Jae (Powder and Ceramics Division, Korea Institute of Materials Science)
Ha, Jang-Hoon (Powder and Ceramics Division, Korea Institute of Materials Science)
Lee, Jongman (Powder and Ceramics Division, Korea Institute of Materials Science)
Song, In-Hyuck (Powder and Ceramics Division, Korea Institute of Materials Science)
Publication Information
Journal of the Korean Ceramic Society / v.53, no.5, 2016 , pp. 548-556 More about this Journal
Abstract
Recently, porous alumina-based ceramics have been extensively applied in the semi-conductor and display industries, because of their high mechanical strength, high chemical resistance, and high thermal resistance. However, the high electrical resistance of alumina-based ceramics has a negative effect in many applications due to the generation of static electricity. The low electrical resistance and high air permeability are key aspects in using porous alumina-based ceramics as vacuum chucks in the semi-conductor industry. In this study, we tailored the pore structure of porous alumina-based ceramics by adjusting the mixing ratio of the starting alumina, which has different particle sizes. And the electrical resistance was controlled by using chemical additives. The characteristics of the specimens were studied using scanning electron microscopy, mercury porosimetry, capillary flow porosimetry, a universal testing machine, X-ray diffraction, and a high-resistance meter.
Keywords
Alumina; Porous material; Air permeability; Electrical resistance;
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Times Cited By KSCI : 6  (Citation Analysis)
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