• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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• pp.366-369
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• 2003

The vertical fountain plating system with the point contact has been used in semiconductor industry. But the plating shape in the opening of photoresist becomes gradated shape, because bubbles from the wafer surface are difficult to escape from the deep openings, vias. So, we designed the tilted electrode ring contact to get uniform bump height on all over the wafer and evaluated the film uniformity by SEM and $\alpha$-step. A photoresist was coated to a thickness of $60{\mu}m$ and vias were patterned by a contact aligner After via opening, solder layer was electroplated using the fountain plating system and the tilted electrode ring contact system. In $\alpha$-step measurement, film uniformities in the fountain plating system and the tilted electrode ring contact system were ${\pm}16%,\;{\pm}3.7%$ respectively. In this study, we could get high uniformity bumps by the tilted electrode ring contact system. So, tilted electrode ring contact system is expected to improve workability and yield in module process.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1186-1190
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• 2003

In this paper, a valveless bubble-actuated fluid micropump was has been developed and its performance was tested. The valveless micropump consists of the lower plate, the middle plate, the upper plate and a resistive heater. The lower plate includes the nozzle-diffuser elements and the double-chamber. Nozzle-diffuser elements and a double-chamber are fabricated on the silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The lower plate also has inlet/outlet channels for fluid flow. The middle plate is made of glass and plays the role of the diaphragm. The chamber in the upper plate is filled with deionized water, and which contacts with the resistive heater. The resistive heater is patterned on a silicon substrate by Ti/Pt sputtering. Three plates and the resister heater are laminated by the aligner and bonded in the anodic bonder. Since the bubble is evaporated and condensed periodically in the chamber, the fluid flows from inlet to outlet with respect to the diffusion effect. In order to avoid backflow, the double chamber system is introduced. Analytical and experimental results show the validity of the developed double-chamber micropump.

• 대한치과교정학회지
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• 제33권1호
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• pp.21-29
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• 2003

최근 컴퓨터 소프트웨어의 발전으로 환자의 모형을 scanning하여 3차원 가상 모델을 만드는 것이 가능하게 되었다. 이러한 모델은 컴퓨터로 처리되어 치료 시작부터 끝까지 여러 단계의 치아 이동이 이루어지고, 치아 이동의 각 단계별로 stereolithographic model이 만들어 지는데, 이는 일련의 투명하고 얇은 overlay 장치를 제작하는 기초가 된다. 계획된 치아 이동의 단계에 따라 치아를 움직이기 위해서는 환자가 장치를 항상 사용해야 하며, 중정도의 crowding과 공간 폐쇄는 이 장치로 치료가 용이하다는 것이 입증되었다. 지금까지 이 장치를 경험해 본 결과, 고정성 교정장치에 비해 환자가 불편을 덜 느끼고 심미성과 구강 청결이 좋아 환자의 협조도가 뛰어 났다. 이 장치는 완전히 맹출된 영구치열 환자에서 부정교합에 대한 또 하나의 유용한 접근법이라 할 수 있다.

• 한국통신학회논문지
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• 제26권12C호
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• pp.240-248
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• 2001

본 논문에서는 현재 우리 나라의 초고속 국가기간전송망의 기본 전송장비인 2.5Gb/s SDH 전송시스템에 적용되어 2-선 양방향 선로 스위칭 링의 자기치유동작을 가능하게 하는 공간분할스위치 소자의 설계와 시스템에의 적용을 다룬다. Compass tool로 설계된 스위치 소자는 1.25Gb/s의 스위치 처리용량을 가지며 0.8$\mu\textrm{m}$ CMOS gate-array로 제작되었다. 제안된 스위치 소자는 2-선 양방향 전송선로 상에 장애가 발생했을 때 신속한 자기치유동작을 가능하게 한다. 스위치의 구조는 Add/Drop 제어부, Cross-point switch, 데이터 프레임 위상 정렬부, 비장착(Unequipped) 신호 프레이머부, 프로세서 접속부 등으로 구성된다. 제작된 2개의 스위치를 병렬구조로 구성하여 2.5Gb/s SDH 전송시스템에 적용하여 시험한 결과 임의의 광선로 장애 시 신호채널들의 링 스위칭 동작으로 즉시 복구가 가능함을 보여준다.

• 반도체디스플레이기술학회지
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• 제6권4호
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• pp.23-27
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• 2007

Rotary stages in semiconductor, display industry and many other fields require challenging accuracy to perform their functions properly. Especially, Axis of rotation error on rotary system is significant; such as the spindle error motion of the aligner, wire bonder and inspector machine which result in the poor quality products. To evaluate and improve the performance of such precision rotary stage, undesired movements on the other 5 degrees of freedom of the rotary stage must be measured and analyzed. In this paper, we have measured the three translations and two tilt motions of the worm gear type spindle with high precision capacitive sensors. To obtain the radial error motion, we have used Donaldson's reversal technique. And the axial components of the spindle tilt error motion can be obtained accurately from the axial direction outputs of sensors by Estler face motion reversal technique. Further more we have designed and developed the sensor mounting jig with standard cylinder for reversal method.

• 대한치과교정학회지
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• 제51권1호
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• pp.32-42
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• 2021

Objective: To investigate the three-dimensional forces created by clear aligners on mandibular teeth during differential activation with en-masse retraction and/or intrusion in vitro. Methods: Six sets of clear aligners were designed for differential en-masse retraction and/or intrusion procedures in a first premolar extraction model. Group A0 was a control group with no activation. Groups A1-5 underwent different degrees of retractions and/or intrusions. Each group consisted of 10 aligners. Aligner forces were measured on a multi-axis force/torque transducer measurement system in real-time. Results: In the en-masse retraction groups (A1 and A2), lingual and extrusive forces were observed on the incisors; the canines mainly received distal forces; intrusive forces were seen on the second premolars; and the molars received mesial forces. In the en-masse retraction and intrusion groups (A3, A4, and A5), incisors also received lingual and extrusive forces; canines received distal and intrusive forces; mesial and extrusive forces were seen on the second premolars; and the second molars received distal and intrusive forces. The vertical forces on the incisors did not differ significantly among groups A1, A3, and A5. However, the vertical forces on the second premolars reversed from intrusion in group A1 to extrusion in groups A3 and A5. Conclusions: With clear aligners, the "bowing effect" is seen during en-masse anterior teeth retraction and can be partially relieved by performing en-masse retraction accompanied by anterior teeth intrusion. Vertical control of incisors remained unsolved during en-masse retraction, even when intrusive activation was added to the anterior teeth.