• Title/Summary/Keyword: AlN crystal

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MgO doping and annealing effect on high temperature electrical resistivity of AlN-Y2O3 ceramics (MgO doping 및 annealing이 AlN-Y2O3 세라믹스의 고온전기저항에 미치는 영향)

  • Yu, Dongsu;Lee, Sung-Min;Hwang, Kwang-Taek;Kim, Jong-Young;Shim, Wooyoung
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.28 no.6
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    • pp.235-242
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    • 2018
  • High temperature electrical conductivity of Aluminum Nitride (AlN) ceramics sintered with $Y_2O_3$ as a sintering aid has been investigated with respect to various sintering conditions and MgO-dopant. When magnesium oxide is added as a dopant, liquid glass-film and crystalline phases such as spinel, perovskite are formed as second phases, which affects their electrical properties. According to high temperature impedance analysis, MgO doping leads to reduction of activation energy and electrical resistivity due to AlN grains. On the other hand, the activation energy and electrical resistivity due to grain boundary were increased by MgO doping. This is a result of the formation of liquid glass film in the grain boundary, which contains Mg ions, or the elevation of schottky barrier due to the precipitation of Mg in the grain boundary. For the annealed sample of MgO doped AlN, the electrical resistivity and activation energy were increased further compared to MgO doped AlN, which results from diffusion of Mg in the grains from grain boundary as shown in the microstructure.

Microstructural analysis of the single crystalline AlN and the effect of the annealing on the crystalline quality (단결정 AlN의 미세구조 분석 및 어닐링 공정이 결정성에 미치는 영향)

  • Kim, Jeoung Woon;Bae, Si-Young;Jeong, Seong-Min;Kang, Seung-Min;Kang, Sung;Kim, Cheol-Jin
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.28 no.4
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    • pp.152-158
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    • 2018
  • PVT (Physical Vapor Transport) method has advantages in producing high quality, large scale wafers where many researches are being carried out to commercialize nitride semiconductors. However, complex process variables cause various defects when it had non-equilibrium growth conditions. Annealing process after crystal growth has been widely used to enhance the crystallinity. It is important to set appropriate temperature, pressure, and annealing time to improve crystallinity effectively. In this study, the effect of the annealing conditions on the crystalline structure variation of the AlN single crystal grown by PVT method was investigated with synchrotron whitebeam X-ray topography, electron backscattered diffraction (EBSD), and Rietveld refinement. X-ray topography analysis showed secondary phases, sub-grains, impurities including carbon inclusion in the single crystal before annealing. EBSD analyses identified that sub-grains with slightly tilted basal plane appeared and the overall number of grains increased after the annealing process. Rietveld refinement showed that the stress caused by the temperature gradient during the annealing process between top and bottom in the hot zone not only causes distortion of grains but also changes the lattice constant.

Microstructural development of $Si_3N_4/SiC$ nanocomposites during hot pressing ($Si_3N_4/SiC$ 초미립복합재료의 고온가압소결중의 미세구조변화)

  • 황광택;김창삼;정덕수;오근호
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.6 no.4
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    • pp.552-557
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    • 1996
  • Microstructural development of $Si_3N_4$/20 vol% SiC nanocomposites doped 2 wt% $Al_2O_3$ and 6 wt% $Y_2O_3$ as sintering additives were analyzed by sintering interruption. Density of samples was significantly increased between $1500^{\circ}C$ and $1700^{\circ}C$, and near full density was achieved at $1800^{\circ}C$. Transformation rate from $\alpha-Si_3N_4$ to $\betha-Si_3N_4$ was increased at $1700^{\circ}C$ and $1800^{\circ}C$, and then elongated matrix grains were appeared. Small size SiC particles had suppressive effect on densification rate and transformation of $Si_3N_4$ phase.

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Crystal growth of AlN thin films on 3C-SiC buffer layer (3C-SiC 완충층을 이용한 AIN 박막의 결정성장)

  • Lee, Tae-Won;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.346-347
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    • 2007
  • Aluminum nitride (AlN) thin films were deposited on Polycrystalline (poly) 3C-SiC buffer layers using pulsed reactive magnetron sputtering. Characteristics of AlN films were investigated experimentally by means of FE-SEM, X-ray diffraction, and FT-IR, respectively. As a result, highly (002) oriented AlN thin films with almost free residual stress were achieved using 3C-SiC buffer layers. Therefore, AlN thin films grown on 3C-SiC buffer layers can be used for various piezoelectric fields and M/NEMS applications.

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Grain growth behavior of porous Al2O3 with addition of La2O3 prepared via freeze-casting (동결주조로 성형한 La2O3가 첨가된 Al2O3 다공체의 소결 중 입자성장 거동)

  • Kim, Sung-Hyun;Woo, Jong-Won;Jeon, Sang-Chae
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.32 no.6
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    • pp.231-238
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    • 2022
  • To secure the mechanical strength of porous Al2O3 ceramics, which can be utilized for filters and catalyst supports is essential for their functionality and durability. Superior mechanical strength would be obtained by tailoring the densification and grain growth during sintering. This study deals with grain growth behavior of a freeze-casted Al2O3 with addition of La2O3. In a temperature range between 1400 and 1600℃, variations of average grain size with sintering time and temperature were observed and analyzed with Gtn-G0n = kt and with k = k0exp(-Ea/RT). As a result, n value and activation energy (Ea) for grain growth were calculated as 3 and 489.09 kJ/mol, respectively. These commonly confirms retardation effect of the La addition during sintering of Al2O3 porous structure. More accurate analysis on the La effect can be followed to provide useful guidance for the selection of additives for better mechanical strength in Al2O3 porous structures.

Passivation property of Al2O3 thin film for the application of n-type crystalline Si solar cells (N-type 결정질 실리콘 태양전지 응용을 위한 Al2O3 박막의 패시베이션 특성 연구)

  • Jeong, Myung-Il;Choi, Chel-Jong
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.24 no.3
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    • pp.106-110
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    • 2014
  • The passivation property of $Al_2O_3$ thin film formed using atomic layer deposition (ALD) for the application of crystalline Si solar cells was investigated using microwave photoconductance decay (${\mu}$-PCD). After post-annealing at $400^{\circ}C$ for 5 min, $Al_2O_3$ thin film exhibited the structural stability having amorphous nature without the interfacial reaction between $Al_2O_3$ and Si. The post-annealing at $400^{\circ}C$ for 5 min led to an increase in the relative effective lifetime of $Al_2O_3$ thin film. This could be associated with the field effective passivation combined with surface passivation of textured Si. The capacitance-voltage (C-V) characteristics of the metal-oxide-semiconductor (MOS) with $Al_2O_3$ thin film post-annealed at $400^{\circ}C$ for 5 min was carried out to evaluate the negative fixed charge of $Al_2O_3$ thin film. From the relationship between flatband voltage ($V_{FB}$) and equivalent oxide thickness (EOT), which were extracted from C-V characteristics, the negative fixed charge of $Al_2O_3$ thin film was calculated to be $2.5{\times}10^{12}cm^{-2}$, of which value was applicable to the passivation layer of n-type crystalline Si solar cells.

Lattice strain effects on superconductivity in $La_{2-x}Sr_{x}CuO_{4}$ single-crystalline films grown by IR-LPE technique

  • Tanaka, I.;Islam, A.T.M.N.;Wataudhi, S.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.13 no.4
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    • pp.172-175
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    • 2003
  • We have investigated effects of the lattice mismatch between the LPE films and the substrates. We have grown $La_{2-x}Sr_{x}CuO_{4}$(x=0.1 to 0.15) single crystalline films on single crystalline substrates having different lattice parameter ratio c/a e.g., $La_{2-x}Sr_{x}Cu_{1-y}Zn_{y}O_{4},\;La_{2-x}Ba_{x}CuO_{4},\; LaSrAlO_{4}\;and\;La_{2-x}Sr_{x}Cu_{1-y}Al_{y}O_{4}$ etc., using the IR-LPE technique. The superconducting properties of the grown films were found to vary significantly depending on the lattice mismatch with different substrates.

New Oxide Crystals as Substrates for GaN-based Blue Light Emitting Devices

  • Fukuda, T.;Shimamura, K.;Tabata, H.;Takeda, H.;Futagawa, N.;Yoshikawa, A.;Kochurikhin, Vladimir-V.
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1999.06a
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    • pp.3-26
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    • 1999
  • We have successfully grown <111>-oriented (La,Sr)(Al,Ta)$O_3$(LSAT) mixed-perovskite single crystals and <0001>-oriented $Ca_8La_2(PO_4)_6O_2$(CLPA) single crystals with the apatite structure by the Czochralski method. The compositional and lattice parameter uniformity of the crystals are discussed in relation to the growth conditions. Since LSAT and CLPA single crystals have excellent lattice matching with GaN, they ar promising as new substrates for the growth of high quality GaN epitaxial layers.

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Characterization of AlN thin films grown by plasma assisted molecular beam epitaxy on Si substrates (실리콘 기판 위에 플라즈마 분자선 에피택시를 이용하여 성장된 질화알루미늄 박막의 특성분석)

  • 홍성의;한기평;백문철;조경익
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.111-114
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    • 2000
  • Growth characteristics and microstructure of AlN thin films grown by plasma assisted molecular beam epitaxy on Si substrates have been investigated. Growing temperature and substrate orientation were chosen as major variables of the experiment. Reflection high energy electron diffraction (RHEED), X-ray diffraction (XRD), atomic force microscopy (AFM) and transmission electron microscopy/diffraction (TEM/TED) techniques were employed to characterize the microstructure of the films. On Si(100) substrates, AlN thin films were grown along the hexagonal c-axis preferred orientation at temperature range 850-90$0^{\circ}C$. However on Si(111), the AlN films were epitaxially grown with directional coherency in AlN(0001)/Si(111), AlN(1100)/Si(110), and AlN(1120)/Si(112) at 85$0^{\circ}C$ and the epitaxial coherencry seemed to be slightly distorted with increasing temperature. The microstructure of AlN thin films on Si(111) substrates showed that the films include a lot of crystal defects and there exist micro-gaps among the columns.

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Effects of annealing and impurities on the superconducting properties of$Bi_2Sr_2CaCu_2O_{8+{\delta}}$ single crystals ($Bi_2Sr_2CaCu_2O_{8+{\delta}}$ 단결정의 초전도 특성에 미치는 열처리 및 불순물의 영향)

  • N. Sato;N. Yoshimoto;M. Yoshizawa
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.9 no.2
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    • pp.137-140
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    • 1999
  • Effects of annealing and impurities on the superconducting properties were investigated by the magnetization measurement in $Bi_2Sr_2CaCu_2O_{8+{\delta}}(Bi2212)$ single crystals grown by flux method. It has been found that the superconducting properties are affected by Mg and Al impurities remarkably. The transition temperature$(T_c)$ has been lowered by the impurity of Mg. However, the diamagnetism is remarkably increased in an annealed crystal grown in MgO crucible compared to that in $Al_2O_3$ crucible. The content of Mg impurity can not be considered as a principal parameter for the decay of superconducting properties probably because the diamagnetism is remarkably improved in annealed crystal containing Mg.

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