• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.05a
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• pp.76-76
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• 2015

PVD에 의한 증착 대상 물질인 Ti, AlSi, Cr 및 각각의 타겟 전류, 바이어스, 압력 조건 들을 설계하여 적용시켰으며 PECVD와 CBC 코팅을 조합하여 발생되는 새로운 나노 멀티박막의 특성을 본 연구에서는 시험분석 및 평가하였다. 코팅층 깊이에 따른 조성 변화는 XPS를 이용하였으며 미세조직 및 표면 상태는 FE-SEM을 이용한 정밀 분석을 실시하였다. 또한, 박막의 경도는 나노인덴터를 이용하여 박막 자체의 경도만을 분석하였다. 한편, Pin-on-disk 방식의 마모시험기를 이용하여 표면조도와 상대재의 처리 상태에 따른 마찰계수를 시험 평가하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.05a
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• pp.169-172
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• 2005

공정시 플라스틱 기판의 변형을 방지하기 위해 PC(Polycarbonate) 기판을 약 12시간 동안 pre-annealing시킨 다음 SiN(silicon nitride)와 PI(Poly-imide)를 각각 Sputter와 Spin-Coater를 이용하여 Coating하였다. 완성된 PC 기판위에 Themal Evaporation으로 Calsium을 증착한 뒤 Al을 올렸다. Calsium 증착 된면에 삼성 코닝의 글래스를 UV resin으로 부착 시킨 다음 상온에서 투습률을 측정하였다. 측정 간격은 12시간으로 하였으며 Calsium Test 의 정확도 향상을 위해 CCD Camera로 측정하여 컴퓨터로 분석하였다. 그래픽 저장 파일은 저장시 이미지 손실을 방지하기 위해 Bitmap방식을 그대로 사용 하였으며 정확도 향상을 위한 분석 프로그램은 MicroSoft 사의 Visual C++로 작성하였다. 화상 처리 면적은 컴퓨터 시스템의 처리 속도를 감안하여 70*70 으로 하였다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.10a
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• pp.105-106
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• 2009

AZ31 (3% Al, 1% Zn) Mg 판재의 내식성 향상을 위해 Ti/Zr/Polymer 복합계의 Cr-free 화성처리 방법을 이용하였다. 염수분무시험을 통해 최고 72시간 ($5{\sim}10%$ 발청) 내식성이 나타남을 확인하였다. 화성피막의 내식성은 그 피막이 가진 성분, 균일도, 치밀도, 형상 및 두께에 의해 좌우되는 만큼 TEM, SEM을 통해 화성피막 구조가 내식성과 어떠한 관련이 있는지 조사하였다. 또한, 화성처리 전 단계 공정인 탈지와 산세 및 중화 공정의 변수 조절을 통해 전처리 공정이 최종 화성피막의 물성에 어떠한 영향을 미치는지 조사하였다. 탈지조건을 $35{\sim}40^{\circ}C$, 5분에서 $50{\sim}80^{\circ}C$, $10{\sim}20$분으로 변경 시 좀 더 균일한 외관을 얻을 수 있었고, 적절한 중화제 선택을 통해 화성피막을 균일하게 형성시킬 수 있었다. 투과전자현미경 결과로 미루어 화성피막의 두께보다 균일도와 치밀도가 내식성에 결정적인 영향을 미치는 것을 확인할 수 있었다.

• Journal of the Korean Vacuum Society
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• v.17 no.3
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• pp.175-182
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• 2008

This study is concerned with the evaluation of the corrosion resistance of coated semiconductor equipment parts with various processes. To select the appropriate basis for evaluation, replacement parts were observed during the semiconductor manufacturing process. This study also ran a dry corrosion test using $Al_2O_3$, which is mostly used as a coating material. This test quantitatively measured the efficiency of coated parts. Surface morphology, leakage current and breakdown voltage were also evaluated. This study showed that a dry corrosion process led to the drop of electrical properties, for example, the leakage current increase and the dielectric strength decrease. The surface morphology test displayed that surface damage is largely dependent on the exposure time to corrosive environments. By using the values that changed during the corrosion process, it may be possible to contrive a method to evaluate the efficiency of coated parts with various processes.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.251-252
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• 2012

Recently, the growing interest in organic microelectronic devices including OLEDs has led to an increasing amount of research into their many potential applications in the area of flexible electronic devices based on plastic substrates. However, these organic devices require a gas barrier coating to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency OLEDs require an extremely low Water Vapor Transition Rate (WVTR) of $1{\times}10^{-6}g/m^2$/day. The Key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required ($1{\times}10^{-6}g/m^2$/day) is the suppression of defect sites and gas diffusion pathways between grain boundaries. In this study, we developed an $Al_2O_3$ nano-crystal structure single gas barrier layer using a Neutral Beam Assisted Sputtering (NBAS) process. The NBAS system is based on the conventional RF magnetron sputtering and neutral beam source. The neutral beam source consists of an electron cyclotron Resonance (ECR) plasma source and metal reflector. The Ar+ ions in the ECR plasma are accelerated in the plasma sheath between the plasma and reflector, which are then neutralized by Auger neutralization. The neutral beam energies were possible to estimate indirectly through previous experiments and binary collision model. The accelerating potential is the sum of the plasma potential and reflector bias. In previous experiments, while adjusting the reflector bias, changes in the plasma density and the plasma potential were not observed. The neutral beam energy is controlled by the metal reflector bias. The NBAS process can continuously change crystalline structures from an amorphous phase to nano-crystal phase of various grain sizes within a single inorganic thin film. These NBAS process effects can lead to the formation of a nano-crystal structure barrier layer which effectively limits gas diffusion through the pathways between grain boundaries. Our results verify the nano-crystal structure of the NBAS processed $Al_2O_3$ single gas barrier layer through dielectric constant measurement, break down field measurement, and TEM analysis. Finally, the WVTR of $Al_2O_3$ nano-crystal structure single gas barrier layer was measured to be under $5{\times}10^{-6}g/m^2$/day therefore we can confirm that NBAS processed $Al_2O_3$ nano-crystal structure single gas barrier layer is suitable for OLED application.

• Journal of Welding and Joining
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• v.28 no.3
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• pp.92-98
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• 2010

Ferritic stainless steels, which have relatively small thermal expansion coefficient and excellent corrosion resistance, are increasingly being used in vehicle manufacturing, in order to increase the lifetime of exhaust manifold parts. But, there are limits on use because of the problem related to cosmetic resistance, corrosions of condensation and high temperature salt etc. So, Aluminum-coated stainless steel instead of ferritic stainless steel are utilized in these parts due to the improved properties. In this investigation, Al-8wt% Si alloy coated 409L ferritic stainless steel was used as the base metal during Gas Tungsten Arc(GTA) welding. The effects of coated layer on the microstructure and hardness were investigated. Full penetration was obtained, when the welding current was higher than 90A and the welding speed was lower than 0.52m/min. Grain size was the largest in fusion zone and decreased from near HAZ to base metal. As welding speed increased, grain size of fusion zone decreased, and there was no big change in HAZ. Hardness had a peak value in the fusion zone and decreased from the bond line to the base metal. The highest hardness in the fusion zone resulted from the fine re-precipitation of the coarse TiN and Ti(C, N) existed in the base metal during melting and solidification process and the presence of fine $Al_2O_3$ and $SiO_2$ formed by the migration of the elements, Al and Si, from the melted coating layer into the fusion zone.

• Journal of the Korean institute of surface engineering
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• v.31 no.6
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• pp.334-344
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• 1998

Yew coating pmccss t.o form a surface layer ol CrN phasc on mild steel (A81 1020!, AlSI Hi3, 1Cr-0.5Mo steel (ASTM A213 and Nickrl-base superalloy (Inconel 718) was developed. Surlaces of various alloys t,n.ateii by chromizing for the formation ol Cr diffusion layer was subsequently trcaled by plasma nitriding in order t.o form the hard CrS coating layer on the surfaces. This duplex plasma surface tri-atments of chromizing and plasma nitriding have induced a lormation of a duplex-lrcated surfacr hyer of approximat~ls 70-80 $\mu\textrm{m}$thickncss with a iargcly improved microiiardnrss up to approxiniateW 1500Hv(50gf). The main cause for the lage improvment in the surface hardncss is altribilted to [.he fact that CrN and $Fe_xN$ phases are created successfully by ccliromizins and plasma nilriding treatment. High tenipera1,urc wear resislance of the duplex-treated mild steel and HI3 steels at $600^{\circ}C$ was examined. Comparing the duplex-treated specimens with the specimens treated only by chromizing, the rcsults shovmi that, thc wear volume of the duplex-treated mild skcl and 1113 stcel aSt.er a wear test, at $600^{\circ}C$ were reduced hy a Iactor of 8 and 3, respectively. Characteristics of the CrS phase by duplrx treatment were compared with $CrN_x$,/TEX> film by ion plating and the wear behaviors of CrN film lormed by two different nroccsses arc nea.riy identical.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.8 no.1
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• pp.33-39
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• 2010

The electrolytic reduction of a spent oxide fuel involves a liberation of the oxygen in a molten LiCl electrolyte, which results in a chemically aggressive environment that is too corrosive for typical structural materials. Accordingly, it is essential to choose the optimum material for the processing equipment that handles the high molten salt. In this study, hot corrosion studies were performed on bare as well as coated superalloy specimens after exposure to lithium molten salt at $675^{\circ}C$ for 216 h under an oxidizing atmosphere. The IN713LC superalloy specimens were sprayed with an aluminized NiCrAlY bond coat and then with an $Y_2O_3$ top coat. The bare superalloy reveals an obvious weight loss due to spalling of the scale by the rapid scale growth and thermal stress. The chemical and thermal stability of the top coat has been found to be beneficial for increasing to the corrosion resistance of the structural materials for handling high temperature lithium molten salts.

• Progress in Superconductivity
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• v.8 no.1
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• pp.59-64
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• 2006

High $J_c\;YBa_2Cu_3O_x$ superconducting films were fabricated by MOD method using fluorine-free dichloroacetic acid(DCA) as chelating solvent for preparing precursor solution. Coating solutions were prepared by dissolving Y-, Ba- and Cu-acetates in DCA solvent followed by drying in rota vapor to obtain the blue gel that is diluted in methanol and 2-methoxyethanol for adjusting the cation concentration. DCA-MOD precursor solution was coated on a single crystal(001) $LaAlO_3(LAO)$ substrate by a dip coating method with a speed of 25 mm/min. Coated films were calcined at lower temperature up to $500^{\circ}C$ in flowing oxygen atmosphere with a 7.2% humidity. Conversion heat treatment was performed at various temperatures of $780{\sim}810^{\circ}C$ for 2 h in flowing Ar gas containing 1000 ppm oxygen with a humidity of 9.45%. SEM observations showed that films have very dense microstructures for the films prepared at the temperature higher than $800^{\circ}C$ regardless of diluting solvent; methanol or 2-methoxyethanol. X-ray diffraction analysis showed that YBCO grains grew with a (001) preferred orientation. A High critical current density($J_c$) of 1.28 $MA/cm^2$(@77 K and self-field) was obtained id. the YBCO film prepared using 2-methoxyethanol as a solvent.

• Journal of the Korean institute of surface engineering
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• v.30 no.4
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• pp.272-280
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• 1997

The Thermal Barrier Coation(TBC) to improve the that barrier and wear resistant propenrty in high temperature ofthe aircraftength between the accumlation of the aircraft engine and the automobile engine has usually the two layer structure. One is a creamic top layer for heat insulation and the other is a metal bond layer to facilitate the bond strength between the top ceramic layer and the substrate. But, the coated layers should be peeled off because of the accumulation of the thermal stress by the differance of the thermal expantion coefficient between metal and ceramics in a hrat cyclic environment. In this study, the intermediate layer by plasm spray process was introduced to reduce the thermal stress. The powders of plasm spray coating were the Yttria Stabilized Zirconia (YSZ), the Magnesia Stabillized Zirconia(MSZ) and NiCrAlY. the intermediate layer was sprayed with the powders of the bond cast for the purpose of test were executed. The high temperature wear resistance tends to decreasnceee wear and thermal shock test were exeucuted. The high temperature were resistance of the YSZ TBC is better that of the MSZ TBC. The wearrsistance tends to decrease accoring to incresing the temperature between $400^{\circ}C$to $600^{\circ}C$. The thermal shock life of the 3 layer TBC with YSZ top casting was the most outstanding thermal shock rsisstasnce. This means that the intermediate layer should play an importnat roll to alleviate the diffrerence of the thermal expansion coef frcients between metallic layer and cermics layer.