A Study of a Method to Evaluate the Corrosion Resistance of Al2O3 Coated Vacuum Components for Semiconductor Equipment |
You, S.M.
(Vacuum Center, Korea Research Institute of Standards and Science)
Yun, J.Y. (Vacuum Center, Korea Research Institute of Standards and Science) Kang, S.W. (Vacuum Center, Korea Research Institute of Standards and Science) Shin, J.S. (Department of Materials Science and Engineering, Daejeon University) Seong, D.J. (Vacuum Center, Korea Research Institute of Standards and Science) Shin, Y.H. (Vacuum Center, Korea Research Institute of Standards and Science) |
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