• Korean Journal of Materials Research
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• v.14 no.10
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• pp.688-695
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• 2004

The capacitor contact barrier(CCB) layers have been introduced in the FeRAM integration to prevent the Pt/Al reaction during the back-end processes. Therefore, the interdiffusion and intermetallic formation in $Pt(1500{\AA})/Al(3000{\AA})$ film stacks were investigated over the annealing temperature range of $100\sim500^{\circ}C$. The interdiffusion in Pt/Al interface started at $300^{\circ}C$ and the stack was completlely intermixed after annealing over $400^{\circ}C$ in nitrogen ambient for 1 hour. Both XRD and SBM analyses revealed that the Pt/Al interdiffusion formed a single phase of $RtAl_2$ intermetallic compound. On the other hand, in the presence of TiN($1000{\AA}$) barrier layer at the Pt/Al interface, the intermetallic formation was completely suppressed even after the annealing at $500^{\circ}C$. These were in good agreement with the predicted effect of the TiN diffusion barrier layer. But the conventional TiN CCB layer could not perfectly block the Pt/Al reaction during the back-end processes of the FeRAM integration with the maximum annealing temperature of $420^{\circ}C$. The difference in the TiN barrier properties could be explained by the voids generated on the Pt electrode surface during the integration. The voids were acted as the starting point of the Pt/Al reaction in real FeRAM structure.

• Korean Journal of Plant Resources
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• v.20 no.1
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• pp.12-21
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• 2007

Ginsengs (1,2 3 years) from the Keumsan are analysed for the inorganic compounds and compared with the their soils from the granite, phyllite and shale areas. In the soils, the granite areas show high $Al_2O_3\;and\;Na_2O$ contents while the phyllite areas have high $Fe_2O_3,\;MnO\;and\;MgO$ contents. Positive correlations are shown in the $Al_2O_3-K_2O\;and\;Fe_2O_3-MgO$ pairs while negative correlations are shown in the $SiO_2-CaO$ pair. In the ginsengs, the shale areas are high in the most of the elements, but low in the granite areas. Compared with same soils of different ages, Al, Na and Ti contents of the ginsengs are high in the all areas. The shale areas are mainly high in the upper parts while the granite areas are mainly high in the root parts. Regardless of the localities, Fe, Mn and Ca contents are high in the upper parts while Ti contents are high in the root parts with differences of several times. Relative ratios between field soils and ginsengs (field soil/ginseng) suggest that the ginsengs show high Ca contents with differences of several ten times whereas the soils have high Na, Fe, Ti and Al contents with differences of several times. Regardless of the localities, the ratios of the Al, Mn and Na are high in the 2 year relative to the 3 year. Overall ratios between field soils and ginsengs are mainly big in the 2 year area relative to the 3 year area. It suggests that contents of the 3 year ginsengs are more similar to those of their soils relative to the 2 year and the ginsengs may absorpt eligible element contents with increasing ages.

• Korean Journal of Materials Research
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• v.2 no.6
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• pp.408-416
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• 1992

Stable TiS$i_2$was formed by RTA on single-Si and on poly-Si. Subsequently, an Al-1% Si layer with 600-nm thick was deposited on top of the TiS$i_2$, Finally, the specimens were annealed for 30min at 400-60$0^{\circ}C$in $N_2$ambient. The thermal stability of Al-1% Si/TiS$i_2$bilayer and interfacial reaction were investigated by measuring sheet resistance, Auger electron spectroscopy (AES), and scanning electron microscopy (SEM). The composition and phase of precipitates formed by the reaction of Al-1% Si with Ti-silicide were studied by energy dispersive spectroscopy (EDS), X-ray diffraction (XRD). In the case of single-Si substrate the reaction of Al-1% Si layer with TiS$i_2$layer resulted in precipitates, consuming all TiS$i_2$layer at 55$0^{\circ}C$. On the other hand, the disappearance of TiS$i_2$on poly-Si occurred at 50$0^{\circ}C$ and more precipitates were formed by the reaction of Al-1% Si/TiS$i_2$on potty-Si substrate than those of the reaction on single-Si substrate. This phenomenon resulted from the fact that Ti-silicide formed on poly-Si was more unstable than on single-Si by the effect of grain boundary. By EDS analysis the precipitates were found tobe composed of Ti, Al, and Si. X-ray diffraction showed the phase of precipitates to be theT$i_7$A$l_5$S$i_12$ternary compound.

• Bulletin of the Korean Chemical Society
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• v.18 no.6
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• pp.623-628
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• 1997

A layered perovskite oxide, $RbLa_2Ti_2NbO_{10}$, was prepared and investigated for proton exchange and intercalation behaviors. Its protonated form, $Hla_2Ti_2NbO_{10}$, exhibits the Bronsted acidity and reacts with organic amines. Polyoxonuclear cation, 4Al_{13}$, was then introduced into the interlayer by refluxing octylamine-intercalated compound with an $Al_{13}$ pillaring solution. These layered oxides were characterized by X-ray diffractometer, thermogravimeter, FT-infrared spectrometer and elemental analyzer. It is observed that the polyoxonuclear cation-pillared material exhibits a bilayer structure and is thermally more stable than organic counterpart at higher temperatures. The surface area of the pillared material annealed at 400 ℃ was the value of 25.1 m²/g.

• Journal of Welding and Joining
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• v.17 no.5
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• pp.107-115
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• 1999

The objective of this research was to study the formation of the thick hardened layer with the addition of metal powder(Cu) and ceramics powders(TiC) on the aluminum 5083 alloys by plasma transferred arc process(PTA process) and to characterize the effect of overlaying conditions on the overlaid layer formation. This was followed by investigating the microstructures of the overlaid layers and mechanical properties such as hardness and wear resistance. The overlaid layer containing copper powder was alloyed and intermetallic compound($CuAl_2$) was formed. The overlaid layers with high melting point TiC powders, however, did not react with base metal. Wear resistance of the alloyed layer was remarkably improved by the formation of $CuAl_2$, precipitate phase, which prevented wear of base aluminum alloys and at higher wear speed, accelerated sliding of the counter part. Wear resistance of the composite layer was also remarkably improved because TiC powder act as a load barring element and Fe debris fragments detached from the counter part act as a solid lubricant on the contact surface.

• Journal of the Korean institute of surface engineering
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• v.38 no.2
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• pp.79-82
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• 2005

This study investigated the effect of nitriding on the hardness and adhesion properties of $TiB_2$ coatings. Inductively coupled plasma (ICP) was used for both nitriding and deposition. By applying ICP, H13 steel was nitrided at a high rate of $50\;{\mu}m/hr$. After nitriding, a Fe4N compound layer or a diffusion layer was formed according to the hydrogen/nitrogen ratio. Both layers could improve the load-bearing capacity of the substrate by increasing the substrate hardness. The adhesion of the $TiB_2$ coatings increased to $\~30N$ after nitriding, but the hardness of the coating was lowered to 20-30 GPa. However, the adhesion of the $TiB_2$ coatings with a high hardness (>60 GPa) could not be improved substantially by nitriding due to the large difference in hardness between the coating and the substrate. The grain size of the $TiB_2$ coating was larger on the nitrided substrates, resulting in a decrease in the hardness of the coating.

• Journal of the Korean Vacuum Society
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• v.12 no.4
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• pp.218-227
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• 2003

Pd/Si/Ti/Pt and Pd/Si/Pd/Ti/Au ohmic contacts to n-type InCaAs were investigated for applications to AlGaAs/GaAs HBT emitter ohmic contacts. In the Pd/Si/Ti/Pt ohmic contact, as-deposited contact showed non-ohmic behavior, and high specific contact resistivity of $5\times10^{-3}\Omega\textrm{cm}^2$ was achieved by rapid thermal annealing at $375^{\circ}C$/10 sec. However, the specific contact resistivity decreased remarkably to $2\times10^{-6}\Omega\textrm{cm}^2$ by annealing at $425^{\circ}C$/10sec. In the Pd/Si/Pd/Ti/Au ohmic contact, minimum specific contact resistivity of $3.9\times10^{-7}\Omega\textrm{cm}^2$ was achieved by annealing at $400^{\circ}C$/20sec. In both ohmic contacts, low contact resistivity and non-spiking planar interface between ohmic materials and InGaAs were maintained. Therefore, these thermally stable ohmic contact systems are promising candidates for compound semiconductor devices. RF performance of the AlGaAs/GaAs HBT was also examined by employing the Pd/Si/Ti/Pt and Pd/Si/Pd/Ti/Au systems as emitter ohmic contacts. Cutoff frequencies were 63.9 ㎓ and 74.4 ㎓, respectively, and maximum oscillation frequencies were 50.1 ㎓ and 52.5 ㎓, respectively. It shows very successful high frequency operations.

• Journal of Powder Materials
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• v.26 no.4
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• pp.319-326
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• 2019

Additive manufacturing (AM) is a highly innovative method for joining dissimilar materials for industrial applications. In the present work, AM of STS630 and Ti-6Al-4V powder alloys on medium entropy alloys (MEAs) NiCrCo and NiCrCoMn is studied. The STS630 and Ti64 powders are deposited on the MEAs. Joint delamination and cracks are observed after the deposition of Ti64 on the MEAs, whereas the deposition of STS630 on the MEAs is successful, without any cracks and joint delamination. The microstructure around the fusion zone interface is characterized by scanning electron microscopy and X-ray diffraction. Intermetallic compounds are formed at the interfacial regions of MEA-Ti64 samples. In addition, Vicker's hardness value increased dramatically at the joint interface between MEAs and Ti-6Al-4V compared to that between MEAs and STS630. This result is attributed to the brittle nature of the joint, which can lead to a decrease in the joint strength.

• Journal of Powder Materials
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• v.6 no.1
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• pp.49-55
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• 1999

Al-Cr-Zr nanocomposite metal powders were prepared by mechnical alloying (MA) in order to develop aircraft structure materials with lighter weight and lower cost than the conventional Ti and Ni alloys. The morphological changes and microstrutural evolution of Al-6wt.%Cr-3wt.%Zr nanocomposite metal powders during MA were investigated by SEM, XRD and TEM. The approximately 50$\mu$m sized Al-Cr-Zr nanocomposite metal powders has been formed after 20 h of MA. The individual X-ray diffraction peaks of Al, Cr and Zr were broadened and peak intensitied were decreased as a function of MA time. The observed Al crystallite size by TEM was in the range of 20 nm, which is a simliar value calculated by Scherrer equation. The microhardness of Al-Cr-Zr nanocomposite metal powders increases alomost linearly with increase of the processing time, reaching a saturation hardness value of 127 kg/$mm^2$ after 20 h of processing. The intermetallic compound phase of $Al_3Zr_4$ in the matrix was identifed by XRD and TEM.

• Korean Journal of Metals and Materials
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• v.50 no.7
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• pp.477-485
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• 2012

The effect of aging heat treatment on microstructure evolution of the Ti-6Al-4Fe-0.25Si alloy with an initial microstructure of an elongated alpha was investigated. Aging treatments of the samples were carried out at $550^{\circ}C$ for up to 100 hours. The microstructure of the 5 hours heat-treated sample consisted of alpha grains, beta matrix and some TiFe intermetallic compounds that were precipitated from the beta matrix. Increasing the aging time to 10 hours, most of the beta matrix was decomposed to very fine alpha grains (${\sim}0.5{\mu}m$) and TiFe, and thus the volume fraction of the beta matrix was significantly decreased. EBSD analysis revealed that newly formed tertiary-alpha-grains in the vicinity of TiFe had high angle boundaries with respect to the primary and secondary alpha grains. As a result of these phase transformations during aging, the fraction of the alpha/alpha grain boundary was increased while that of the alpha/beta phase boundary was decreased.