• 제목/요약/키워드: Al concentration

검색결과 1,832건 처리시간 0.035초

Al/TiN/Ti 전극의 Submicron contact에서의 전기적특성(2) (The Electrical properties of Al/TiN/Ti Contact at Submicron contact(2))

  • 이철진;엄문종;라용춘;김성진;성만영;성영권
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1995년도 하계학술대회 논문집 C
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    • pp.1069-1071
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    • 1995
  • The electrical properties of Al/TiN/Ti contact are investigated at submicron contacts. The contact resistance and contact leakage current are dependent on metallization, surface dopant concentration, semiconductor surface treatment and contact plug ion implantation. In this paper, the contact resistance and contact leakage current are studied according to surface dopant concentration, semiconductor surface treatment and contact plug ion implantation at 0.8 micron contact. The contact resistance and contact leakage current increases with increasing substrate ion concentration. HF cleaning represents high contact resistance but low contact leakage current while CDE cleaning represents low contact resistance but high contact leakage current. Contact plug ion implantation decreases contact resistance but increases contact leakage current. Specially, RTA represents good electrical properties.

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A Study on Properties of RF-sputtered Al-doped ZnO Thin Films Prepared with Different Ar Gas Flow Rates

  • Han, Seung Ik;Kim, Hong Bae
    • Applied Science and Convergence Technology
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    • 제25권6호
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    • pp.145-148
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    • 2016
  • This paper, Al-doped ZnO(AZO) thin films for application as transparent conducting oxide films were deposited on the Corning glass substrate by using RF magnetron sputtering system. The effects of various Argon gas flow rates on optical and electrical characteristics of AZO films were investigate sputtering method. The Carrier Concentration is enhanced as Ar gas rate increases, and also the oxygen vacancy concentration. The figure of merit obtained in this study means that AZO films which deposited Ar gas rate of 75 sccm have the highest Carrier concentration and Hall mobility, which have the highest photoelectrical performance that it could be used as transparent electrodes.

Ba-Mg-Al-O:$Eu^2+$ 청색형광체의 발광특성 (The Luminescence Property of Ba-Mg-Al-O:$Eu^2+$ Blue Phosphors)

  • 김광복;천희곤;조동율;구경완
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 추계학술대회 논문집
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    • pp.157-161
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    • 2000
  • Blue phosphor of Ba-Mg-Al-O:Eu$^{2+}$ phase was fabricated by conventional firing techniques under reducing atmosphere and its photoluminescence properties are studied with varying Eu concentration and phost-annealing temperature under air atmosphere. This phosphors were well crystallized with particle size in the range of 3~5um and emitted a blue light at a dominent wavelength 450nm for 254nm UV irradiation. The concentration quenching wit Eu$^{2+}$ was that with increasing Eu concentration the energy transfer between the activator ions steadily improves, so that the excitation energy is transported over larger distances through the lattice before luminescence can occur. Thermal quenching also occurred in this phosphor means that in a host lattice with the $\beta$-alumina structure the bond of an Eu$^{2+}$ ion with the nearest-neighbour oxygen ion is much stronger than in a lattice with the magnetoplumbite structure.cture.

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Dissolution of Mo/Al Bilayers in Phosphoric Acid

  • Kim, In-Sung;Chon, Seung-Whan;Kim, Ky-Sub;Jeon, Il-Cheol
    • Bulletin of the Korean Chemical Society
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    • 제24권11호
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    • pp.1613-1617
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    • 2003
  • In the phosphoric acid based etchant, the dissolution rates of Mo films were measured by microgravimetry and the corrosion potentials of Mo and Al were estimated by Tafel plot method with various concentrations of nitric acid. Dissolution rate of Mo increased with the nitric acid concentration and reached a limiting value at high concentration of nitric acid in ambient condition. Corrosion potentials of Mo and Al shifted to positive direction and the difference between potentials of both metals was about 1,100 mV and 1,200 mV with 1% and above 4% of $HNO_3$, respectively. For a Mo/Al bilayers, the dissolution rate inversion is the main reason for good taper angle in shower etching process. Taper angles are observed by scanning electron microscope (SEM) after wet etching process for Mo/Al layered films with different concentrations of $HNO_3$. In the etch side profile, it was found that Al corroded faster than Mo below 4% of $HNO_3$ in dip etching process, however, Mo corroded faster above 4%. Trend for variation of taper angle of etched side of Mo/Al layered film can be explained by considering the effect corrosion rates of both metals with various concentrations of $HNO_3$.

대기 노출된 Al6061 알루미늄 합금 산화막에 대한 미세조직 분석 (Microstructural Analysis on Oxide Film of Al6061 Exposed to Atmospheric Conditions)

  • 조준영;권대엽;최원준;반치범
    • 한국표면공학회지
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    • 제55권5호
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    • pp.273-283
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    • 2022
  • Al6061 aluminum alloy specimens were exposed to atmospheric conditions for maximum 24 months. 24-month exposure specimen showed some more frequent and larger size of corrosion products and pitting on the surface compared with the 12-month exposure specimens. The XRD examination revealed the dominant surface oxide phases of Al2O3 and Al(OH)3. The oxide thickness at uniform oxidation (or non-pitting) region was not much changed over exposure time. The 1.2 ㎛ deep oxygen penetration area was found in the 12-months exposed specimen near the thin uniform aluminum oxide film. The line-EDS was conducted through the penetration regions and non-penetrated grain boundary. There were signs of O and Si concentration through the penetration region, whereas non-penetration region showed no concentration of O or Si. It was confirmed that pitting is a more severe degradation mode in Al6061 (max. >4 ㎛ deep) compared with the uniform oxidation (max. ~200 nm deep) up to 24-months exposure.

Al-4.5%Mg-0.6%Mn 알루미늄 합금의 정전위 시간 변수에 따른 손상거동 평가 (Evaluation on Damage Behavior of Al-4.5%Mg-0.6%Mn Al Alloy with Potentiostatic Experiment Time)

  • 김성종;우용빈;한민수;장석기
    • 해양환경안전학회지
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    • 제18권6호
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    • pp.569-576
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    • 2012
  • 일반적으로 중성용액 하에서 알루미늄 합금은 부동태피막($Al_2O_3$$Al_2O_3{\cdot}3H_2O$)을 형성한다. 그러나, 해수 환경에서 염소이온이 표면에 생성된 부동태 피막을 파괴하여 부식이 발생하게 된다. 본 연구에서는 해수환경 하에서 부식 문제점을 해결하기 위해 Al-4.5%Mg-0.6%Mn 알루미늄 합금에 대하여 정전위 방식 기술을 적용하였다. 분극실험결과, 개로전위보다 귀한 전위에서는 활성 용해 반응이 나타났으며 개로전위 보다 비한 전위에서는 용존산소 환원에 의한 농도 분극과 활성화 분극이 관찰되었다. 정전위 실험결과, 농도 분극에서 활성화 분극으로 전환되는 전위부터 적용 시간이 증가할수록 전착물이 많이 생성되었으며, 부분적으로 전착물과 모재의 계면사이에서 틈부식이 관찰되었다. 전체적으로 정전위 양극분극실험시, 활성용해반응이 발생하여 정전위 방식 기술을 적용하기 어려운 반면, 정전위 음극분극 실험시 방식 전위인 농도분극 범위내에서 적용 시간을 고려하여 최적 방식 조건을 -1.1 V~-0.75 V로 규명하였다.

$SrAl_2O_4:Eu^{+2},\;Dy^{+3}$ 장잔광 형광체에 있어서 발광 및 장잔광특성에 미치는$B_2O_3$의 영향 (Effects of $ B_2O_3$ composition for the photoluminescence and after-glow charcteristics of $SrAl_2O_4:Eu^{+2},\;Dy^{+3}$ phosphors)

  • 이영기;엄기석
    • 한국결정성장학회지
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    • 제14권3호
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    • pp.123-128
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    • 2004
  • 융제(flux)로서 $B_2O_3$의 농도를 0-10 wt%까지 변화시킨 $SrAl_2O_4$ : $Eu^{+2}$, $Dy^{+3}$계 장잔광 형광체를 고상반응법으로 합성한 후, $B_2O_3$의 첨가량에 따른 결정특성과 장잔광 축광재료로서 가장 중요한 발광 및 장잔광 특성을 조사하였다. $SrAl_2O_4$ : Eu$^{+2}$, $Dy^{+3}$계 형광체는 $B_2O_3$의 농도에 관계없이 520nm 파장을 최대 발광파장으로 하는 발광스펙트럼을 나타내었고, 3wt%의 $B_2O_3$ 농도에서 최대 발광강도를 나타내었다. 그리고 $SrAl_2O_4$ : Eu$^{+2}$, $Dy^{+3}$ 형광체의 잔광강도 역시 $B_2O_3$의 농도에 무관하게 시간에 따라 모든 시료에서 지수 함수적으로 감소하였으나, $B_2O_3$의 농도가 3wt%인 경우에 발광의 감쇠속도가 작은 뛰어난 장잔광특성을 나타내었다.

$LiBr-H_2O$계 흡수식냉동기의 부식에 미치는 LiBr 농도의 영향 (The Effect of LiBr Concentration on Corrosion of Absorption Refrigeration Systems Using $LiBr-H_2O$ Working Fluids)

  • 임우조;정기철
    • 한국가스학회지
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    • 제5권4호
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    • pp.33-39
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    • 2001
  • 흡수식냉동기의 작동매체로 사용되고 있는 LiBr수용액 중에서 각 구성재료인 일반구조용 압연강재, 동 및 동합금재인 Ai-Ni bronze의 부식거동에 관한 연구를 하기 위하여, 여러 가지 농도의 LiBr 수용액 중에서 각 재료에 대한 분극실험을 실시하여 부식거동을 고찰한 결과 다음과 같은 결론을 얻었다. 1) 수용액의 LiBr 농도가 증가할수록 각 재료의 분극저항은 낮아지고, 개로전위는 비전 위화되면서 부식전류밀도는 높게 배류된다. 2) 일반구조용 압연강재의 개로전위는 동 및 Al-Ni bronze의 개로전위보다 비전위화되면서 부식전류밀도는 더 높게 배류된다. 3) 동 및 Al-Ni bronze에 대한 $62\%$ LiBr 수용액 중에서의 양극분극은 활성태로 지속되지만, 천연해수 중에서의 양극분극은 활성태가 지속되다가 부동태화전류가 나타난다.

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전해질 농도가 양극산화와 열수처리한 Ti-6Al-7Nb 합금의 표면 특성에 미치는 영향 (EFFECT OF ELECTROLYTE CONCENTRATION ON THE SURFACE CHARACTERISTICS OF ANODIZED AND HYDROTHERMALLY-TREATED TI-6AL-7NB ALLOY)

  • 장태엽;송광엽;배태성
    • 대한치과보철학회지
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    • 제43권5호
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    • pp.684-693
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    • 2005
  • Statement of problem: Ti-6Al-7Nb alloy is used instead of Ti-6Al-4V alloy that was known to have toxicity. Purpose: This study was performed to investigate the effect of electrolyte concentration on the surface characteristics of anodized and hydrothermally-treated Ti-6Al-7Nb alloy Materials and methods: Discs of Ti-6Al-7Nb alloy of 20 mm in diameter and 2 mm in thickness were polished sequentially from #300 to 1,000 SiC paper ultrasonically washed with acetone and distilled water for 5 min, and dried in an oven at $50^{\circ}C$ for 24 hours. Anodizing was performed at current density $30mA/cm^2$ up to 300 V in electrolyte solutions containing $\beta-glycerophosphate$ disodium salt hydrate $(\beta-GP)$ and calcium acetate (CA). Hydrothermal treatment was conducted by high pressure steam at $300^{\circ}C$ for 2 hours using a autoclave. All samples were soaked in the Hanks' solution with pH 7.4 at $36.5^{\circ}C$ for 30 days. Results and conclusion: The results obtained were summarized as follows: 1. After hydrothermal treatment, the precipitated HA crystals showed the dense fine needle shape. However, with increasing the concentration of electrolyte they showed the shape of thick and short rod. 2. When the dense fine needle shape crystals was appeared after hydrothermal treatment, the precipitation of HA crystals in Hanks' solution was highly accelerated. 3. The crystal structures of $TiO_2$ in anodic oxide film were composed of strong anatase peak and weak rutile peak as analyzed with thin-film X-ray diffractometery. 4. The Ca/P ratio of the precipitated HA layer was equivalent to that of HA crystal in Hanks' solution.

나노파우더형 Co/Al2O3 촉매를 활용한 NaBH4 가수분해반응 특성 연구 (A Study on Characteristics of NaBH4 Hydrolysis using Co/Al2O3 Nanopowder Catalyst)

  • 윤성모;이태훈;오택현
    • 한국수소및신에너지학회논문집
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    • 제33권4호
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    • pp.343-352
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    • 2022
  • Co/Al2O3 nanopowder was used as a catalyst to investigate the effect of catalyst support, reduction temperature, sodium borohydride (NaBH4) concentration, sodium hydroxide (NaOH) concentration, and reaction temperature on the characteristics of NaBH4 hydrolysis. The Co/Al2O3 nanopowder showed a high catalytic activity among various catalysts. Catalyst reduction at 250℃ exhibited a relatively good activity. The activity decreased with an increase in the NaBH4 concentration. Conversely, the activity increased and then decreased with an increase in the NaOH concentration. Additionally, the activity increased with an increase in the reaction temperature. The value of apparent activation energy was 40.81 kJ/mol, which was lower than the other Co-based catalysts. Thus, Co/Al2O3 nanopowder catalyst can be widely used for NaBH4 hydrolysis owing to its superior catalytic activity.