Effects of hydrogen addition during sputtering on the electrical properties of AIN insulating films for MIS device application (스퍼터링시 수소첨가가 MIS소자용 AIN절연박막의 전기적특성에 미치는 영향)
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- Transactions of the Korean hydrogen and new energy society
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- v.10 no.1
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- pp.59-69
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- 1999