• 제목/요약/키워드: Air levitation

검색결과 99건 처리시간 0.029초

대평판 글라스 이송용 공기 부상 이송장치의 개발 (Development of the Air Floating Conveyor System for the Large Glass Sheet)

  • 이태걸;유진식;정효재;김종형;김준현
    • 한국생산제조학회지
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    • 제22권4호
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    • pp.635-642
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    • 2013
  • We have prepared a DEMO conveyor device for conveying a large 8G class glass sheet using ahorizontal air-cushion system. This device consists of the body frame and the driving frame that are combined to realize a frame for conveying glass without any contact.The driving frame comprises an air flotation table (bed), drive roller supported at both ends, and ASU. Part of the ASU serves to control the airflow as the chamber consists of a porous pad and fan. Fiber filters replace the porous pad and axial fans serve as an air compressor. In addition, to determine the appropriate glass levitation from the air table, this study examined the design specifications of the applied filter (discharge speed of HEPA and ULPA filters, and flow rate) as well as the height of the and the proper supporting roller height (14mm). Then, after adjusting the position of the ASU and the number of ASUs required to configure the UNIT air floating C/V, we analyzed the height and flatness of the glass and derived the appropriate layout (1140-mm distance between ASUs).

반도체 생산에서 진동 제어를 위한 전자기 에어 스프링 (An Electro-magnetic Air Spring for Vibration Control in Semiconductor Manufacturing)

  • 김형태;김철호;이강원;이규섭;손성완
    • 한국소음진동공학회논문집
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    • 제20권12호
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    • pp.1128-1138
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    • 2010
  • 정밀 방진에서 전형적인 문제로 고하중으로 인한 저주파 공진 특성이 있다. 전자기 에어 스프징은 진동 제어 장치이자 능동형 방진 장치이다. 이 연구에서 전자기 에어 스프링은 반도체 생산을 위한 저주파 공진을 제거하는 것을 목적으로 한다. 능동형 방진 장치로 기계 및 전가 부분은 2.5톤의 하 중에 작동되도록 설계하였다. 전자기 스프링은 탄성 공압 챔버 내에 공기압을 이용하여 띄우고, 전자기 된 시스템에 의하면 공진 주파수 영역에서 제어 시간 및 최고 피크가 상당히 줄어들었고, 그 결과 피동형 시스템 상의 고유 진동에 의해 발생되는 공진을 피할 수 있음을 보였다.

자기력을 이용한 비접촉 6자유도 미소위치결정 기구의 개발-설계, 모델링 및 제어- (Development of a Noncontacting 6 DOF Micro-Postioner Driven by Magnetic Force-Design, Modeling and Control-)

  • 최기봉;박기환;김수현;곽윤근
    • 대한기계학회논문집A
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    • 제20권4호
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    • pp.1164-1176
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    • 1996
  • A magnetically levitated micro-positioner is implemented to avoid mechanical friction and increase precision. Since magnetic levitation system is inherently unstable, most concern is focused on a magnetic circuit design to increase the system dynamic stability. For this, the proposed levitation system is constructed by using an antagonistic structure which permits a simple design and robust stability. From the dynamic equations of motion, it is verified that the proposed magnetically levitated system is decoupled in 6 degree-of-freedom motion. Experimental results are presented in terms of time response and accuracy.

공극력의 능동적 보상을 통한 횡자속 선형 유도 구동기의 추력과 부상력의 비연성화 (Decoupling of Thrust Force and Levitation Force of Transverse Flux Linear Induction Motor by the Active Compensation of Magnetic force across the Air-Gap)

  • 정광석;백윤수
    • 한국정밀공학회지
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    • 제21권11호
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    • pp.91-98
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    • 2004
  • TFLIM(Transverse Flux Linear Induction Motor), making its closed magnetic path with the direction of the traveling field orthogonal, had been developed to decrease an edge effect of the general induction motor. To control the levitation force and the thrust force on the secondary part of TFLIM independently, the various methodologies have been presented. When we try to achieve the independent control using only the multi-phase inputs assigned in the stator coils as an approach, in which condition we can minimize the coupling effect between two forces\ulcorner In this paper, we show the qualitative influence of a slip frequency, an ac magnitude, a dc offset superposed in the ac power, and a major parameter of TFLIM on the couple through the computer simulation. And to realize the independent motions between levitation and thrust motion without any auxiliary means fur isolation of the secondary part of TFLIM, the decouple compensator is suggested, including the experimental results.

자기부상열차의 곡선주로(60mR) 주행 시를 고려한 부상용 전자석 설계 Simulation (The Design Simulation of the Levitation Magnet for the Urban Transit Maglev as the Running Vehicle on Curved Line(60mR))

  • 김봉섭
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2002년도 하계학술대회 논문집 B
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    • pp.682-684
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    • 2002
  • There is much room for consideration that the magnet design of UTM. When the vehicle runs 60mR curved line on test track, the ratio of cross section area changed to cross the magnet pole and rail. The ratio is reduced about 20% of the total magnet on one bogie. Therefor, magnet current is increased about 3.5A to maintain constant air gap. This paper suggest to margin of the magent design is 1.1 rather than rated levitation force.

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도시형 자기부상열차 3방향 분기기 개발현황 및 시험결과 (Development Status and Test Results of the 3 way Switch for the Urban Maglev)

  • 이종민;한형석;김창현;신현재;서성호
    • 한국철도학회:학술대회논문집
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    • 한국철도학회 2011년도 춘계학술대회 논문집
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    • pp.1742-1749
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    • 2011
  • The 3 way segmented Maglev switch is developed for the urban Maglev vehicle, which is scheduled to debut at the middle of 2013 in Incheon International Airport. The 3 way switch is composed of 3 moving girders, 4 fixed girders, driving units, moving units, clamping units and articulated angle relieving equipment etc. In this paper, the measured results on the interaction between vehicle and switch are discussed. The measured results are following; First, continuous moving test and natural frequency for girder and levitation rail. Second, levitation and lateral air gap of the bogies running on the curved switch. Third, noise of moving mechanical parts of the 3 way segmented switch. Forth, thermal displacement of the girder due to temperature change. With over the measured results, more reliability and stability of the 3 way segmented switch are secured.

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자기부상용 증축형 전자석의 설계 및 특성 해석 (Design and Analysis of an Axial Flux Magnet for Magnetic Levitation System.)

  • 강도현;신판석;김용주;조윤현;박도영
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1990년도 추계학술대회 논문집 학회본부
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    • pp.63-67
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    • 1990
  • An axial flux magnet for a magnetic levitation system is designed and analysed by finite element simulations. The results are compared with those of experiment in order to verify the analysing method. Lift force, air gap flux density and temperature characteristics of the magnet showed fairly good agreement with each other.

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