Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Development of a Noncontacting 6 DOF Micro-Postioner Driven by Magnetic Force-Design, Modeling and Control-

자기력을 이용한 비접촉 6자유도 미소위치결정 기구의 개발-설계, 모델링 및 제어-

  • Choi, Kee-Bong (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Park, Kyi-Hwan (Dept. of Mechatronics, Gwangju Institute of Science and Technology) ;
  • Kim, Soo-Hyun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kwak, Yoon-Keun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 최기봉 (한국과학기술원 기계공학과) ;
  • 박기환 (광주과학기술원 기전공학과) ;
  • 김수현 (한국과학기술원 기계공학과) ;
  • 곽윤근 (한국과학기술원 기계공학과)
  • Published : 1996.04.01
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Abstract

A magnetically levitated micro-positioner is implemented to avoid mechanical friction and increase precision. Since magnetic levitation system is inherently unstable, most concern is focused on a magnetic circuit design to increase the system dynamic stability. For this, the proposed levitation system is constructed by using an antagonistic structure which permits a simple design and robust stability. From the dynamic equations of motion, it is verified that the proposed magnetically levitated system is decoupled in 6 degree-of-freedom motion. Experimental results are presented in terms of time response and accuracy.

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