Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)
- Volume 20 Issue 4
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- Pages.1164-1176
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- 1996
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- 1226-4873(pISSN)
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- 2288-5226(eISSN)
DOI QR Code
Development of a Noncontacting 6 DOF Micro-Postioner Driven by Magnetic Force-Design, Modeling and Control-
자기력을 이용한 비접촉 6자유도 미소위치결정 기구의 개발-설계, 모델링 및 제어-
- Choi, Kee-Bong (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
- Park, Kyi-Hwan (Dept. of Mechatronics, Gwangju Institute of Science and Technology) ;
- Kim, Soo-Hyun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
- Kwak, Yoon-Keun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
- Published : 1996.04.01
Abstract
A magnetically levitated micro-positioner is implemented to avoid mechanical friction and increase precision. Since magnetic levitation system is inherently unstable, most concern is focused on a magnetic circuit design to increase the system dynamic stability. For this, the proposed levitation system is constructed by using an antagonistic structure which permits a simple design and robust stability. From the dynamic equations of motion, it is verified that the proposed magnetically levitated system is decoupled in 6 degree-of-freedom motion. Experimental results are presented in terms of time response and accuracy.
Keywords
- Magnetic Levitation;
- Antagonistic Structure;
- Permanent Magnet;
- Air-Core Solenoid;
- Moving-Magenet Type Manipulator
- 자기부상;
- 상반구조;
- 영구자석;
- 공심 솔레노이드;
- 이동자석형 매니퓰레이터;