• 센서학회지
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• 제8권5호
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• pp.394-399
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• 1999

자동차용 박막 히터형 공기 유량센서는 스퍼터링법으로 백금박막을 증착하여 감광막 lift-off법으로 패터닝하고 $1,000^{\circ}C$에서 열처리하였으며, 이 박막을 보호하도록 폴리이미드 PI-2723을 백금박막 위에 도포하여 보호막으로 사용하였다. 제작한 센서를 유량에 따른 특성을 측정한 결과 출력전압이 유량의 4제곱에 비례하였고, 전체 측정 범위에서 유량에 따른 출력전압 오차는 0.7%이내 이었다 제작한 센서를 $-20^{\circ}C{\sim}120^{\circ}C$ 온도범위에서 실험한 결과 ${\pm}1%$의 온도에 따른 출력전압 오차가 발생하여 지금까지 개발된 유량센서의 ${\pm}3%$ 온도에 따른 출력전압 오차보다 ${\pm}2%$ 낮았다. 따라서 제작한 박막 히터형 공기 유량센서는 자동차에 적용하기 위한 사양을 만족하며 온도에 따른 출력전압 오차가 작으므로, 자동차 엔진의 공연비를 정확하게 제어할 수 있게 되어 배기가스 중 오염물질을 줄이고 연비를 향상시킬 수 있다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2482-2487
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• 2007

Numerical simulations are conducted for the analysis of a thermal mass air flow sensor with periodic heating pulses on silicon-nitride ($Si_3N_4$) thin membrane structure. This study aims to find the locations of temperature sensors on the thin membrane and the heating pulse conditions, that the higher sensitivity can be achieved, for the development of a MEMS fabricated mass air flow sensor which is driven in periodic heating pulse. The simulations, thus, focus on the membrane temperature profile according to variation of the flow velocity, heating duration time and imposed power. The flow velocity of the simulations is ranging from 3 m/s to 35 m/s, heating duration time from 1 ms to 3 ms and imposed power from 50 mW to 90 mW. The corresponding Reynolds numbers vary from 1000 to 10000.

• Journal of Advanced Marine Engineering and Technology
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• 제25권4호
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• pp.846-856
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• 2001

An experimental study has been made to investigate the effect on wake flow and vortex shedding frequency by vortex stabilizer in Karman vortex type air flow sensor. The conditions investigated include 3 types of shapes and 3 types of separation distances of the vortex stabilizer. The phase averaged technique and smoke-wire flow visualization method are used to understand the detail information. The rolling up position of shear layer is fixed by the influence of the vortex stabilizer. Especially, the convex type vortex stabilizer has shown the more stable repeatability and linearity regarding the vortex shedding frequency compared to the other types.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.1783-1788
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• 2004

In the present paper, a micro flow sensor, which can be used at bio-delivery systems and micro heat pumps, is developed. For this, the micro flow sensor is integrated on a quartz wafer ($SiO_2$) and is manufactured by simple and convenient microfabrication processes. The micro flow sensor aims for measuring mass flow rates in the low range of about $0{\sim}20$ SCCM. The micro flow sensor is composed of temperature sensors, a heater, and a flow microchannel. The temperature sensors and the heater are manufactured by the sputtering processes in this study. In the microfabrication processes, stainless steel masks with different patterns are used to deposit alumel and chromel for temperature sensors and nichrome for the heater on the quartz wafer. The microchannel is made of Polydimethylsiloxane(PDMS) easily. A deposited quartz wafer is bonded to the PDMS microchannel by using the air plasma. Finally, we confirmed the good operation of the present micro flow sensor by measuring flow rate.

• 대한기계학회논문집B
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• 제32권7호
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• pp.542-548
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• 2008

A thermal mass air flow sensor (MAFS), which consists of a micro-heater and thermo-resistive sensors on the silicon-nitride ($Si_3N_4$) thin membrane structure, is micro-fabricated by MEMS processes. Two thermo-resistive temperature sensors are located at $100{\mu}m$ upstream and downstream from the micro-heater respectively. The thermal characteristics are measured to find the best measurement indicator. The micro-heater is operated under constant power condition, and four flow indicators are investigated. The normalized temperature indicator shows good physical meaning and is easy to use in practice. It is found that the configurations and heating power of thermal-resistive elements are the dominant factors to determine the range of the flow measurement in the MAFS with higher sensitivity and accuracy.

• 센서학회지
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• 제20권6호
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• pp.363-367
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• 2011

This paper proposes a highly-sensitive gas flow sensor with a simple structure. The sensor is composed of a micro-heater for heating the gas medium and a pair of temperature sensors for detecting temperature differences due to gas flow in a sealed chamber on one axis. Operation of the gas flow sensor depends on the transfer of heat through the air medium. The proposed gas flow sensor has the capability to measure gas flow rates <5 $cm^3$/min with a resolution of approximately 0.01 $cm^3$/min. Furthermore, this paper reports some additional experiment results, including the sensitivity of the proposed gas flow sensor as a function of operating current and the flow of different types of gas(oxygen, carbon dioxide, and nitrogen). The fabrication process of the proposed sensor is very simple, making it a good candidate for mass production.

• Journal of Advanced Marine Engineering and Technology
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• 제24권4호
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• pp.486-493
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• 2000

Flow mechanism around air flow sensor of electronic control engine, especially Karman vortex type, was investigated experimentally. The two-dimensional flow characteristics in the intermediate wake region behind a triangular vortex-generator respectively apex forward facing, apex backward facing and vertical flat plates following after apex forward facing(i.e vortex-flowmeter) were investigated at Reynolods number of $ReH=1.4\times10^4$; H is the width of a triangular vortex-generator. The vortex shedding frequency for wide Reynolds number from $7\times10^3$ to $2.1\times10^4$ was also surveyed. The velocity component was measured by X-type hot wire anemometer at 8H downstream from the bluff body. The coherent structure of the intermediate wake behind a bluff body was obtained by conditional phase average technique. As a result, it was verified that the vertical flat plates following after apex forward triangular vortex-generator make not only more linear relation between free stream velocity and vortex shedding frequency but also more periodic vortex in the vicinity of the center of wake.

• 한국음향학회지
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• 제42권1호
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• pp.7-15
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• 2023

최근 차량 내 공기 질에 대한 관심이 증가함에 따라 공기 질 측정을 위한 미세먼지 감지 센서의 사용이 보편화되고 있다. 차량 내 에어컨 시스템에 설치되는 미세먼지 감지 센서 내에는 센서에 직접적으로 먼지가 가라앉지 않도록 하기 위한 축류팬이 삽입되어 있다. 센서 작동 시 축류팬의 회전으로 인한 유동 소음은 미세먼지 감지 센서의 주요 소음원으로 작용한다. 차량의 전동화가 급격화가 진행되면서 이러한 유동소음은 미세먼지센서의 제품 경쟁력의 하나로 인식되고 있다. 본 연구에서는 이러한 미세먼지센서용 소형 축류팬의 유동 성능을 개선하여 동일 유량에서 소음을 점감하였다. 먼저 대상 소형 축류팬의 공기역학적 성능을 분석하기 위해 약 2000만 개의 격자로 구성된 가상 팬 성능시험기를 구축하였다. 또한, 유량의 정확한 예측 뿐만 아니라 유동소음의 직접 계산을 위하여 압축성 대와류모사법을 사용하여 유동장을 모사하였다. 수치방법의 유효성은 예측결과와 실험 결과와의 비교를 통하여 확인하였다. 유효성이 검증된 수치 기법을 이용하여 피치각이 유동 성능에 미치는 영향을 분석하였고, 유량을 최대화할 수 있는 피치각을 도출하였다. 최적 피치각을 적용한 축류팬을 사용했을 때 유량은 8.1 % 증가하고 동일 유량에서 소음이 0.8 dBA 감소함을 확인하였다.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2004년도 유체기계 연구개발 발표회 논문집
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• pp.49-53
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• 2004

LabVIEW is mostly preferred to use in experiment, measurement and control as one of the useful thing in America and Europe. So, We tried performance experiment of a single-stage closed-type centrifugal pump by using the LabVIEW. The pump rpm and the shaft torque are measured by rpm sensor and torque sensor The test pump's maximum rpm, head, kW are 1,750, 13m, and 1.5kW, respectively The casing is made up with transparency acrylic for confirmation the flow patterns. We installed experimental equipment for air water two phase flow. This paper tries to analyze the single-phase flow characteristics through this air water two phase flow experimental apparatus. The performance results of a single-stage closed-type centrifugal pump satisfied reappearance and coincide well with head and coefficients according to the change of rpm.

• 한국수소및신에너지학회논문집
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• 제34권1호
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• pp.77-82
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• 2023

The fuel cell in fuel cell electric vehicle utilizes oxygen in the atmosphere, which requires the use of an air cleaner system to minimize the intake of harmful pollutants. To estimate the performance of the air cleaner system, the pressure drop between the filter inlet and outlet is used under the rated air flow condition. In this study, the effect of sensor error in this air cleaner testing is experimentally carried out. It is found that the errors of the temperature sensor does not significantly affect the estimation of pressure drop. However, in the case of the pressure sensor, 5% sensor error results in the error of pressure drop estimation by 3%. Therefore, it is recommended that the measurement accuracy of the pressure sensor mounted in test system should be maintained at less than 5%.