• Journal of Sensor Science and Technology
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• v.20 no.6
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• pp.393-399
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• 2011

In this paper, we designed and fabricated the novel air flow sensor using air drag force, which can be applied to the low air flow detection. To measure the low air flow, we should enlarge the air drag force and the output signal at the given air flow. The paddle structure is applied to the device, and the device is vertically located against the air flow to magnify the air drag force. We also adapt the corrugation structure to improve the output signals on the given air velocity. The device structure is made up of the silicon nitride layer and the output signal is measured with the piezoresistive layer. The output signals from the corrugated device show the better measurement sensitivity and the response time than that of flat one. The repeated measurement also shows the stabilized signals.

• Journal of ILASS-Korea
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• v.5 no.1
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• pp.49-57
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• 2000

This study presents the flow visualization results, velocity and turbulence intensity measurements made within an air filter cover and entry region of a mass air flow sensor (MAFS) which is used in an induction system of 3.8L engine. Flow structure in two air filter cover assemblies were examined. The first was a clear plastic replica of the production cover while the second was a modified clear plastic cover with a geometry configured to reduce fluctuations. High speed flow visualization and laser doppler velocimetry (LDV) systems were used to reveal and analyze the flow field characteristics encountered in the sensor design process under steady flow conditions. A 40-watt copper vapor laser was used as a light source. Its beam is focused down to a sheet of light approximately 1.5mm thick. The light scattered off the particles was recorded by a 16mm high speed rotating prism camera at 5000 frames per second. A comparison of the flow patterns and LDV measurements in the original and modified air filter covers is presented to illustrate the controlling effect of the cover design on the turbulence structure formation near the bypass and on the sensor output signal. In both axial and radial planes of the main passage it was found that the turbulence flow pattern is remarkably influenced by the air filter cover and main passage configuration.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.31A no.5
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• pp.113-120
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• 1994

Silicon flow sensor that can detect the velocity and direction of air flow was designed and fabricated by integrated circuit process and bulk micromachining technique. The flow sensor consists of three-layered dielectric diaphragm, a heater at the center of the diaphragm, and four thermopiles surrounding the heater at each side of diaphragm as sensing elements. This diaphragm structure contributes to improve the sensitivity of the sensor due to excellent thermal isolation property of dielectric materials and their tiny thickness. The flow sensor has good axial symmetry to sense 2-D air flow with the optimized sensing position in the proposed structure. The sensor is fabricated using CMOS compatible process followed by the anisotropic etching of silicon in KOH and EDP solutions to form I$\mu$ m thick dielectric diaphragm as the last step. TCR(Temperature Coefficient of Resistance) of the heater of the fabricated sensors was measured to calculate the operating temperature of the heater and the output voltage of the sensor with respect to flow velocity was also measured. The TCR of the polysilicon heater resistor is 697ppm/K, and the operating temperature of the heater is 331$^{\circ}C$ when the applied voltage is 5V. Measured sensitivity of the sensor is 18.7mV/(m/s)$^{1/2}$ for the flow velocity of smaller than 10m/s.

• Journal of Sensor Science and Technology
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• v.28 no.1
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• pp.1-6
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• 2019

This paper presents an air flow sensor (AFS) based on a polymer thin film. This AFS primarily consists of a polymer membrane attached to a metal-patterned glass substrate and a temperature-sensing element composed of NiCr. These two components were integrated on a single glass substrate. The AFS measures changes in capacitance caused by deformation of the polymer membrane based on the air flow and simultaneously detects the temperature of the surrounding environment. A readout integrated circuit (ROIC) was also fabricated for signal processing, and an ROIC chip, 1.8 mm by 1.9 mm in size, was packaged with an AFS in the form of a system-in-package module. The total size of the AFS is 1 by 1 cm, and the diameter and thickness of the circular-shaped polymer membrane are 4 mm and $15{\mu}m$, respectively. The rate of change of the capacitance is approximately 11.2% for air flows ranging between 0 and 40 m/s.

• Proceedings of the KIEE Conference
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• 1993.11a
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• pp.188-191
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• 1993

Silicon flow sensor which can detect the magnitude and direction of two dimensional air flow was designed and fabricated by CMOS process and bulk micromachining technique. The flow sensor consists of three-layered dielectric diaphragm a heater at the center of the diaphragm and four thermopiles surrounding the heater at each side of diaphragm as sensing elements. This diaphragm structure contributes to improve the sensitivity due to excellent thermal isolation property of dielectric materials and its tiny thickness. The flow sensor has good axial symmetry to sense 2-D air flow with the optimized sensing position in the given structure. Measured sensitivity of our sensor is $18.7mV/(m/s)^{1/2}$.

• Journal of Mechanical Science and Technology
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• v.18 no.2
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• pp.286-293
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• 2004

The air fuel ratios of current gasoline engines are almost controlled by several air flow meters. When CVVT (Continuous Variable Valve Timing) is applied to a gasoline engine for higher engine performance, the MAP (Manifold Absolute Pressure) sensor is difficult to follow the instantaneous air fuel ratio due to the valve timing effect. Therefore, a HFM (Hot Film Flow Meter) is widely used for measuring intake air flow in this case. However, the HFMs are incapable of indicating to reverse flow, the oscillation of intake air flow has an negative effect on the precision of the HFM. Consequently, the various duct configurations in front of the air flow sensor affect the precision of HFM sensitivity. This paper mainly focused on the analysis of the reverse flow, flow fluctuation in throttle upstream and the geometry of intake system which influence the HFM measurement.

• Structural Monitoring and Maintenance
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• v.3 no.4
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• pp.335-347
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• 2016

One of major errors in flow rate measurement for two-phase flow using an Electrical Capacitance Sensor (ECS) concerns sensor sensitivity under temperature raise. The thermal effect on electrical capacitance sensor (ECS) system for air-water two-phase flow monitoring include sensor sensitivity, capacitance measurements, capacitance change and node potential distribution is reported in this paper. The rules of 12-electrode sensor parameters such as capacitance, capacitance change, and change rate of capacitance and sensitivity map the basis of Air-water two-phase flow permittivity distribution and temperature raise are discussed by ANSYS and MATLAB, which are combined to simulate sensor characteristic. The cross-sectional void fraction as a function of temperature is determined from the scripting capabilities in ANSYS simulation. The results show that the temperature raise had a detrimental effect on the electrodes sensitivity and sensitive domain of electrodes. The FE results are in excellent agreement with an experimental result available in the literature, thus validating the accuracy and reliability of the proposed flow rate measurement system.

• Transactions of the Korean Society of Automotive Engineers
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• v.9 no.1
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• pp.102-111
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• 2001

To describe the air flow characteristics within an air cleaner cover and mass air flow sensor (MAFS) entry region installed in a 3.0L engine air induction system, flow visualization, velocity and turbulence intensity measurements were taken in several view planes. A detailed knowledge of the interaction between the design parameters and the flow structures will enhance our understanding of the motions within the flow field and enable engineers to optimize the induction system and reduce the signal-to-noise ratio in the MAFS output. Emphasis is placed on the analysis of coherent motions and the controlling parameters which affect the air flow in the MAFS entrance region over a flow rate of 13-240 kg/hr. The high speed motion pictures illustrated that the air flow generated within the air cleaner cover under steady state condition is quite complex. In both axial and radial planes of the main passage it was found that the flow pattern is remarkably influenced by the air cleaner cover and main passage configuration. A comparison of the flow patterns and measurements in the original and modified air cleaner cover is presented. Measurements from the MAFS indicated an significant reduction in pressure drop and signal noise for the modified cover as compared with the original cover, over an air flow rate of 13-240 kg/hr.

• Journal of Sensor Science and Technology
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• v.12 no.1
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• pp.24-33
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• 2003

This research is about a comfort sensing system for human environmental monitoring using a one-bodied humidity and temperature sensor and an air flow sensor. The thermal comfort that a human being feels in indoor environment has been known to be influenced mostly by six parameters, i.e. air temperature, radiation, air flow, humidity, activity level and clothing thermal resistance. Considering an environmental monitoring, we have designed and fabricated a one-bodied humidity and temperature sensor and an air flow sensor that detect air relative humidity, temperature and air flow in human environment using surface micromachining technologies. Micro-controller calculates a PMV (predicted mean vote) and CSV (comfort sensing vote) with sensing signals and display a PMV on LCD (liquid crystal display) for human comfort on indoor climate. Our work has demonstrated that a comfort sensing system can provide an effective means of measuring and monitoring the indoor comfort sensing index of a human being. Experimental results with simulated environment clearly suggest that our comfort sensing system can be used in many applications such as air conditioning system, feedback controlling in automobile, home and hospital etc..

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.8
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• pp.573-579
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• 2009

A thermal mass air flow sensor, which consists of a micro-heater and thermal sensors on the silicon-nitride thin membrane structure, is micro-fabricated by MEMS processes. Three thermo-resistive sensors, one for the measurement of microheater temperature, the others for the measurement of membrane temperature upstream and downstream of the micro-heater respectively, are used. The micro-heater is operated under the constant temperature difference mode via a real time controller, based on inlet air temperature. Two design models for microfabricated flow sensor are compared with experimental results and confirmed their applicabilities and limitations. The thermal characteristics are measured to find the best flow indicator. It is found that two normalized temperature indicators can be adopted with some advantages in practice. The flow sensor with this control mode can be adopted for wide capability of high speed and sensitivity in the very low and medium velocity ranges.