Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Air Flow Sensor with Corrugation Structure for Low Air Velocity Detection

주름구조를 적용한 저속 유속 센서

  • Choi, Dae-Keun (Graduate School of NID Fusion Technology, Seoul National University of Science and Technology) ;
  • Lee, Sang-Hoon (Graduate School of NID Fusion Technology, Seoul National University of Science and Technology)
  • 최대근 (서울과학기술대학교 NID 융합기술대학원) ;
  • 이상훈 (서울과학기술대학교 NID 융합기술대학원)
  • Received : 2011.09.01
  • Accepted : 2011.10.25
  • Published : 2011.11.30
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Abstract

In this paper, we designed and fabricated the novel air flow sensor using air drag force, which can be applied to the low air flow detection. To measure the low air flow, we should enlarge the air drag force and the output signal at the given air flow. The paddle structure is applied to the device, and the device is vertically located against the air flow to magnify the air drag force. We also adapt the corrugation structure to improve the output signals on the given air velocity. The device structure is made up of the silicon nitride layer and the output signal is measured with the piezoresistive layer. The output signals from the corrugated device show the better measurement sensitivity and the response time than that of flat one. The repeated measurement also shows the stabilized signals.

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References

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