• Title/Summary/Keyword: Air annealing

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Thermal Annealing Effects on the Structural and Optical Properties of Sputtered TiO$_2$ Films (스퍼터링 TiO$_2$막의 구조 및 광학적 성질에 미치는 열처리 효과)

  • 박성진;이수일;오수기
    • Journal of the Korean institute of surface engineering
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    • v.30 no.1
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    • pp.63-68
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    • 1997
  • The effects of the post-deposition annealing on the structural optical properties of sputtered $TiO_2$ thin films were studied; annealing was carried out in air up to $1000^{\circ}C$ for different duration. The results of the X-ray diffraction and the raman spectroscopy showed the annealing-condition dependent structural transformation of $TiO_2$ films from the as-deposited amorphous phase to the anatase and rutil phases. The spectroscopic elliposometry was used to investigate the deposition-condition dependence of the as-deposted films optical constants and also the evolution of the optical constants correlated with the annealing-induced structural transformation.

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Temperature Dependence of Bonding Structure of GZO Thin Film Analyzed by X-ray Diffractometer (XRD의 결정구조로 살펴본 GZO 박막의 온도의존성)

  • Oh, Teresa
    • Journal of the Semiconductor & Display Technology
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    • v.15 no.1
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    • pp.52-55
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    • 2016
  • GZO film was prepared on p-type Si wafer and then annealed at various temperatures in an air conditions to research the bonding structures in accordance with the annealing processes. GZO film annealed in an atmosphere showed the various bonding structure depending on annealing temperatures and oxygen gas flow rate during the deposition. The difference of bonding structures of GZO films made by oxygen gas flows between 18 sccm and 22 sccm was so great. The bonding structures of GZO films made by oxygen gas flow of 18 sccm were showed the crystal structure, but that of 22 sccm were showed the amorphous structure in spite of after annealing processes. The bonding structure of GZO as oxide-semiconductor was observed the trend of becoming amorphous structures at the temperature of $200^{\circ}C$. Therefore, the characteristics of oxide semiconductor are needed to research the variation near the annealing at $200^{\circ}C$.

Effects of Annealing Temperature and Atmosphere on Properties of Porous Silicon (열처리 온도 및 분위기에 따른 다공질 실리콘의 구조 및 광학적 특성)

  • Choi, Hyun-Young;Yim, Kwang-Gug;Jeon, Su-Min;Cho, Min-Young;Kim, Ghun-Sik;Kim, Min-Su;Lee, Dong-Yul;Kim, Jin-Soo;Kim, Jong-Su;Leem, Jae-Young
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.8
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    • pp.581-586
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    • 2010
  • The porous Si (PS) was annealed at various temperature in air, argon, and nitrogen atmosphere. Structural and optical properties of the annealed PS were investigated by scanning electron microscopy (SEM) and photoluminescence (PL). It is found that the shape of pore is changed from circle to channel as increasing annealing temperature which was annealed in air and argon atmosphere. In case of PS annealed in nitrogen atmosphere, the shape of pore is changed from channel to circle with increase annealing temperature from 600 to $800^{\circ}C$. The PL peak position is blue-shifted with increasing annealing temperature. As annealing temperature increases, the PL intensity of the PS annealed in argon is decreased but that of the PS annealed in nitrogen is increased. It might be due to the formation of Si-N bonds and it passivates the non-radiative centers which is Si dangling bonds on the surface of the PS.

Effects of rapid thermal annealing on Physical properties of polycrystalline CdTe thin films (급속열처리가 다결정 CdTe 박막의 물성에 미치는 효과에 관한 연구)

  • 조영아;이용혁;윤종구;오경희;염근영;신성호;박광자
    • Journal of the Korean Vacuum Society
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    • v.5 no.4
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    • pp.348-353
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    • 1996
  • Rapid thermal annealing (RTA) was applied to polycrystalline CdTe thin films evaporated on CdS/ITO/glass substrate and the effect of the annealing temperatures and the atmosphere on physical properties of polycrystalline CdTe thin films and CdTe/CdS solar cell characteristics were studied. Results obtained by EDX showed that the bulk composition of CdTe remained stoichiometric after annealing at $550^{\circ}C$ in the air but the surface composition became Cd-rich. Cross-sectional TEM and micro EDX showed that columnar grains and micro-twins remained even after RTA, however, and the sulfur content in the annealed CdTe (added by sulfur diffusion from CdS during the annealing) was much smaller than that by furnace annealing. Among the investigated RTA temperatures and gas environments, the cell made with CdTe annealed at $550^{\circ}C$ in air showed the best solar energy conversion efficiency.

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A Study on the Performance Evaluation of Heat Treatment Furnace Design for Copper Tube Bending (동관 벤딩을 위한 열처리로 설계 및 성능평가에 관한 연구)

  • Park, Dae-kwang;Kim, Jae-yeol;Gao, Jia-Chen
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.15 no.1
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    • pp.136-144
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    • 2016
  • The air-conditioning industry is closely related to types of lifestyles, climate, and products. With the improvement of national income, the pursuit of pleasant living and working environments, and South Korea's four seasons and distinct climatic conditions, demand for air conditioning has increased. In addition, the industry is becoming increasingly precise and cooperative, and the increase in the domestic production of sophisticated air conditioning and continued growth of future industrial cooperation are expected to rapidly rise. Accordingly, the study of air piping systems can improve the productivity and quality of products and cost savings and can achieve vibration reduction. Additionally, using a heat treatment furnace for copper tube annealing treatment reduces the risk of using an oxy-acetylene torch.

An Algorithm for the Loading Planning of Air Express Cargoes (항공 특송화물 탑재계획을 위한 알고리즘)

  • Son, Dong-Hoon;Kim, Hwa-Joong
    • Journal of Korean Society of Industrial and Systems Engineering
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    • v.39 no.3
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    • pp.56-63
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    • 2016
  • For air express service providers offering various express delivery services such as overnight delivery and next-business day delivery services, establishing quickly cargo loading plans is one of important issues owing to the characteristics of air express business, i.e., a short amount of time is available to complete all cargo loading operations before flight departure after receiving air express containers, pallets and bulks. On the other hand, one of major concerns in the air cargo loading planning is to make a plan that insures the stability of an aircraft to avoid take-off, flight, and landing accidents. To this end, this paper considers an air cargo loading planning problem, which is the problem of determining locations in the aircraft cargo space where air containers, pallets and bulks to be loaded while insuring the aircraft stability, motivated from DHL and Air Hong Kong. The objective of the problem is to maximize the total revenue gained from loading air express containers, pallets and bulks. To solve the problem, this paper suggests a simulated annealing algorithm to overcome impracticality of the integer programming model developed by a previous study requiring excessive computation time. The results of computational experiments show that the heuristic algorithm is a viable tool for establishing express cargo loading plans as giving robust and good solutions in a short amount of computation time. Scenario analyses are performed to investigate the effect of the current activities of air express carriers on the revenue change and to draw practical implications for air express service providers.

Phase Transformation Characteristic of Nitinol Shape Memory Alloy with Annealing Treatment Conditions (어닐링 열처리 조건에 따른 NITINOL 형상기억합금의 상변환 특성 연구)

  • 여동진;윤성호
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.426-429
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    • 2003
  • In this study, phase transformation characteristics of Nitinol shape memory alloy with 54.5wt%Ni-45.5wt%Ti were investigated by varying with annealing treatment and cutting conditions through DSC(differential scanning calorimetry). Annealing treatment conditions were considered as heat treated time of 5 min, 15 min, 30 min, and 45 min, heat treated temperature of 40$0^{\circ}C$, 50$0^{\circ}C$, 5$25^{\circ}C$, 55$0^{\circ}C$, 575$^{\circ}C$, $600^{\circ}C$, $700^{\circ}C$, 80$0^{\circ}C$, and 90$0^{\circ}C$, and environmental condition of heat treatment under vacuum or air. Cutting conditions were considered as no cutting, one side cutting, and two side cutting. Tensile test was also conducted on Nitinol shape memory alloy to investigate thermomechanical characteristics by varying with annealing heat treatment histories. According to the results, annealing treatment and cutting conditions were found to significantly affect on phase transformation and thermomechanical characteristics of Nitinol shape memory alloy.

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A Study of Annealing Heat-treatment for Ti(Grade 2) by Electrochemical Methods (전기화학적 방법을 이용한 Ti(Grade 2)재의 최적 어닐링 열처리에 대한 연구)

  • 백신영
    • Journal of Advanced Marine Engineering and Technology
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    • v.26 no.1
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    • pp.90-98
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    • 2002
  • In this paper, the annealing heat treatments for the best corrosion resistant of Ti(Grade 2) were studied in a 3.5% NaCl solution by electrochemical methods. The annealing heat treatments were accomplished at 650, 700 and $750^{\circ}C$ with different time of 30min., 1hour and 2 hours in a vacuum condition. The obtained results are: 1) in the case of solution heat treated $930^{\circ}C$ for 2 hours in a vacuum and air, the corrosion potentials were -348.7 and -567. 1mV, and current densities 2.32 and $22.62\mu\textrm{A}$, respectively, 2) as increase both annealing heat treatment temperature 650, 700, $750^{\circ}C$ and time 30min., 1 hour, 2 hours, the corrosion potential were decreased, whereas corrosion current density increased, 3) in the case of cyclic polarization, the measured charges were increased as increasing solution heat treatment temperature and time, 4) on the bases of corrosion potential, current density and charge, the best annealing temperature and time were measured as $700^{\circ}C$ and 30min. for Ti(Grade 2) material.

Effect of Rapid Thermal Annealing and Orientation of Si Substrate on Structural and Electrical Properties of MOCVD-grown TiO2 Thin Films (급속 후 열처리 및 실리콘기판 배향에 따른 MOCVD-TiO2박막의 구조적.전기적 특성)

  • 왕채현;최두진
    • Journal of the Korean Ceramic Society
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    • v.35 no.1
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    • pp.88-96
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    • 1998
  • The structural and electrical properties of titanium dioxide(TiO2) thin films deposited on p-type (100) si and 4$^{\circ}$off(100) Si substartes by metalorganic chemical vapor deposition (MOCVD) have been studied with post rapid thermal annealing. TiO2 thin films of anatase phase were grown at 300-500$^{\circ}C$ using titanium post rapid thermal annealing at a temperature of 800$^{\circ}C$ for 30sec. rutile phase was observed in the condition of the deposition temperature over 350$^{\circ}C$ in the ambient air atmosphere and at 500$^{\circ}C$ in cacuu,. SEM and AFM study show-ed surface roughness were increased slightly from 40${\AA}$to 55${\AA}$ after annealing due to grain growth and phase transformation. From capacitane-voltage measurement of Al/TiO2./p-Si structure after annealing we obtained ideal capacitance-voltage characteristics of MOS structure with dielectric constant of 16-22 in case of (100) Si and about 30- in case of 4$^{\circ}$off(100) Si but showed the higher leakage current.

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Efficient Simulated Annealing Algorithm for Optimal Allocation of Additive SAM-X Weapon System (Simulated Annealing 알고리듬을 이용한 SAM-X 추가전력의 최적배치)

  • Lee, Sang-Heon;Baek, Jang-Uk
    • IE interfaces
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    • v.18 no.4
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    • pp.370-381
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    • 2005
  • This study is concerned with seeking the optimal allocation(disposition) for maximizing utility of consolidating old fashioned and new air defense weapon system like SAM-X(Patriot missile) and developing efficient solution algorithm based on simulated annealing(SA) algorithm. The SED(selection by effectiveness degree) procedure is implemented with an enhanced SA algorithm in which neighboring solutions could be generated only within the optimal feasible region by using a specially designed PERTURB function. Computational results conducted on the problem sets with a variety of size and parameters shows the significant efficiency of our SED algorithm over existing methods in terms of both the computation time and the solution quality.