• 제목/요약/키워드: Aerosol deposition

검색결과 203건 처리시간 0.029초

에어로졸성막법에 의해 제작된 Bi:YIG 막에 미치는 에어로졸유량의 영향 (Effect of Carrier Gas Flow Rate on Magnetic Properties of Bi:YIG Films Deposited with Aerosol Deposition Method)

  • 신광호
    • 한국자기학회지
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    • 제18권1호
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    • pp.14-18
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    • 2008
  • 본 연구에서는 Bi:YIG($Bi_{0.5}Y_{2.5}Fe_5O_{12}$) 막을 에어로졸 성막법을 이용하여 제작함에 있어서, 에어로졸을 구성하는 수송가스의 유량이 막의 자기적 특성과 광학적인 특성에 대하여 분석하였다. 직경 $100{\sim}500$ nm 의 Bi:YIG 분말을 질소 가스를 수송가스로 사용하여 성막을 실시하였고, 이 때, 수송가스의 유량은 0.5 l/min${\sim}10$ l/min 사이에서 변화시켰다. 수송가스의 유량이 증가할수록 Bi:YIG 막의 보자력은 51 Oe에서 37 Oe까지 지수함수적으로 감소하였다. 이것은 충돌에너지가 증가함에 따라 막내부 혹은 막표면의 결함이 감소하였기 때문이라고 고찰되었다. 포화자화는 유량이 증가할수록 감소하였는데, 이는 충돌에너지가 강해짐에 따라 결정이 왜곡되는 힘을 받았기 때문이라고 고찰되었다.

에어로졸 데포지션 공정으로 제작된 BaTiO3 필름 성장에 출발 원료가 미치는 영향 (Effect of Starting Powder on the Growth of BaTiO3 Film Prepared by Aerosol Deposition Process)

  • 조명연;김익수;이동원;구상모;오종민
    • 한국전기전자재료학회논문지
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    • 제33권3호
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    • pp.208-213
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    • 2020
  • Four types of BaTiO3 powders are prepared and successfully deposited on glass and Pt/Si substrates using the aerosol deposition process. Particles with sizes of 0.45 ㎛ and 0.3 ㎛ are selected as the starting powder, while those powders are treated using a different milling method. The jet-milled and ball-milled powders not only showed a smaller particle-size distribution, but compared with the non-milled powder, it also had a higher deposition rate using the uniformly generated aerosol. Although the films deposited using particles with size 0.45 ㎛ exhibited some craters on the surface, significantly flat film surfaces were obtained. However, particles with size 0.3 ㎛ create a slightly rough film surface, but the dielectric constant was greater than in the case involving particles with size 0.45 ㎛. Consequently, a suitably large particle size significantly influences the deposition rate and improvement in the surface roughness, and a uniform particle size distribution appears to contribute to an improved dielectric constant. Therefore, it is believed that the dielectric properties along with the growth characteristics can be enhanced by limiting particle size and shape.

에어로졸 데포지션 법을 이용하여 제조한 SiO2 후막의 구조 및 광학 특성 (Structural and Optical Properties of SiO2 Thick Films by Aerosol Deposition Process)

  • 장찬익;고중혁
    • 한국전기전자재료학회논문지
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    • 제26권1호
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    • pp.6-12
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    • 2013
  • Aerosol deposition(AD) coating that enable fabricate films at low temperature have begun to be widely researched for the integration of ceramics as well to realize high-speed deposition rates. For application of ceramic thick film by AD to display and electronic ceramic industry, fabrication of dense structure with a no cracking is required. In this study, to fabricate dense ceramic thick film, the effect of crystal phase of starting powder was investigated. For this study, amorphous and crystalline $SiO_2$ powders were used as starting powders. Two types of $SiO_2$ powders were deposited on glass substrate by AD. In the case of amorphous $SiO_2$ powder, the deposited films had extremely incompact and opaque layer, irrespective of particle size. In contrast to amorphous powder, in the case of crystalline powder, porous structure layer and dense microstructure with no cracking layer were fabricated depending on the particle size. The optimized starting powder size for dense coating layer was $1{\sim}2{\mu}m$. The transmittance of film reached a maximum of 76% at 800 nm.

모멘트 방법을 이용한 에어로즐 모델의 개발과 실험을 통한 검증 (Development of Aerosol Model Using Moment Method and Validation by Experiments)

  • Kim Gyeong-A;Kim Dae-Seong;Park Seong-Hun;Gwon Sun-Park;Lee Gyu-Won
    • 한국대기환경학회:학술대회논문집
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    • 한국대기환경학회 2002년도 추계학술대회 논문집
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    • pp.385-386
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    • 2002
  • Many important physical properties of natural or man-made aerosol particles such as light scattering, electrostatics charges, and toxicity, as well as their behavior involving physical processes like diffusion and thermophoresis depend strongly on their size distribution. Important aerosol behavior mechanisms affecting the size distribution of aerosol particles include condensation, deposition, and coagulation. (omitted)

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드라이클리닝 시스템에서의 세척성과 재오염성 -계면활성제의 종류와 혼합이 미치는 영향- (Detergency and soil Redeposition in a Drycleaning System -The Effect of Surfactant Type and Their Mixture-)

  • 김주연;박정희
    • 한국의류학회지
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    • 제23권7호
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    • pp.1030-1039
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    • 1999
  • The effect of surfactant mixture 9on detergency and soil redeposition in a dry-cleaning system was investigated employing Aerosol OT as an anionic surfactant and Span 80 as a nonionic surfactant. The effect of charge system on soil deposition was also investigated in order to determine the optimum condition at which soil redeposition is minimum,. Soil deposition instead of soil redeposition on cotton, polyester and wool fabrics was measured employing petroleum solvent and perchloroethylene as organic solvents. The results were as follows. 1. Surface tension or interfacial tension was not changed by the addition of any surfactant or surfactant mixtures. In petroleum solvent however interfacial tension between solrent and water decreased when surfactants were added and increased when surfactants were mixed,. 2. The maximum amount of water solubilization increased as the mole fraction of Aerosol OT increased and more water was solubilized in petroleum solvent than in perchloroethylene. 3. The detergency of cotton was greater and the soil deposition rate was lower in Span 80 solution than in Aerosol OT solution. The soil deposition on cotton fabric decreased when water was solubilized in Aersol OT solution 4. The detergency and soil deposition rate of polyester fabric did not change by the surfactant type of the addition of surfactant mixture and soil deposition rate increased bywater solubilization. 5. Soil deposition on wool fabric was very high when Arosol OT was employed in perchloroethylene and the soil deposition did not change greatly by water solubilization.

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Aerosol Jet Deposition of $CuInS_2$ Thin Films

  • Fan, Rong;Kong, Seon-Mi;Kim, Dong-Chan;Chung, Chee-Won
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.159-159
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    • 2011
  • Among the semiconductor ternary compounds in the I-III-$VI_2$ series, $CulnS_2$ ($CulnSe_2$) are one of the promising materials for photovoltaic applications because of the suitability of their electrical and optical properties. The $CuInS_2$ thin film is one of I-III-$VI_2$ type semiconductors, which crystallizes in the chalcopyrite structure. Its direct band gap of 1.5 eV, high absorption coefficient and environmental viewpoint that $CuInS_2$ does not contain any toxic constituents make it suitable for terrestrial photovoltaic applications. A variety of techniques have been applied to deposit $CuInS_2$ thin films, such as single/double source evaporation, coevaporation, rf sputtering, chemical vapor deposition and chemical spray pyrolysis. This is the first report that $CuInS_2$ thin films have been prepared by Aerosol Jet Deposition (AJD) technique which is a novel and attractive method because thin films with high deposition rate can be grown at very low cost. In this study, $CuInS_2$ thin films have been prepared by Aerosol Jet Deposition (AJD) method which employs a nozzle expansion. The mixed fluid is expanded through the nozzle into the chamber evacuated in a lower pressure to deposit $CuInS_2$ films on Mo coated glass substrate. In this AJD system, the characteristics of $CuInS_2$ films are dependent on various deposition parameters, such as compositional ratio of precursor solution, flow rate of carrier gas, stagnation pressure, substrate temperature, nozzle shape, nozzle size and chamber pressure, etc. In this report, $CuInS_2$ thin films are deposited using the deposition parameters such as the compositional ratio of the precursor solution and the substrate temperature. The deposited $CuInS_2$ thin films will be analyzed in terms of deposition rate, crystal structure, and optical properties.

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에어로졸 증착 공정을 통해 제작한 Al2O3 코팅층의 Al2O3 입자 크기에 따른 성막 메커니즘 연구 (Study of Deposition Mechanism of Al2O3 Films According to Al2O3 Particle Size via Aerosol Deposition Process)

  • 김익수;조명연;구상모;이동원;오종민
    • 한국전기전자재료학회논문지
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    • 제33권3호
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    • pp.219-224
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    • 2020
  • Al2O3 powders with particle sizes of 0.35 ㎛, 0.5 ㎛, 1.5 ㎛, and 2.5 ㎛ are deposited onto glass and Cu substrates using the aerosol deposition (AD) process. The deposition characteristics of Al2O3 films using those four types of Al2O3 powders are investigated to determine the influence of the particle size on the films. To observe detailed micro-structures of the films, the cross-section and surface morphology are observed. Then, the crystalline size and internal strain are calculated from X-ray diffraction peaks in order to confirm the hammering effect as well as the micro-strain during the AD deposition. From the above results, deposition mechanisms related to the particle size are studied. The results of this study indicate the optimal particle size and formation mechanisms for dense Al2O3 film with a smooth surface roughness as well as for a porous Al2O3 film with a rough surface roughness.

저압 임팩터를 이용한 대기 에어로졸 중 원소 성분의 건성침착속도 추정에 관한 연구 (Estimation of Dry Deposition Velocity for Elements in Atmospheric Aerosols by Low-Pressure Impactor)

  • 박정호;최금찬
    • 한국대기환경학회지
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    • 제16권5호
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    • pp.445-451
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    • 2000
  • To estimate dry deposition flux of 12 elements in aerosols, aerosol particles were sampled by a low-pressure impactor(LPI) and a dust jar. The concentrations of 12 elements in aerosol particle and dry deposition were analyzed by a PIXE analysis using as a 2.0 MeV-proton beam. The mean dry deposition velocities of 12 elements were estimated by ranges of 0.74∼2.62 cm/sec. The results showed that the highest value was 3.26 cm/sec for Ca and the lowest value 0.74 cm/sec for Fe. The dry deposition flux for elements was calculated as a function of particle size by 1-step method and 12-step method. In this work, dry deposition velocities were computed with the two existing models; the coarse-particle fraction(4∼30 mm diameter) using the dry deposition velocity model of the Noll and Fang(1998) and the fine-particle fraction (0.05∼4mm diameter) using the Shemel and Hodgson(1980) model. The ratios of the mean calculated/measured fluxes were 3.59 for 1-step method and 0.60 for 12-step method respectively.

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한국에서 분진 및 금속원소의 건식 침착속도 추정에 관한 연구 (Studies on Estimating Dry Deposition Velocities for Atmospheric Aerosol and Metal Elements in Korea)

  • 김성천;김동술
    • 한국대기환경학회지
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    • 제12권1호
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    • pp.101-112
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    • 1996
  • Dry and wet deposition is an impertant removal mechanism of the amobient aerosol in the atmospheric environment. Since the deposition flut provides adverse impacts on various encironmental media including aquatic and ecological system as well as human health, it is essential to quantitatively estimate the removal fluxes of many air pollutants. Thus, the purposes of this experimental study are to investigate seasonal deposition flux variations of the total dustfall and various inorganic elements in the local ambient air and then to finally estimate their dry deposition velocities. To perform the study, the total of 90 dustfall samples were collected from January, 1994 thru February, 1995 in 5 different cities of Korea including Seoul, Suwon, Daejon, Kwangju, and Kangrung. Each sample was analyzed by an AAS and an ICP to determine the quantities of the 11 inorganic elements, such as Zn, Cd, Cr, K, Na, Pb, Ca, Fe, Mn, Mi, and Cu. As results, deposition fluxes, soluble/insoluble fractions, and deposition velocities for each element were extensively investigated. The resulting dry deposition velocities of some elements in Suwon were estimated by ranges of 0.57 .sim. 0.87 cm/sec for Zn, 0.35 .sim. 0.45 cm/sec for Pb, 1.25 .sim. 3.52 cm/sec for Ca, 0.21 .sim. 0.48 cm/sec for Fe, 0.95 .sim. 9.31 cm/sec for Mn, and 2.08 cm/sec for Cu.

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튜브형 가열로 반응기를 이용한 초미립 $SiO_2$ 입자의 제조 및 증착에 대한 수치모사 (The Numerical Simulation of Ultrafine $SiO_2$ Particle Fabrication and Deposition by Using the Tube Furnace Reactor)

  • 김교선;현봉수
    • 한국세라믹학회지
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    • 제32권11호
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    • pp.1246-1254
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    • 1995
  • A numerical model for fabrication and deposition of ultrafine SiO2 particles were proposed in the simplified horizontal MCVD apparatus using tube furnace reactor. The model equations such as energy and mass balance equations and the 0th, 1st and 2nd moment balance equations of aerosols were considered in the reactor. The phenomena of SiCl4 chemical reaction, SiO2 particle formation and coagulation, diffusion and thermophoresis of SiO2 particles were included in the aerosol dynamic equation. The profiles of gas temperature, SiCl4 concentration and SiO2 particle volume were calculated for standard conditions. The concentrations, sizes and deposition efficiencies of SiO2 particles were calculated, changing the process conditions such as tube furnace setting temperature, total gas flow rate and inlet SiCl4 concentration.

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