• Transactions on Electrical and Electronic Materials
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• 제14권2호
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• pp.71-77
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• 2013

Advanced semiconductor manufacturing technology requires methods to maximize tool efficiency and improve product quality by reducing process variability. Real-time plasma process monitoring and diagnosis have become crucial for fault detection and classification (FDC) and advanced process control (APC). Additional sensors may increase the accuracy of detection of process anomalies, and optical monitoring methods are non-invasive. In this paper, we propose the use of a chromatic data acquisition system for real-time in-situ plasma process monitoring called the Plasma Eyes Chromatic System (PECS). The proposed system was initially tested in a six-inch research tool, and it was then further evaluated for its potential to detect process anomalies in an eight-inch production tool for etching blanket oxide films. Chromatic representation of the PECS output shows a clear correlation with small changes in process parameters, such as RF power, pressure, and gas flow. We also present how the PECS may be adapted as an in-situ plasma arc detector. The proposed system can provide useful indications of a faulty process in a timely and non-invasive manner for successful run-to-run (R2R) control and FDC.

• 제어로봇시스템학회논문지
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• 제13권11호
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• pp.1128-1136
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• 2007

This paper presents an application study of a model predictive control based commercial package PCTP to real chemical processes. The first case study concerns a product purity control of a splitter process which distillates styrene from undesired component ethyl-benzene produced from ethyl-benzene dehydrogenation reaction. The second case study is about a temperature control of ethyl-benzene dehydrogenation reactor and an excess oxygen control of the fired heater. Optimum control structure for MPC application is developed for each case study. The application results show a significant improvement in control performance and stability.

• 한국경영과학회지
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• 제23권1호
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• pp.109-141
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• 1998

Many processes in the industrial realm exhibit sstochastic and nonlinear behavior. Consequently, an intelligent system must be able to nonlinear production processes as well as probabilistic phenomena. In order for a knowledge based system to control a manufacturing processes as well as probabilistic phenomena. In order for a knowledge based system to control manufacturing process, an important capability is that of prediction : forecasting the future trajectory of a process as well as the consequences of the control action. This paper examines the robustness of data mining tools under varying levels of noise while predicting nonlinear processes, includinb chaotic behavior. The evaluated models include the perceptron neural network using backpropagation (BPN), the recurrent neural network (RNN) and case based reasoning (CBR). The concepts are crystallized through a case study in predicting a chaotic process in the presence of various patterns of noise.

• 제어로봇시스템학회논문지
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• 제21권9호
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• pp.875-880
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• 2015

Traditional semiconductor process control has been performed through statistical process control techniques in a constant process-recipe conditions. However, the complexity of the interior of the etching apparatus plasma physics, quantitative modeling of process conditions due to the many difficult features constraints apply simple SISO control scheme. The introduction of the Advanced Process Control (APC) as a way to overcome the limits has been using the APC process control methodology run-to-run, wafer-to-wafer, or the yield of the semiconductor manufacturing process to the real-time process control, performance, it is possible to improve production. In addition, it is possible to establish a hierarchical structure of the process control made by the process control unit and associated algorithms and etching apparatus, the process unit, the overall process. In this study, the research focused on the methodology and monitoring improvements in performance needed to consider the process management of future developments in the semiconductor manufacturing process in accordance with the age of the APC analysis in real applications of the semiconductor manufacturing process and process fault diagnosis and control techniques in progress.

• 한국지능시스템학회:학술대회논문집
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• 한국퍼지및지능시스템학회 1993년도 Fifth International Fuzzy Systems Association World Congress 93
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• pp.899-902
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• 1993

A neural model predictive control strategy combining a neural network for plant identification and a nonlinear programming algorithm for solving nonlinear control problems is proposed. A constrained nonlinear optimization approach using successive quadratic programming combined with neural identification network is used to generate the optimum control law for complex continuous chemical reactor systems that have inherent nonlinear dynamics. The neural model predictive controller (MNPC) shows good performances and robustness. To whom all correspondence should be addressed.

• 제어로봇시스템학회논문지
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• 제3권5호
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• pp.526-531
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• 1997

To control nonlinear chemical processes, a new neural linearizing control scheme is proposed. This is a hybrid of a radial basis function(RBF) network and a linear controller, thus the control action applied to the process is the sum of both control actions. Firstly, to train the RBF newtork a linear reference model is determined by analyzing the past operating data of the process. Then, the training of the RBF newtork is iteratively performed to minimize the difference between outputs of the process and the linear reference model. As a result, the apparent dynamics of the process added by the RBF newtork becomes similar to that of the linear reference model. After training, the original nonlinear control problem changes to a linear one, and the closed-loop control performance is improved by using the optimum tuning parameters of the linear controller for the linear dynamics. The proposed control scheme performs control and training simultaneously, and shows a good control performance for nonlinear chemical processes.

• 전자공학회논문지B
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• 제32B권6호
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• pp.821-827
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• 1995

This paper presents a process control language for constructing multiloop control system. which include advanced control algorithms. In order to make controller, this language uses function blocks that do specific operations. Then, the total control algorithm is a set of function blocks, of which each block is represented as a function code. The function code is a line of simple ASCII codes denoting function, input, output, parameters. It is possible to use variables as input/output port of any block. Compared with other language using function block concept, the proposed one enables to use advanced control algorithms undefinitely, such as fuzzy, neural network, predictive controller, etc., because vector and matrix variables as input/output can be used freely in this language. To raise flexibility, we put an intermediate level, which is C-language code, between function code and target-dependent operation code.

• 전기학회논문지
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• 제59권3호
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• pp.614-622
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• 2010

The goal of this paper is to develope the control program based on model which can be applied to 1000MW class coal fired thermal power plant. 1000MW class power plant has the higher efficiency and lower cost because the steam conditions of the ultra super-critical process are higher than them of the previous power plants in temperature and pressure. The program includes the state variable controls which have the desired characteristics for the higher temperature and pressure. The program had been developed successfully using advanced process control. The simulation results using the new control program showed the better performance and safer control than them of the previous control program and we could verify the application possibility of the new program for the actual power plant through the load test, comparison, analysis and tuning.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1993년도 한국자동제어학술회의논문집(국내학술편); Seoul National University, Seoul; 20-22 Oct. 1993
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• pp.959-964
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• 1993

We developed fault diagnosis fuzzy expert system for ACS(Advanced Control System). ACS is a DCS(Distributed Control System) with advanced control algorithm fault tolerance capabilities, fault diagnosis functions, and so on. Fuzzy expert system developed for an ACS in this paper gives an operator alarm signal depending on the state of process value and manipulated value, and the cause of alarm in real time. Simple experiment result with several rules for the-fault-diagnosis of drum level loop in Seoul-Power-Plant.

• 한국지능시스템학회:학술대회논문집
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• 한국퍼지및지능시스템학회 1993년도 Fifth International Fuzzy Systems Association World Congress 93
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• pp.1109-1113
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• 1993

A refuse incineration plant is a complex process, whose multi-variable control problems can not be solved conventionally by deriving an exact mathematical model of the process. The usage of advanced fuzzy technologies within the suitable development methodology is demonstrated by a controller implemented for the refuse incineration plant in Hamburg-Stapelfeld, Germany.