Interaction of Hf precursor with adsorbed hydroxyl on Si (001)-$(2\times1)$ surface using density functional theory
(Density functional theory를 이용한 $H_2O$ 가 흡착된 Si(001)-$(2\times1)$ 표면과 Hf precursor의 상호작용)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 2008.11a
- /
- pp.109-110
- /
- 2008