Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.11a
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- Pages.109-110
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- 2008
Interaction of Hf precursor with adsorbed hydroxyl on Si (001)-$(2\times1)$ surface using density functional theory
Density functional theory를 이용한 $H_2O$ 가 흡착된 Si(001)-$(2\times1)$ 표면과 Hf precursor의 상호작용
- Kim, Dae-Hyun (Dept. Materials Engineering, Korea University of Technology and Education) ;
- Oh, Hyun-Chul (Dept. Materials Engineering, Korea University of Technology and Education) ;
- Kim, Dae-Hee (Dept. Materials Engineering, Korea University of Technology and Education) ;
- Baek, Seung-Bin (Dept. Materials Engineering, Korea University of Technology and Education) ;
- Seo, Hwa-Il (School of Information Technology, Korea University of Technology and Education) ;
- Kim, Yeong-Cheol (Dept. Materials Engineering, Korea University of Technology and Education)
- 김대현 (한국기술교육대학교 신소재공학과) ;
- 오현철 (한국기술교육대학교 신소재공학과) ;
- 김대희 (한국기술교육대학교 신소재공학과) ;
- 백승빈 (한국기술교육대학교 신소재공학과) ;
- 서화일 (한국기술교육대학교 정보기술공학부) ;
- 김영철 (한국기술교육대학교 신소재공학과)
- Published : 2008.11.06
Abstract
We have performed a density functional theory study to investigate the reaction of the