• Tribology and Lubricants
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• v.33 no.6
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• pp.282-287
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• 2017

SU-8 is an epoxy-type photoresist widely used for the fabrication of high-aspect-ratio (HAR) micro-structures in micro-electro-mechanical systems (MEMS). To fabricate highly integrated structures, chemical mechanical polishing (CMP) has emerged as the preferred manufacturing process for planarizing the MEMS structure. In SU-8 CMP, an oxidizer decomposes organic impurities and particles in the CMP slurry remove the chemically reacted surface of SU-8. To fabricate HAR microstructures using the CMP process, the adhesion between SU-8 and substrate material is important to avoid the delamination of the SU-8 film caused by the mechanical-dominant material removal characteristic. In this study, the friction force during the CMP process is measured with a CMP monitoring system to detect the delamination phenomenon and investigate the delamination of the SU-8 film from the silicon substrate under various pressure conditions. The increase in applied pressure causes an increase in the frictional force and wafer-edge stress concentration. The frictional force measurement shows that the friction force changes according to the delamination phenomenon of the SU-8 film, and that it is possible to monitor the delamination phenomenon during the SU-8 CMP process. The delamination at a high applied pressure is explained by the effect of stress distribution and pad deformation. Consequently, it is necessary to control the pressure of polishing, which can avoid the delamination in SU-8 CMP.

• Journal of the Korean institute of surface engineering
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• v.24 no.3
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• pp.119-124
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• 1991

Recently, the trend of research in hard coating is concentrate on developing the process of ionization rate under low operating pressure, to get the thin film with high adhesion and dense microstructures. In this study ionization rate enhancement type PVD process using permanent magnet is developed, which enhances the ionization rate by confining the plasma suppressing the wall loss of electron. By the result to investigate the characteristic of glow discharge, the ionization rate of this process is enhanced about twice as high as that of triod BARE process (about 26%), and more dense TiN microstructures are obtained in this process. Cylindrical ion energy analyzer is made and attached in front of a quadrupole mass filter for the analysis of the energy distribution of reactive gas and activated gas ions from the plasma zone. To analyze the operation mechanism of ion energy analyzer, computer simulation is performed by calculation the electric field environment using finite element method. By these analyses of ion energy distribution of outcoming ions from the plasma zone, it is found that magnetic field enhances ion kinetic energy as well as ionization rate. The other results of this study is that the foundation of feed-back system is constructed, which automatically control the partial pressure of reactive gas. In can be possible by recording the data of mass spectrum and ion energy analysis using A-D converter.

• International Journal of Automotive Technology
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• v.6 no.3
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• pp.259-268
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• 2005

In order to analyze the sheet drawability, the measurement of the plastic strain ratio was carried out for the 5182 aluminum alloy sheets in which were cold rolled without lubrication and subsequent recrystallization annealing. The average plastic strain ratio of the 5182 aluminum sheets was 1.50. It was considered that the higher plastic strain ratio was resulted from the ND//<111> component evolved during rolling and maintained during annealing. The AA5182/polypropylene/AA5182 (AA/PP/AA) sandwich sheets of the 5182 aluminum alloy skin sheet and the polypropylene core sheet with high formability have been developed for application for automotive body panels in future light weight vehicles with significant weight reduction. The AA/PP/AA sandwich sheets were fabricated by the adhesion of the core sheet and the upper and lower skin sheets. The AA/PP/AA sandwich sheet had high plastic strain ratio (1.58), however, the planar anisotropy of the sandwich sheet was little changed after fabrication. The optimum combination of directionality of the upper and lower skin sheets having high plastic strain ratio and low planar anisotropy was calculated theoretically and an advanced process for producing the sandwich sheets with high plastic strain ratio was proposed. The developed sandwich sheets have a high average plastic strain ratio of 1.55 and a low planar anisotropy of 0.17, which was improved more by 3.2 times than that of 5182 aluminum single sheet.

• Journal of the Korean Applied Science and Technology
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• v.21 no.4
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• pp.300-305
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• 2004

High-solid coatings were prepared by blending of previosly synthesized acrylic resins and hexamethylene diisocyanate-trimer and curing it at room temperature. The characterization of the films of the prepared coatings was performed. The impact resistance, cross-hatch adhesion, $60^{\circ}$specular gloss, and heat resistance of the films proved to be good, and the pencil hardness and drying time proved to be slightly poor. Especially, there was a remarkable improvement in the heat resistance. This improvement may stem from the regular arrangement of ethyl groups introduced into the acrylic resin. As a result of Rigid-body pendulum visco-elasticity measurement, dynamic $T_g$ values of cured films increased with dynamic $T_g$ values.

• Macromolecular Research
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• v.11 no.5
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• pp.357-367
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• 2003

The linear low density polyethylene (LLDPE)/zeolite composite using novel inorganic filler, zeolite, is prepared by a conventional compounding procedure using a twin-screw extruder. The observed scanning electron microscopic (SEM) morphology shows a good dispersion and adhesion of zeolite in the LLDPE matrix. The mechanical properties in terms of the Young's modulus, the yield stress, the impact strength, and the elongation at break were enhanced with a successive increment of zeolite content up to 40 wt%. The X-ray diffraction measurement is of supportive for the improved mechanical properties and the complex melt viscosity is as well. Upon applying a certain level of strain on the composites, the dewetting, the air hole formation and its growth are characterized. The dewetting originates around the filler particles at low strain and induces elliptical micropores upon further stretching. The microporosity such as the aspect ratio, the number and the total area of the air holes is also characterized. Thus, the composites loaded 40 % zeolite and 300 % elongation may be applicable for breathable microporous films with improved modulus, impact and yield stress, elongation at break, microporosity and air hole properties.

• Journal of the Semiconductor & Display Technology
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• v.15 no.1
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• pp.12-16
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• 2016

Toluene-free pressure sensitive adhesives were synthesized by using butyl acrylate (BA), 2-hydroxy ethyl acrylate, methyl methacrylate, acrylic acid (AA) as monomers and ethyl acetate as a solvent. The polymerization recipes were designed by changing 1, 3, 5 part per hundreds monomer (phm) of AA content on the basis of 100 BA parts. Two crosslinking agents, ethyl glycol diglycidyl ether (EDGE) and isophorone diisocyanate (IPDI) were added to the synthesized polymers to increase adhesion due to crosslinking. In the measurement of properties, holding power, peel strength, and initial tackiness increased with AA content due to crosslinking between carboxyl group in AA and epoxy group in EDGE and isocyanate group in IPDI. In the comparison of two crosslinking agents, EDGE showed better in the three properties than IPDI by better reaction of epoxy group of EDGE to carboxyl group of AA.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.210-211
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• 2007

The objective of this paper is to effectively detect partial discharges in underground power cables. In this field, we have been usually applied several sensors for such partial discharges. This study used a type of beyond compare antenna based on the influence of background noises. Also, we designed a new structure that is able to easily apply in the adhesion of planar loop types for underground power cables in measurement sensitiveness elevation. A high frequency simulation tool (CST-MWS) was applied to the antenna used in this study, and it was used to evaluate certain characteristics. We fabricated an antenna using the simulation data obtained from a specific test. After checking the sensitivity of this Planar Loop Sensor in the Lab, it was tested in an actual site. This paper analyzed the data as a part of time and frequency domain using an oscilloscope and spectrum analyzer, respectively.

• Tribology and Lubricants
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• v.37 no.2
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• pp.54-61
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• 2021

The effect of the sand blasting before TiAlN coating in the manufacture of WC hard metal alloy tips have been studied. For four different tips, according to the status of processing of the sand blasting and the coating, residual stress measurement by X-ray diffraction and several tests for mechanical properties have been conducted. The results suggest that there was no difference in static mechanical properties, such as hardness, surface roughness and elastic modulus, between two coatings. Furthermore, compressive residual stress was generated equally on their surfaces. Additionally, the compressive residual stress in substrate WC was found to increase greatly when subjected to sand blasting treatment. However, the compressive residual stress decrease after coating regardless of sand blasting treatment. Nevertheless, it is confirmed that the compressive residual stress generated in the coating after sand blasting is less than that in the non-sandblasting coating. This was attributed to the plastic deformation occurring in the WC substrate during coating after sand blasting. In contrast to the scratch test results, sand blasting was assumed to have a negative effect on the adhesion between the coating and substrate. This is because there is a high possibility of microcracks due to plastic deformation in the WC substrate under the coating after sand blasting.

• Journal of the Korean institute of surface engineering
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• v.56 no.3
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• pp.180-184
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• 2023

Scholars have proposed wafer-level bonding and three-dimensional (3D) stacked integrated circuit (IC) and have investigated Cu-Cu bonding to overcome the limitation of Moore's law. However, information about quantitative Cu-Cu direct-bonding conditions, such as temperature, pressure, and interfacial adhesion energy, is scant. This study determines the optimal temperature and pressure for Cu-Cu bonding by varying the bonding temperature to 100, 150, 200, 250, and 350 ℃ and pressure to 2,303 and 3,087 N/cm². Various conditions and methods for surface treatment were performed to prevent oxidation of the surface of the sample and remove organic compounds in Cu direct bonding as variables of temperature and pressure. EDX experiments were conducted to confirm chemical information on the bonding characteristics between the substrate and Cu to confirm the bonding mechanism between the substrate and Cu. In addition, after the combination with the change of temperature and pressure variables, UTM measurement was performed to investigate the bond force between the substrate and Cu, and it was confirmed that the bond force increased proportionally as the temperature and pressure increased.

• Tuberculosis and Respiratory Diseases
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• v.45 no.6
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• pp.1167-1177
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• 1998

Background : Pulmonary tuberculosis is one of the diseases characterized granuloma formation which was controlled by cellular immune reactions. In the process of granulomatous changes, activated alveolar macrophages and T lymphocytes secrete many cytokines including interleukin-1 (IL-1), tumor necrosis factor-alpha(TNF-$\alpha$), interferon-gamma(IFN-$\gamma$) which mediate inflammatory reactions. Intercelluar adhesion molecule-1(ICAM-1) also known to major role player in inflammatory processes, and increased cellular expressions when endothelial cell was stimulated by IL-1, TNF and IFN. Method : To evaluate relationships among cellular immune reactions and clinical stages, pulmonary tuberculosis patients were classified into three groups according to their clinical stages including minimal, moderate and far advanced tuberculosis. TNF-$\alpha$ IFN-$\gamma$, sICAM-1 (soluble form of ICAM-1) were measured at the time of diagnosis and after 6-months anti-tuberculosis medications by radioimmuno assay or enzyme linked immunosolvent assay. Result : TNF-$\alpha$, IFN-$\gamma$, sICAM-1 were significantly increased in moderate and far advanced pulmonary tuberculosis patients but no meaningful changes in minimal staged patients. 6-months anti-tuberculosis medications reduced serum sICAM-1 levels significantly, related to clinical improvement but no significant changes were found in the serum levels of TNF-$\alpha$ and IFN-$\gamma$. In the point of correlations. positive ones revealed between TNF-$\alpha$ and sICAM-1, also between IFN-$\gamma$ and sICAM-1 but no correlation between TNF-$\alpha$ and IFN-$\gamma$. Conclusion : Measurement of serum sICAM-1 could be useful parameter to evaluate the severity of pulmonary tuberculosis and to monitor disease activities during anti-tuberculosis medications.