• Korean Chemical Engineering Research
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• v.48 no.6
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• pp.737-740
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• 2010

High leakage current and threshold voltage shift(${\Delta}Vth$) are demerits of a-Si:H TFT. These characteristics are influenced by gate insulator and active layer film quality, surface roughness, and process conditions. The purpose of this investigation is to improve off current($I_{off}$) and ${\Delta}V_{th}$ characteristics. Nitrogen-rich deposition condition was applied to gate insulator, and hydrogen-rich deposition condition was applied to active layer to reduce electron trap site and improve film density. $I_{off}$ improved from 1.01 pA to 0.18 pA at $65^{\circ}C$, and ${\Delta}V_{th}$ improved from -1.89 V to 1.22 V.

• Tribology and Lubricants
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• v.31 no.3
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• pp.79-85
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• 2015

RC delay is a critical issue for achieving high performance of ULSI devices. In order to minimize the RC delay time, we uses the CMP process to introduce high-conductivity Cu and low-k materials on the damascene. The low-k materials are generally soft and fragile, resulting in structure collapse during the conventional high-pressure CMP process. One troubleshooting method is electrochemical mechanical polishing (ECMP) which has the advantages of high removal rate, and low polishing pressure, resulting in a well-polished surface because of high removal rate, low polishing pressure, and well-polished surface, due to the electrochemical acceleration of the copper dissolution. This study analyzes an electrochemical state (active, passive, transpassive state) on a potentiodynamic curve using a three-electrode cell consisting of a working electrode (WE), counter electrode (CE), and reference electrode (RE) in a potentiostat to verify an electrochemical removal mechanism. This study also tries to find optimum conditions for ECMP through experimentation. Furthermore, during the low-pressure ECMP process, we investigate the effect of current density on surface roughness and removal rate through anodic oxidation, dissolution, and reaction with a chelating agent. In addition, according to the Faraday’s law, as the current density increases, the amount of oxidized and dissolved copper increases. Finally, we confirm that the surface roughness improves with polishing time, and the current decreases in this process.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.212.1-212.1
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• 2015

본 연구에서는 용액 공정을 통해 제작한 IGZO 박막 트랜지스터의 Active layer를 적층 구조로 쌓아올리고, 신뢰성 평가를 위해 Gate에 지속적인 바이어스를 인가함으로써 소자의 문턱 전압 변화를 측정 실험을 진행하였다. Active layer 제작에 사용된 용액의 비율은 In:Zn:Ga = 1:1:30%로 제작되었고, 단일층부터 이중, 삼중층까지 적층을 하였다. 각 소자의 Active layer 층이 많아질수록 이동도가 1.21, 0.87, 0.69 ($cm^2/Vs$)으로 감소하는 등의 전기적 특성이 감소하는 경향을 보였다. 하지만 Gate에 10 V를 3000초간 지속적으로 인가해주었을 때 문턱 전압의 변화가 단일층일 때 10.4 V에서 삼중층일 때 1.3 V로 감소하였다. 이것은 Active layer의 층 사이의 계면이 형성되면서 current path에 영향을 주어 전기적 특성이 감소하였지만, 적층으로 인한 surface의 uniformity가 향상되는 것으로 확인하였다. 또한 1500초에서 Dit (Interface Trap Density)를 추출한 결과, 단일층에서는 $7.53{\times}10^{12}$($cm^{-2}-1$<)로 삼중층에서 $4.52{\times}10^{12}$($cm^{-2}-1$<)의 약 두 배 정도 높게 추출되었다.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.963_964
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• 2009

This paper presents an output ripple reduction of Active-Clamp Forward Converter, which is mainly composed of interleaving two active-clamping forward converters. By interleaving, Output ripple is reduced. The leakage inductance of the transformer or an additional resonant inductance is employed to achieve ZVS during the dead times. The duty cycles are not limited to be equal and within 50%. The complementary switching and the resulted interleaved output inductor currents diminish the current ripple in output capacitors. Accordingly, the smaller output chokes and capacitors lower the converter volume and increase the power density. Detailed analysis of this ouput reduction of Active-Clamp Forward Converter is described.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.936-939
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• 2006

The pneumatic isolator is widely adopted for anti-vibration of precision measuring and manufacturing equipments. But, when the precision demand on anti-vibration is extreme or the load is moving, the performance of anti-vibration can not meet satisfaction. In these cases, as a complementary, active vibration suppression system can be added for advanced performance. In this paper, an active control system is presented, which uses electromagnetic actuators for vibration suppression. The anti-vibration characteristic of pneumatic isolator is analyzed for system modeling and actuator specifying. The modeling and the 3D dynamic simulation is performed for control system design. For the electromagnetic actuator design, the magnetic flex density and the current-force characteristic analysis are achieved.

• Proceedings of the KIEE Conference
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• 2009.04b
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• pp.156-160
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• 2009

This paper presents the interleaved active-clamping ZVS(Zero Voltage Switching) forward converter, which is mainly composed of two active-clamping forward converters. Only two switches are required, and each one is the auxiliary switch for the other. The circuit complexity and cost are thus reduced. The leakage inductance of the transformer or an additional resonant inductance is employed to achieve ZVS during the dead times. The duty cycles are not limited to be equal and within 50%. The complementary switching and the resulted interleaved output inductor currents diminish the current ripple in output capacitors. Accordingly, the smaller output chokes and capacitors lower the converter volume and increase the power density. Detailed analysis and design of this new interleaved active-clamping forward converter are described.

• Proceedings of the KIPE Conference
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• 2002.07a
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• pp.498-501
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• 2002

In the conventional PWM converter, high-frequency switching techniques was used for high-density of energy, but occurred a lot of problems such as switching losses, switching voltage/current stresses, EMI(Electromgnetic Interference) and so on. To overcome these problems, various soft switching techniques have been presented. However these techniques are focused on reducing switching losses and voltage/current stresses . The simulation and experimental results are shown that the active clamp ZVS flyback converter with the proposed RPWM(Random Pulse Width Modulation) technique reduces the conducted noise.

• Progress in Superconductivity and Cryogenics
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• v.22 no.1
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• pp.12-16
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• 2020

As high homogeneity in magnetic field is required to increase the resolution of MRI magnets, various shimming methods have been researched. Using one of them, the design of the superconducting active zonal shim coil for MRI magnets is discussed in this paper. The magnetic field of the MRI magnet is expressed as the sum of spherical harmonic terms, and the optimized current density of shim coils capable of removing higher-order terms is calculated by the Tikhonov regularization method. To investigate all potential designs derived from calculated current density, 4 sweeping parameters are selected: (1) axial length of shim coil zone; (2) radius of shim coils; (3) exact axial position of shim coils; and (4) operating current. After adequate designs are determined with constraints of critical current margin and homogeneity criterion, the total wire length required for each is calculated and the design with a minimum of them is chosen. Using the superconducting wire length of 9.77 km, the field homogeneity over 50 cm DSV is improved from 24 ppm to 1.87 ppm in the case study for 9.4 T whole-body MRI shimming. Finally, the results are compared with the finite element method (FEM) simulation results to validate the feasibility and accuracy of the design.

• Journal of the Optical Society of Korea
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• v.16 no.2
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• pp.181-184
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• 2012

We report, for the first time, operation frequency dependence of current density-voltage ($J_{OLED}-V_{OLED}$) shift for multi-layer organic light-emitting diodes (OLEDs). When the OLEDs were electrically stressed for 21 hours with 50% duty voltage pulses at 60, 120, 240, and 360 Hz, the JOLED-VOLED shifts were suppressed by half for 360 Hz operation compared with 60 Hz operation, but with little change in emission efficiencies. This frequency dependent $J_{OLED}-V_{OLED}$ shift is believed to be commonly observed for typical multi-layer OLEDs and can be used to further improve lifetime of digitally-driven active-matrix OLED displays.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.12 s.255
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• pp.1228-1235
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• 2006

PEMFC(Proton Exchange Membrane Fuel Cell) is a low temperature fuel cell and has many probabilities of commercial use. However, water management is one of the serious technical problems for commercialization. It is necessary to understand the relationship between operation conditions and water behavior in PEMFC channel because it affects fuel cell performance. In this paper, the distribution of current density according to inlet humidity condition is mainly observed and discussed. If the anode inlet is well humidified, electro-osmotic drag is very active. For this reason, current density is very high at inlet side and the distribution is non-uniform.