Structural and Electrical properties of Piezoelectric ZnO Films Grown by Pulsed Laser Deposition for Film Bulk Acoustic Resonator (마이크로파 통신소자용 ZnO 압전 박막의 구조적 전기적 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2005.11a
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- pp.41-42
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- 2005