Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

Improvement of c-axis orientation of ZnO thin film prepared on pre-heated substrate with cooling during RF sputter deposition

RF 스퍼터를 이용하여 미리 가열된 기판을 냉각하며 증착한 ZnO 박막의 c축 배향성 향상에 관한 연구

  • Park, Sung-Hyun (Department of electric & electronics engineering in Kyungwon university) ;
  • Lee, Soon-Beom (Department of electric & electronics engineering in Kyungwon university) ;
  • Shin, Young-Hwa (Department of electric & electronics engineering in Kyungwon university) ;
  • Lee, Neung-Heon (Department of electric & electronics engineering in Kyungwon university) ;
  • Ji, Seung-Han (Department of electric & electronics engineering in Kyungwon university) ;
  • Kwon, Sang-Jik (Department of electric & electronics engineering in Kyungwon university)
  • 박성현 (경원대학교 전기전자공학과) ;
  • 이순범 (경원대학교 전기전자공학과) ;
  • 신영화 (경원대학교 전기전자공학과) ;
  • 이능헌 (경원대학교 전기전자공학과) ;
  • 지승한 (경원대학교 전기전자공학과) ;
  • 권상직 (경원대학교 전기전자공학과)
  • Published : 2006.10.27
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Abstract

In this paper, ZnO thin films were prepared on p-Si(100) by RF magnetron sputtering. Before the depostion, the substrates were pre-heated to 500, 400, 300, $200^{\circ}C$ or not. During the deposition, the substrates were cooled down naturally or kept and then the films were investigated by XRD(X-ray diffraction) and SEM (scanning micro scope). It is showed the most outstanding result that the film was prepared on the substrate were cooled from $400^{\circ}C$. When the substrate was cooled from a certain temperature during deposition, it could be improve the c-axis orientation and useful for application of SAW(surface acoustic wave) filter and FBAR(film bulk acoustic wave resonator) device.

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