Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2006.10a
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- Pages.24-25
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- 2006
Improvement of c-axis orientation of ZnO thin film prepared on pre-heated substrate with cooling during RF sputter deposition
RF 스퍼터를 이용하여 미리 가열된 기판을 냉각하며 증착한 ZnO 박막의 c축 배향성 향상에 관한 연구
- Park, Sung-Hyun (Department of electric & electronics engineering in Kyungwon university) ;
- Lee, Soon-Beom (Department of electric & electronics engineering in Kyungwon university) ;
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Shin, Young-Hwa
(Department of electric & electronics engineering in Kyungwon university) ;
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Lee, Neung-Heon
(Department of electric & electronics engineering in Kyungwon university) ;
- Ji, Seung-Han (Department of electric & electronics engineering in Kyungwon university) ;
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Kwon, Sang-Jik
(Department of electric & electronics engineering in Kyungwon university)
- 박성현 (경원대학교 전기전자공학과) ;
- 이순범 (경원대학교 전기전자공학과) ;
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신영화
(경원대학교 전기전자공학과) ;
-
이능헌
(경원대학교 전기전자공학과) ;
- 지승한 (경원대학교 전기전자공학과) ;
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권상직
(경원대학교 전기전자공학과)
- Published : 2006.10.27
Abstract
In this paper, ZnO thin films were prepared on p-Si(100) by RF magnetron sputtering. Before the depostion, the substrates were pre-heated to 500, 400, 300,
Keywords