• 제목/요약/키워드: Accelerometer.

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공진형 MEMS 가속도계의 음향가진 반응특성 연구 (A Study on Acoustic and Vibratory Response of a MEMS Resonant Accelerometer)

  • 이상우;이형섭;유명종;김도형
    • 전기학회논문지
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    • 제64권9호
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    • pp.1330-1336
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    • 2015
  • It is necessary to study on acoustic and vibratory response of a MEMS resonant accelerometer before applying to military applications. In this paper, we analyze why the resonant accelerometer reacts to an acoustic wave and a high frequency vibration. And we describe experimental results on acoustic and vibratory response of the accelerometer. The accelerometer consists of a proof mass and a dual ended tuning fork. It is a differential resonant accelerometer with arranging a pair of accelerometers. The mode shape was analyzed to find out the input mode frequency by using a FEM simulation. Some experiments regarding the acoustic noise was carried out by using a tweeter and a microphone in the anechoic room. Results showed that the accelerometer reacted to the acoustic wave and vibration which had the input mode frequency as we had expected. We showed experimentally not only that the susceptibility of the accelerometer to an acoustic wave was 70 dB but also that the effectiveness of applying an acoustic absorber and a metal case was 20 dB, respectively. Also, we could minimize the vibratory response property of the accelerometer by installing a IMU with a silicone rubber mount pad.

타공사 감시를 위한 광섬유 가속도계의 개발 (Development of Fiber Optic Accelerometer for Third-Party Damage Detection)

  • 박호림;최재붕;김영진
    • 대한기계학회논문집A
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    • 제25권10호
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    • pp.1551-1558
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    • 2001
  • Recently, a number of underground pipelines have been drastically increased. The integrity of these buried pipelines, especially gas transmitting pipelines, is of importance due to an explosive characteristic of natural gas. The third party damage is known as one of the most critical factor which causes fatal accidents. For this reason, a number of systems detecting third party damage are under development. The major concern in the development of third party damage detection system is to transmit vibration signals out of accelerometer to signal conditioner and data acquisition system without any interference caused by noise. The objective of this paper is to develope a fiber optic accelerometer applicable to third party damage detection system. A fiber optic accelerometer was developed by use of combining principles of one degree of freedom vibration model and an extrinsic Fabry-Perot interferometer. The developed fiber optic accelerometer was designed to perform with a sensitivity of 0.06mVg, a frequency range of less than 6kHz and an amplitude range of -200g to 200g. The developed, accelerometer was compared with a piezoelectric accelerometer and calibrated. In order to verify the developed accelerometer, the field experiment was performed. From the field experiment, vibration signals and the location of impact were successfully detected. The developed accelerometer is expected to be used for the third party damage detection system which requires long distance transmission of signals.

Development of a single-structured MEMS gyro-accelerometer

  • Sung, Woon-Tahk;Lee, Jang-Gyu;Kang, Tae-Sam
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2004년도 ICCAS
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    • pp.592-595
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    • 2004
  • This paper presents a study on the development of a multi-sensing inertial sensor with a single mechanical structure, which can be used both as a gyroscope and an accelerometer. The proposed MEMS gyro-accelerometer is designed to detect the angular rate and the acceleration at the same time using two separate detection circuits for one proof mass. In this study, the detection and signal processing circuit for an effective signal processing of different inertial measurements is designed, fabricated, and tested. The experimental results show that the performances of the gyro-accelerometer have resolutions of 1mg and 0.025deg/sec and nonlinearities of less than 0.5% for the accelerometer and the gyroscope, respectively, which are similar results with those of sensors with different structures and different detection circuits. The size of the sensor is reduced almost by 50% comparing with the sensors of separated proof mass.

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교량에서 발생하는 저주파진동 측정을 위한 가속도계 개발 (Development of an Accelerometer for Measuring Low Frequency Vibration in Bridge)

  • 박경조;최남섭
    • 동력기계공학회지
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    • 제7권2호
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    • pp.36-43
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    • 2003
  • In this paper, the strain-gauge type accelerometer is developed. This type of accelerometer has simple structure and cost for manufacturing is cheap, compared with other types of accelerometer such as piezoelectric, capacitance and servo, etc. Also it is very sensitive to the low frequency vibration which is the prominent characteristics of the vibration occurring by vehicles moving across a bridge. Two prototype accelerometers are designed and manufactured based upon the FE(Finite Element) method and static and dynamic calibration tests are performed to check out the linearity, sensitivity and cross sensitivity, etc. Experimental results designate that the proposed accelerometer show reasonable performances compared to the commercial one.

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기준 가속도계를 이용한 보의 면내 진동인텐시티 측정 (Measurements of the In-Plane Vibration Intensity of a Beam Using an Reference Accelerometer)

  • 김창렬;길현권;전진숙;홍석윤
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2002년도 추계학술대회논문집
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    • pp.848-851
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    • 2002
  • In this paper, an experimental method using a reference accelerometer has been developed to measure the in-plane vibration intensity of a beam. It has the advantages of reducing accelerometer phase error comparing with the cross spectral intensity measurement technique using an accelerometer array. It needs no measurement of the input force required in the frequency response method using the only one accelerometer This method has been used to measure the in-plane vibration intensity over the beam. The result has been compared with an input power and the vibration intensity obtained with other methods. It showed that the present experimental method can be effectively used to measure the structural in-plane vibration intensity.

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가속도 센서를 이용한 보행 정보 및 보행자 위치 추정 (Pedestrian Gait Estimation and Localization using an Accelerometer)

  • 김희승;이수용
    • 로봇학회논문지
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    • 제5권4호
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    • pp.279-285
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    • 2010
  • This paper presents the use of 3 axis accelerometer for getting the gait information including the number of gaits, stride and walking distance. Travel distance is usually calculated from the double integration of the accelerometer output with respect to time; however, the accumulated errors due to the drift are inevitable. The orientation change of the accelerometer also causes error because the gravity is added to the measured acceleration. Unless three axis orientations are completely identified, the accelerometer alone does not provide correct acceleration for estimating the travel distance. We proposed a way of minimizing the error due to the change of the orientation. Pedestrian localization is implemented with the heading angle and the travel distance. Heading angle is estimated from the rate gyro and the magnetic compass measurements. The performance of the localization is presented with experimental data.

Hand arm vibration measurement using micro-accelerometer in different brick structures

  • Gomathi, K.;Senthilkumar, A.;Shankar, S.;Thangavel, S.;Priya, R. Mohana
    • Smart Structures and Systems
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    • 제13권6호
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    • pp.959-974
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    • 2014
  • Hand-Arm Vibration Syndrome (HAVS) is a group of diseases caused by exposure of the hands to vibration while operating the hand held power tools such as road breaker, drilling machine, demolition hammer in construction works. In this paper, area-changed capacitive micro-accelerometer is designed to measure the vibration exposure on worker's hand when operating a drilling machine on various blocks such as clay block, paver block and solid cement block. The design process includes mathematical modelling of micro-accelerometer and simulations are done using INTELLISUITE 8.6. Experimental results are taken for various blocks surfaces using conventional and micro-accelerometer. Comparisons show that usage of area-changed micro-accelerometer for Hand-arm vibration monitoring provides better sensitivity, which in turn reduces the risk of HAVS in workers.

체중심 가속도와 풋스위치를 이용한 편마비 환자의 시공간 보행인자 검출 (Detection of spatia-temporal gait parameter for hemiplegic patients based on an accelerometer and footswitches (Preliminary study))

  • 이효기;이경중;김영호;박시운
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 학술대회 논문집 정보 및 제어부문
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    • pp.542-544
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    • 2005
  • This paper describes the detection of spatio-temporal parameter using an accelerometer and footswitches to evaluate a symmetry and balance of hemiplegic patients. We detected gait data using a 3-axis accelerometer that mounted between L3 and IA intervertebral area and footswitches made by FSR-Sensor attached insole. To minimize the error of the gait parameters to be detected incorrectly in case of using only accelerometer, we enhancement the performance of detection by measuring an accelerometer and foots witches data at the same time. So, it was possible to detect more accurate gait parameters. As a result, we can confirm the symmetry and balance of hemiplegic patients. In the future. these results could be used to evaluate the walking ability in hemiplegic patients in clinical pratice.

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진동 측정용 압전형 가속도센서의 압전특성 효과 (Influence of Effective Piezoelectric Properties on Performance of Piezoelectric Accelerometer for Vibration Measurements)

  • 권정락
    • 한국세라믹학회지
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    • 제32권8호
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    • pp.945-949
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    • 1995
  • In order to investigate the performance of compression-type accelerometer on piezoelectric properties, PZT materials have been studied. The ring-shaped piezoelectric elements were prepared using commercial PZT powders by conventional ceramic process. Their estimated relative dielectric constant, piezoelectric charge constant (d33) and voltage constant (g33) values showed 390∼3400, (90∼593)×10-12 C/N and (19.5∼40.5)×10-3 V-m/N, respectively. The charge sensitivity of accelerometer is proportional to the piezoelectric charge constant value (d33) of PZT, but its voltage sensitivity is related with the piezoelectric voltage constant (g33). Since the mounted resonance frequency and sensitivity are dependent on the seismic mass as well as physical charateristics and size of PZT elements, the suitable considerations between two components are required for accelerometer's design.

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SiOG 기판을 이용한 초소형 가속도계의 설계 및 제작 (Design and fabrication of micromachined accelerometer using SiOG substrate)

  • 정형균;안시홍;박치현;이준영;전승훈;김용권
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.275-277
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    • 2004
  • This paper presents design and fabrication of micromachined accelerometer using $100{\mu}m$ thick SiOG substrate. The proposed accelerometer has a resonant frequency, 6kHz. To reduce the off-axis sensitivity of the accelerometer, the mode characteristic of the accelerometer is investigated using ANSYs modal analysis. Because the accelerometer is fabricated using an SiOG substrate, it is expected to be integrated as one-chip IMU sensor with a gyroscope using an SiOG substrate.

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