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Properties of TiN Films Fabricated by Oblique Angle Deposition (빗각 증착으로 제조된 TiN 박막의 특성)

  • Jung, Jae-Hun;Yang, Ji-Hoon;Park, Hye-Sun;Song, Min-A;Jeong, Jae-In
    • Journal of the Korean institute of surface engineering
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    • v.45 no.3
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    • pp.106-110
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    • 2012
  • Oblique angle deposition (OAD) is a physical vapor deposition where incident vapor flux arrives at non-normal angles. It has been known that tilting the substrate changes the properties of the film, which is thought to be a result of morphological change of the film. In this study, OAD has been applied to prepare single and multilayer TiN films by cathodic arc deposition. TiN films have been deposited on cold-rolled steel sheets and stainless steel sheet. The deposition angle as well as substrate temperature and substrate bias was changed to investigate their effects on the properties of TiN films. TiN films were analyzed by color difference meter, scanning electron microscopy, nanoindenter and x-ray diffraction. The color of TiN films was not much changed according to the deposition conditions. The slanted and zigzag structures were observed from the single and multilayer films. The relation between substrate tilting angle (${\alpha}$) and the growth column angle (${\beta}$) followed the equation of $tan{\alpha}=2tan{\beta}$. The indentation hardness of TiN films deposited by OAD was low compared with the ones prepared at normal angle. However, it has been found that $H^3/E^2$ ratio of 3-layer TiN films prepared at OAD condition was a little higher than the ones prepared at normal angle, which can confirm the robustness of prepared films.

Fabrication of Fe-TiC Composite Powder by High-Energy Milling and Subsequent Reaction Synthesis (고에너지 밀링 및 합성반응에 의한 Fe-TiC 복합분말 제조)

  • Ahn, Ki-Bong;Lee, Byung-Hun;Lee, Young-Hee;Khoa, Hyunh Xuan;Kim, Ji-Soon
    • Journal of Powder Materials
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    • v.20 no.1
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    • pp.53-59
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    • 2013
  • Fe-TiC composite powder was fabricated via two steps. The first step was a high-energy milling of FeO and carbon powders followed by heat treatment for reduction to obtain a (Fe+C) powder mixture. The optimal condition for high-energy milling was 500 rpm for 1h, which had been determined by a series of preliminary experiment. Reduction heat-treatment was carried out at $900^{\circ}C$ for 1h in flowing argon gas atmosphere. Reduced powder mixture was investigated by X-ray Diffraction (XRD), Field Emission-Scanning Electron Microscopy (FE-SEM) and Laser Particle Size Analyser (LPSA). The second step was a high-energy milling of (Fe+C) powder mixture and additional $TiH_2$ powder, and subsequent in-situ synthesis of TiC particulate in Fe matrix through a reaction of carbon and Ti. High-energy milling was carried out at 500 rpm for 1 h. Heat treatment for reaction synthesis was carried out at $1000{\sim}1200^{\circ}C$ for 1 h in flowing argon gas atmosphere. X-ray diffraction (XRD) results of the fabricated Fe-TiC composite powder showed that only TiC and Fe phases exist. Results from FE-SEM observation and Energy-Dispersive X-ray Spectros-copy (EDS) revealed that TiC phase exists uniformly dispersed in the Fe matrix in a form of particulate with a size of submicron.

Effect of TiCl4 Concentration and Mixing Intensity on Phosphorus Removal in Synthetic Wastewater (TiCl4 농도와 교반강도가 수중 인 제거에 미치는 영향)

  • Seo, Wan-Woo;Lee, Bong-Hee;Park, Hwa-Soo;Kim, Jong-Ho;Ahn, Johng-Hwa
    • Journal of Korean Society of Environmental Engineers
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    • v.38 no.3
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    • pp.150-153
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    • 2016
  • This study evaluates the efficacy of titanium tetrachloride ($TiCl_4$) on phosphorus (P) removal in synthetic wastewater. Jar test experiments were performed at various $TiCl_4$ concentration (0.25-0.59 mM), and intensities of slow (30-60 rpm) and rapid (100-250 rpm) mixings to determine the conditions at which P removal was most efficient. The P-removal efficiency was highest (about 99%) at $TiCl_4$ concentration $([TiCl_4])=0.39mM$ with rapid-mixing intensity=100 rpm and slow-mixing intensity=30 rpm. The slow-mixing intensity was more sensitive than the rapid-mixing intensity to the P removal efficiency when [$TiCl_4$] was low ($0.25{\leq}[TiCl_4]{\leq}0.27mM$).

Reproducible Resistance Switching and Physical Characteristics of TiOx films with Oxidation Temperature and Time

  • Kim, Jong-Gi;Na, Hee-Do;Sohn, Hyun-Chul
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.171-171
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    • 2010
  • In this work, we investigated the effect of the oxidation temperature on the unipolar and bipolar resistance switching behaviors of the oxidized TiO-x films. TiOx films on Pt electrodes were fabricated by the oxidation of Ti films at $550^{\circ}C$ for 1 to 3 hours. The unipolar and bipolar resistance switching properties were investigated with the oxidation temperature and time. Also, the crystal structure and the physical properties such as chemical bonding states of TiOx layers were characterized in addition to the resistance switching characteristics. The resistance switching behaviors of TiOx films oxidized at above $450^{\circ}C$ and below $650^{\circ}C$ was shown. So, we investigated that the resistance switching behaviors of TiOx films oxidized at $550^{\circ}C$ with the oxidation time from 1 to 3 hour. The memory windows of unipolar switching in the oxidized TiOx films were reduced with increasing the oxidation time, but those of the bipolar switching were slightly enlarged. The enlargement of rutile TiO2 peak with increasing the oxidation time and temperature was studied by X-ray diffraction. An increase of non-lattice oxygen and Ti3+ in the TiOx films with the oxidation times was investigated by X-ray photoemission spectroscopy. It was expected that the uipolar and bipolar resistive switching of the oxidized TiOx film was strongly related with the migration of non-lattice oxygen anions and schottky barrier height, respectively.

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Photoelectrochemical and Hydrogen Production Characteristics of CdS-TiO2 Nanocomposite Photocatalysts Synthesized in Organic Solvent (유기용매상에서 제조된 수소제조용 CdS-TiO2 나노복합 광촉매의 특성 연구)

  • Jang, Jum-Suk;So, Won-Wook;Kim, Kwang-Je;Moon, Sang-Jin
    • Journal of Hydrogen and New Energy
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    • v.13 no.3
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    • pp.224-232
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    • 2002
  • CdS-$TiO_2$ nano-composite sol was prepared by the sol-gel method in organic solvents at room temperature and further hydrothermal treatment at various temperatures to control the physical properties of the primary particles. Again, CdS-$TiO_2$ composite particulate films were made by casting CdS-$TiO_2$ sols onto $F:SnO_2$ conducting glass and then heat-treatment at $400^{\circ}C$. Physical properties of these 61ms were further controlled by the surface treatment with $TiCl_4$, aqueous solution. The photo currents and hydrogen production rates measured under the experimental conditions varied according to the $CdS/[CdS+TiO_2]$ mole ratio and the mixed-sol preparation method. For $CdS-TiO_2$ composite sols prepared in IPA, CdS particles were homogeneously surrounded by $TiO_2$ particles. Also, the surface treatment with $TiCl_4$ aqueous solution caused a considerable improvement in the photocatalytic activity, probably as a result of close contacts between the primary particles by the etching effect of $TiCl_4$. It was found that the photoelectrochemical performance of these particulate films could be effectively enhanced by this approach.

A Study on Solid Reaction of BaCO3-TiO2 System (BaCO3-TiO2계의 고상반응에 관한 연구)

  • 이응상;황성연;임대영
    • Journal of the Korean Ceramic Society
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    • v.24 no.5
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    • pp.484-490
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    • 1987
  • Diffusion coupling experiment was done to study expansion of body and soild reaction in BaCO3-TiO2 system. Specimen of BaCO3 and TiO2 was formed with Pt-mark's method. Each specimen was fired at interval of 25℃ from 900℃ to 1000℃ for 2hrs. After that, specimen was fixed with resin and polished. Product layers of specimen were observed with SEM and EDS. The result were following; 1. Diffusion component is Ba2+, which diffuse toward TiO2. 2. Large crack between layer of BaCO3 and Ba2TiO4 was generated because of difference of thermal expansion coefficient. 3. Ba2TiO4 is formed to TiO2 body by the reaction of BaTiO3 and BaO and its structure is very porous. 4. BaTiO3 changes immediately to Ba2TiO4 by the reaction of BaO. But BaTiO3 which formed by the reaction of TiO2 and Ba2TiO4 exsists as layer because the diffusion distance of Ba2+ is far.

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Behaviors of Abnormal Expansion in $Ba_2Ti_9O_{20}$ Ceramics during Calcination Process ($Ba_2Ti_9O_{20}$ 요업체의 하소공정중 이상팽창 거동)

  • 성제홍;김정주;김남경;조상희
    • Journal of the Korean Ceramic Society
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    • v.36 no.12
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    • pp.1327-1334
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    • 1999
  • Behaviors of abnormal expansion during calcination process of Ba2Ti9O20 ceramics and its related effects on the sintering characteristics were investigated as a function of precursors. When BaCO3 and TiO2 powders were used as starting materials. BaTi4O9 phase which has relatively large molar volume was formed drastically with abnormal ex-pansion during the calcination at 95$0^{\circ}C$ to 115$0^{\circ}C$ ON the contrary using BaTiO3 and TiO2 powders as starting materials led to retardation of the formation of BaTi4O9 phase and concurrently suppressed the abnormal expansion during cal-cination process. Especially the calcined powder of BaTiO3 and TiO2 had advantages in the densification and formation of Ba2Ti9O20 single phase in the sintering process.

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The Influence of PbO Content on the Crystallisation Characteristics and Dielectric Properties of Glass Frit for LTCC (LTCC용 Glass Frit의 결정화 특성 및 유전 특성에 대한 PbO 함량의 영향)

  • Park, Jeong-Hyun;Kim, Yong-Nam;Song, Kyu-Ho;Yoo, Jae-Young
    • Journal of the Korean Ceramic Society
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    • v.39 no.5
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    • pp.438-445
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    • 2002
  • In this study, the glass frit of $PbO-TiO-2-SiO_2-BaO-ZnO-Al_2O-3-CaO-B_2O_3-Bi_2O_3-MgO$ system was manufactured. The glass was melted at $1,400{\circ}C$, quenched and attrition-milled. The glass frit powder was pressed and fired for 2h at the range of $750~1,000{\circ}C$. The crystallization of glass frit began at about $750{\circ}$ and at low temperature, the main crystal phases were hexagonal celsian($BaAl_2Si_2O_8$) and alumina. As the firing temperature increased, the crystal phases of monoclinic celsian, zinc aluminate, zinc silicate, calcium titanium silicate and titania appeared. And the increase of firing temperature led to transformation of hexagonal celsian to monoclinic. The only glass frit containing 15wt% PbO had the crystal phase of solid solution of $PbTiO_3-CaTiO_3$. At the frequency of 1 MHz, the dielectric constant of glass frit crystallized was in the range of 11~16 and the dielectric loss less than 0.020. But the glass frit containing 15wt% PbO had the dielectric constant of 17~26 and loss of 0.010~0.015 because of crystal phase of solid solution of $PbTiO_3-CaTiO_3$.

Production and High Temperature Mechanical Properties of Ti-TiC Composite by Reaction Milling (반응밀링법에 의한 Ti-TiC 복합재료의 제조 및 고온 기계적 특성)

  • Jin, Sang-Bok;Choe, Cheol-Jin;Lee, Sang-Yun;Lee, Jun-Hui;Kim, Sun-Guk
    • Korean Journal of Materials Research
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    • v.8 no.10
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    • pp.918-924
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    • 1998
  • This study has been carried out to investigate the effect of reaction milling time on the synthesis of Ti- TiC p powder synthesised from the elemental titanium and activated carbon by reaction milling(RM), and the effect of vacu­u urn hot pressing temperature and TiC volume fraction on microstructural and mechanical properties of Ti- TiC com­p posite $\infty$ns이idated by vacuum hot pressing(VHP).T The elemental powders of titanium and activated carbon can be converted into Ti- TiC composite powders by reac­t tion milling for about 300hours, and were the average grain size of the as- milled powders has been measured to be a about $5\mu\textrm{m}$. The relative density of Ti- TiC VHPed above $1000^{\circ}C$ during Ihr is about 98% and the mechanical properties o of In- situ Ti- TiC composites are improved by TiC particle dispersed uniformly on titanium matrix. In order to investi­g gate thermal stability of Ti- TiC composite, after annealing at $600^{\circ}C$ for 80hrs micro- Vickers hardness have been per­f formed, and the values have been shown little changed as compared with those before annealing. The compact has b been tested on high temperature compressive test at $700^{\circ}C$ and has showed a high temperature compressive strength of 330MPa in a Ti- 20vol% TiC.

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Effect of Pore Structures of a Ti-49.5Ni (at%) Alloy on Bone Cell Adhesion (Ti-49.5Ni (at%)합금의 다공성 구조가 뼈 세포 흡착에 미치는 영향)

  • Im, Yeon-Min;Choi, Jung-Il;Khang, Dong-Woo;Nam, Tae-Hyun
    • Korean Journal of Materials Research
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    • v.22 no.2
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    • pp.66-70
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    • 2012
  • Ti-Ni alloys are widely used in numerous biomedical applications (e.g., orthodontics, cardiovascular science, orthopaedics) due to their distinctive thermomechanical and mechanical properties, such as the shape memory effect, superelasticity and low elastic modulus. In order to increase the biocompatibility of Ti-Ni alloys, many surface modification techniques, such as the sol-gel technique, plasma immersion ion implantation (PIII), laser surface melting, plasma spraying, and chemical vapor deposition, have been employed. In this study, a Ti-49.5Ni (at%) alloy was electrochemically etched in 1M $H_2SO_4$+ X (1.5, 2.0, 2.5) wt% HF electrolytes to modify the surface morphology. The morphology, element distribution, crystal structure, roughness and energy of the surface were investigated by scanning electron microscopy (SEM), energy-dispersive Xray spectrometry (EDS), X-ray diffractometry (XRD), atomic force microscopy (AFM) and contact angle analysis. Micro-sized pores were formed on the Ti-49.5Ni (at%) alloy surface by electrochemical etching with 1M $H_2SO_4$+ X (1.5, 2.0, 2.5) wt% HF. The volume fractions of the pores were increased by increasing the concentration of the HF electrolytes. Depending on the HF concentration, different pore sizes, heights, surface roughness levels, and surface energy levels were obtained. To investigate the osteoblast adhesion of the electrochemically etched Ti-49.5Ni (at%) alloy, a MTT test was performed. The degree of osteoblast adhesion was increased at a high concentration of HF-treated surface structures.