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Chemical Mechanical Polishing Characteristics of BTO Films using $TiO_2$- and $BaTiO_3$-Mixed Abrasive Slurry (MAS) ($BaTiO_3$$TiO_2$ 분말이 혼합된 연마제 슬러리(MAS)를 사용한 BTO 박막의 CMP 특성)

  • Lee, Woo-Sun;Seo, Yong-Jin
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.55 no.6
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    • pp.291-296
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    • 2006
  • In this study, the sputtered BTO film was polished by CMP process with the self-developed $BaTiO_3$- and $TiO_2$-mixed abrasives slurries (MAS), respectively. The removal rate of BTO ($BaTiO_3$) thin film using the $BaTiO_3$-mixed abrasive slurry (BTO-MAS) was higher than that using the $TiO_2$-mixed abrasives slurry ($TiO_2$-MAS) in the same concentrations. The maximum removal rate of BTO thin film was 848 nm/min with an addition of $BaTiO_3$ abrasive at the concentration of 3 wt%. The sufficient within-wafer non-uniformity (WIWNU%) below 5% was obtained in each abrsive at all concentrations. The surface morphology of polished BTO thin film was investigated by atomic force microscopy (AFM).

Electrooxidation of tannery wastewater with continuous flow system: Role of electrode materials

  • Tien, Tran Tan;Luu, Tran Le
    • Environmental Engineering Research
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    • v.25 no.3
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    • pp.324-334
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    • 2020
  • Tannery wastewater is known to contain high concentrations of organic compounds, pathogens, and other toxic inorganic elements such as heavy metals, nitrogen, sulfur, etc. Biological methods such as aerobic and anaerobic processes are unsuitable for tannery wastewater treatment due to its high salinity, and electrochemical oxidation offers a promising method to solve this problem. In this study, raw tannery wastewater treatment using DSA® Ti/RuO2, Ti/IrO2 and Ti/BDD electrodes with continuous flow systems was examined. Effects of current densities and electrolysis times were investigated, to evaluate the process performance and energy consumption. The results showed that a Ti/BDD electrode is able to reach higher treatment efficiency than Ti/IrO2, and Ti/RuO2 electrodes across all parameters, excluding Total Nitrogen. The main mechanism of tannery wastewater oxidation at a Ti/BDD electrode is based on direct oxidation on the electrode surface combined with the generation of oxidants such as °OH and Cl2, while at DSA® Ti/RuO2 and Ti/IrO2 electrodes, the oxidation mechanisms are based on the generation of chlorine. After treatment, the effluents can be discharged to the environment after 6-12 h of electrolysis. Electrooxidation thus offers a promising method for removing the nutrients and non-biodegradable organic compounds in tannery wastewater.

GaN Grown Using Ti Metal Mask by HVPE(Hydride Vapor Phase Epitaxiy) (HVPE(Hydride Vapor Phase Epitaxiy) 성장법으로 Ti metal mask를 이용한 GaN 성장연구)

  • Kim, Dong-Sik
    • 전자공학회논문지 IE
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    • v.48 no.2
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    • pp.1-5
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    • 2011
  • The epitaxial GaN layer of $120{\mu}m$ ~ $300{\mu}m$ thickness with a stripe Ti mask pattern is performed by hydride vapor phase epitaxy(HVPE). Ti strpie mask pattern is deposited by DC magnetron sputter on GaN epitaxial layer of $3{\mu}m$ thickness is grown by hydride vapor phase epitaxy(HVPE). Void are observed at point of Ti mask pattern when GaN layer is investigated by scanning electron microscope. The Crack of GaN layer is observed according to void when it is grown more thick GaN layer. The full width at half maximum of peak which is measured by X-ray diffraction is about 188 arcsec. It is not affected its crystallization by Ti meterial when GaN layer is overgrown on Ti stripe mask pattern according as it is measure FWHM of overgrowth GaN using Ti material against FWHM of first growth GaN epitaxial layer.

A Study of $SrTiO_3$ Synthesis by Direct Wet Process ($SrTiO_3$의 습식 직접 합성법)

  • 이종근;이경희;이병하
    • Journal of the Korean Ceramic Society
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    • v.21 no.2
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    • pp.165-173
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    • 1984
  • It is desirable to establish reliable synthetic methods for electro-ceramic materials. To synthesize $SrTiO_3$ in this study direct solid state reactions and wet chemical processes were used. Previous study of $SrTiO_3$ synthesis included oxalated-method($SrTiO(C_2O_4)_2$.$4H_2O$) co-precipitation$(SrCO_3+TiO(OH)_2)$ and direct solid state reaction$(SrCO_3+TiO(OH)_2)$ The methods in question lead to intermediate inclusion during the reactions and less controllable in particle sizes of $SrTiO_3$. To obtain highly pure $SrTiO_3$ so-called "direct wet process method" was added in this investigation. In the study the "direct wet process" was for the first time applied to synthesize chemically pure and fine particle $SrTiO_3$. $SrCl_2$ and $TiCl_4$<\ulcornerTEX> at KOH solution at room temperature to 10$0^{\circ}C$ precipitated $SrTiO_3$ The particle size increased as temperature increased.mperature increased.

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Hydroxyapatite+TiO2 Composite Sol Coating on Cp-Ti (Cp-Ti 표면의 Hydroxyapatite+TiO2 복합 Sol 코팅에 관한 연구)

  • Kim, Yun-Jong;Kim, Taik-Nam;Lee, Sung-Ho
    • Korean Journal of Materials Research
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    • v.15 no.7
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    • pp.444-447
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    • 2005
  • In this study, $Hydroxyapatite+TiO_2(HAp+TiO_2)$ composite sol coatings on Cp-Ti substrates were deposited by using a sol-gel derived precursor. Prior to hydroxyapatite coating, the samples were micropolished and divided into three sets. The first set was coated with hydroxyapatite (HAp) directly on Cp-Ti. The second set was first coated with intermediate titania layer and then coated with HAp. The third set samples were coated with $HAp+TiO_2$ (50:50) composite sol. Each samples were predried at $200^{\circ}C$, and heat treated at $600^{\circ}C$. The formation of hydroxyapatite has been confirmed by XRD analyses and the substrate material was found to be oxidized with negligible amount of CaO in the coating. The NaOH treated samples showed the presence of rutile crystal. The SEM studies revealed surface morphologies of each samples. $HAp+TiO_2$ composite sol coating layer was found to be smooth. The bonding strength of each samples were calculated using pull out tests. The bonding strength of the $HAp+TiO_2$ composite sol coating on substrate was 29.35MPa.

Microwave Dielectric Properties of the $(Na_{1/2}Sm_{1/2})TiO_3$ -$(Li_{1/2}Nd_{1/2})TiO_3$ Ceramics for mobile communication (이동통신용 $(Na_{1/2}Sm_{1/2})TiO_3$ -$(Li_{1/2}Nd_{1/2})TiO_3$ 세라믹스의 마이크로파 유전특성)

  • 윤중락;이헌용;김경용
    • Electrical & Electronic Materials
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    • v.10 no.9
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    • pp.901-908
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    • 1997
  • The microwave dielectric properties of (Na.$_{1}$2//Sm$_{1}$2/)TiO$_3$and (Li$_{1}$2//Nd$_{1}$2/)TiO$_3$ceramics were investigated. Dielectric constant quality factor and temperature coefficient of resonant frequency of (Li$_{1}$2//Nd$_{1}$2/)TiO$_3$ceramics sintered at 145$0^{\circ}C$ for 2 hours were 86.2, 2780(at 3.8GHz) and 215ppm/$^{\circ}C$respectively. The solid solution of X(Na.$_{1}$2//Sm$_{1}$2/)TiO$_3$-(1-X)(Li$_{1}$2//Nd$_{1}$2/)TiO$_3$increased delectric constant and quality factor were decreased. Whereas temperature coefficient of resonant frequency was optimized to zero at the composition of 0.6(Li$_{1}$2//Sm$_{1}$2/)TiO$_3$-0.4(Li$_{1}$2//Nd$_{1}$2/)TiO$_3$where dielectric constant and quality factor were 86.2, 95-(at 3.8GHz) respectively. Also band-pass filters made of this material were examined.

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Microstructure and Morphology of Carbide Precipitates in $Ni_3Al$ and TiAl ($Ni_3Al$과 TiAl 중에 석출한 탄화물의 미세구조와 형태)

  • Han, Chang-Suk;Koo, Kyung-Wan;Kim, Jang-Woo
    • Journal of the Korean Society for Heat Treatment
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    • v.19 no.1
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    • pp.10-19
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    • 2006
  • Microstructure and morphology of precipitates in $Ni_3Al$- and TiAl-based intermetallics containing carbon have been investigated in terms of transmission electron microscopy(TEM). In an $L1_2$-ordered $Ni_3Al$ alloy with 4 mol.% of chromium and 0.2~3.0 mol.% of carbon, fine octahedral precipitates of $M_{23}C_6$ type carbide were formed in the matrix by aging at temperatures around 973 K after solution annealing at 1423 K. TEM examination revealed that the $M_{23}C_6$ phase and the matrix lattices have a cube-cube orientation relationship and keep partial atomic matching at the {111} interface. After prolonged aging or by aging at higher temperatures, the $M_{23}C_6$ precipitates then adopt a rod-like morphology elongated parallel to the <100> directions. In the $L1_0$-ordered TiAl containing 0.1~2.0 mol.% carbon, TEM observations revealed that needle-like precipitates, which lie only in one direction parallel to the [001] axis of the $L1_0$ matrix, appear in the matrix and preferentially at dislocations. Selected area electron diffraction(SAED) patterns analyses have shown that the needle-shaped precipitate is $Ti_3AlC$ of perovskite type. The orientation relationship between the $Ti_3AlC$ and the $L1_0$ matrix is found to be $(001)_{Ti3AlC}//(001)_{L10\;matrix}$ and $[010]_{Ti3AlC}//[010]_{L10\;matrix}$. By aging at higher temperatures or for longer period at 1073 K, plate-like precipitates of $Ti_2AlC$ with a hexagonal structure are formed on the {111} planes of the $L1_0$ matrix. The orientation relationship between the $Ti_2AlC$ and the $L1_0$ matrix is $(0001)_{Ti2AlC}//(111)_{L10\;matrix}$ and $_{Ti2AlC}//_{L10\;matrix}$.

Electrochemical Characteristics of Cr Added Li4Ti5O12 Prepared by Sol-gel Method (졸-겔법으로 합성한 Cr 첨가 Li4Ti5O12의 전기화학적 특성)

  • Kim, Sun-Ah;Cho, Woo-Ram;Jeong, Koo-Hyun;Cho, Byung-Won;Na, Byung-Ki
    • Journal of the Korean Electrochemical Society
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    • v.14 no.1
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    • pp.27-32
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    • 2011
  • The electorchemical properties of $Li_4Ti_5O_{12}$ added with Cr was tested. The addition or substitution of atoms to $Li_4Ti_5O_{12}$ are expected to modify the crystal structure, and therefore to change the electrochemical performances of $Li_4Ti_5O_{12}$. After the spinel structure $Li_4Ti_{5-x}Cr_xO_{12}$ (x = 0~0.2) were obtained via sol-gel method, the gel was heated in a muffle furnace at $800{\sim}850^{\circ}C$ for 12 h in air. The physical properties of the samples were characterized by TG-DTA, XRD, SEM, FT-IR, and the electrochemical properties were tested with battery cycler at 0.01~2.0 V range. The $Li_4Ti_5O_{12}$ exhibited 169.9 mAh/g at 1C and capacity recovery was 97.5% of the initial capacity at 0.1C. $Li_4Ti_{4.9}Cr_{0.1}O_{12}$ (Cr 1% added) showed best performance of 193.8 mAh/g at 1C and the capacity recovery was increased to 98.8% of the initial capacity at 0.1C.

Microstructure and Mechanical Properties of Reaction-Bonded Sintering TiC-Based Composite Prepared by Ni-Ti Metal Infiltration (Ni/Ti 금속침투에 의한 반응결합소결 TiC계 복합체의 미세구조 및 기계적 특성)

  • 한인섭;우상국;김홍수;양준환;정윤중
    • Journal of the Korean Ceramic Society
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    • v.33 no.9
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    • pp.995-1002
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    • 1996
  • The TiC-(Ni/Ti) composites were prepared by reaction bonding between TiC preforms and the melted mixture of Ni/Ti metal the atomic ratio of which were the ranges of 0.3 to 3. And their microstructures phase composi-tions and mechanical properties were investigated. During reaction bonding Ni/Ti metal mixture had a good wettability an permeability with TiC preforms and pore-free and fully dense sintered bodies were fabricated. TiC particle shape changed from spherical to angular platelet-like and grain size was grown with Ni/Ti atomic ratio increasing from 0.3 to 1. whereas grain growth of TiC particle was restrained and its shape changed gain from angular platelet-like to spherical when Ni/Ti atomic ratio was more than 2. Maximum bending strength and fracture toughness were obtained at the Ni/Ti atomic ratio being 1 their values were 582 MPa and 11.1 MPa.m1/2 respectively.

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Optical, Structural and Photo-catalytic properties of TiO2 thin films prepared by using Ti-naphthenate (Ti-naphthenate를 이용하여 제조한 광감응성 TiO2 박막의 광학적 및 구조적 특성)

  • Lim, Yong-Moo;Jung, Ju-Hyun;Hwang, Kyu-Seog
    • Journal of Korean Ophthalmic Optics Society
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    • v.10 no.3
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    • pp.185-191
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    • 2005
  • Photo-reactive $TiO_2$ thin films on soda-lime-silica slide glass were prepared by spin coating technique with a Ti-naphthenate precursor. Optical, structural and photo-catalytic properties of the films after annealing at $500^{\circ}C{\sim}600^{\circ}C$ were evaluated. As increase with annealing temperature, absorption bands and total transmittance of the films showing an average transmittance (about 80%) at visible spectra range were shifted to UV spectra range and slightly decreased. Refractive index and thickness of the films were increased from 2.16 to 2.63 and decreased from 484 nm to 439 nm, respectively, with increase of annealing temperature. Anatase phase was visible at all annealing temperature. More rougher surface structure was obtained at $600^{\circ}C$ than those of films annealed at $500^{\circ}C$ and $550^{\circ}C$. The hydrophilic conversion was found within 45 min by UV stimulation and optical activation was UVC>UVA>UVB at the case of $500^{\circ}C{\sim}550^{\circ}C$ and UVA>UVC>UVB at the annealing temperature of $600^{\circ}C$. The lowest initial contact angle was obtained at $600^{\circ}C$.

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