• Title/Summary/Keyword: AR process

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Surface Modification Studies by Atomic Force Microscopy for Ar-Plasma Treated Polyethylene

  • Seo, Eun-Deock
    • Macromolecular Research
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    • v.10 no.5
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    • pp.291-295
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    • 2002
  • Atomic force microscopy(AFM) was used to study the polyethylene(PE) surfaces grafted and immobilized with acrylic acid by Ar plasma treatment. The topographical images and parameters including RMS roughness and Rp-v value provided an appropriate means to characterize the surfaces. The plasma grafting and immobilization method were a useful tool for the preparation of surfaces with carboxyl group. However, the plasma immobilization method turned out to have a limitation to use as a means of preparation of PE surface with specific functionalities, due to ablation effect during the Ar plasma treatment process.

Study of dry etch characteristic of TiN thin film for metal gate electrode in MIM capacitor (MIM 커패시터의 Metal 게이트 전극을 위한 TiN 박막의 건식 식각 연구)

  • Park, Jeong-Su;Ju, Yeong-Hui;Woo, Jong-Chang;Heo, Gyeong-Mu;Wi, Jae-Hyeong;Kim, Chang-Il
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2009.10a
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    • pp.219-220
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    • 2009
  • 이번 실험에서는 TiN의 건식 식각 특성을 연구하기 위해 $BCl_3/Ar/N_2$ 유도 결합플라즈마를 이용하였다. BCl3와 Ar의 가스 비율이 $BCl_3$ (5 sccm)/Ar (15 sccm)/N (4 sccm) 인 상황에서 RF power와 DC bias, 그리고 process pressure을 식각변수로 설정하였다. TiN의 식각률은 Alpha-step 500으로 측정하였고 표면의 식각 후 화학반응은 XPS로 측정하였다.

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Spectral analysis of random process

  • Akizuki, Kageo
    • 제어로봇시스템학회:학술대회논문집
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    • 1994.10a
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    • pp.13-20
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    • 1994
  • The spectrum estimation methods of random processes are expressed in this paper. Beginning with the basic theory, non-parametric and parametric methods are overviewed. As to non-parametric method, numerical calculation method is also discussed. As to parametric method, AR model is a very famous and effective model representing random process. Estimation methods of AR parameters which have been proposed are mentioned here. Wavelet analysis is a recently interested technique in signal processing. An application of wavelet analysis is also shown.

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Test for Parameter Changes in the AR(1) Process

  • Kim, Soo-Hwa;Cho, Sin-Sup;Park, Young J.
    • Journal of the Korean Statistical Society
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    • v.26 no.3
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    • pp.417-427
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    • 1997
  • In this paper the parameter change problem in the stationary time series is considered. We propose a cumulative sum (CUSUM) of squares-type test statistic for detection of parameter changes in the AR(1) process. The proposed test statistic is based on the CUSIM of the squared observations and is shown to converge to a standard Brownian bridge. Simulations are performed to evaluate the performance of the proposed statistic and a real example is provided to illustrate the procedure.

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A Study on Etching of Platinum Thin Film in ICP Using Ar/HBr/$Cl_2$ Gases (ICP를 이용한 Ar/HBr/$Cl_2$ 가스에서 백금 박막의 식각 연구)

  • Kim, Nam-Hoon;Kim, Chang-Il;Kwon, Kwang-Ho;Chang, Eui-Goo
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1294-1296
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    • 1998
  • Platinum thin films which hardly form volatile compounds with any reactive gas at normal process temperature was etched in Inductively Coupled Plasma (ICP) using Ar/HBr/$Cl_2$ gases. It is observed that the etch rate of platinum is reduced as increasing of HBr/$Cl_2$ gas mixing ratio when Ar gas ratio is fixed. However, we obtain good etching profile of platinum films without unwanted residues in 90% Ar/5% HBr/5% $Cl_2$ gas mixing ratio.

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To study of optimal subgroup size for estimating variance on autocorrelated small samples (소표본 자기상관 자료의 분산 추정을 위한 최적 부분군 크기에 대한 연구)

  • Lee, Jong-Seon;Lee, Jae-Jun;Bae, Soon-Hee
    • Proceedings of the Korean Society for Quality Management Conference
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    • 2007.04a
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    • pp.302-309
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    • 2007
  • To conduct statistical process control needs the assumption that the process data are independent. However, most of chemical processes, like a semi-conduct processes do not satisfy the assumption because of autocorrelation. It causes abnormal out of control signal in the process control and misleading process capability. In this study, we introduce that Shore's method to solve the problem and to find the optimal subgroup size to estimate variance for AR(l) model. Especially, we focus on finding an actual subgroup size for small samples using simulation. It may be very useful for statistical process control to analyze process capability and to make a Shewhart chart properly.

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Development on AR-Based Operator Training Simulator(OTS) for Chemical Process Capable of Multi-Collaboration (다중협업이 가능한 AR 기반 화학공정 운전원 교육 시뮬레이터(OTS-Simulator) 개발)

  • Lee, Jun-Seo;Ma, Byung-Chol;An, Su-Bin
    • Journal of Convergence for Information Technology
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    • v.12 no.1
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    • pp.22-30
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    • 2022
  • In order to prevent chemical accidents caused by human error, a chemical accident prevention and response training program using advanced technology was developed. After designing a virtual process based on the previously built pilot plant, chemical accident response contents were developed. A part of the pilot facility was remodeled for content realization and a remote control function was given. In addition, a DCS program that can control facilities in a virtual environment was developed, and chemical process operator training (OTS) that can finally respond to virtual chemical accidents was developed in conjunction with AR. Through this, trainees can build driving skills by directly operating the device, and by responding to virtual chemical accidents, they can develop emergency response capabilities. If the next-generation OTS like this study is widely distributed in the chemical industry, it is expected to greatly contribute to the prevention of chemical accidents caused by human error.

Development of AR.Drone's Controller for the Indoor Swarm Flight (실내 군집비행을 위한 AR.Drone의 제어기 개발)

  • Cho, Dong-Hyu;Moon, SungTae;Rew, DongYoung
    • Aerospace Engineering and Technology
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    • v.13 no.1
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    • pp.153-165
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    • 2014
  • Multi-rotor UAVs are utilized in various fields because of the advantages such that a hovering capability such as helicopters, a simple structure and a relatively high thrust. Recently, AR.Drone manufactured by Parrot is easily operated by beginner due to its internal stabilization loop in the on-board computer and it can be easily applied on various researches for the multi-rotor UAVs by providing an SDK(Software Development Kit). Further this platform can be suitably used for application to swarm flight since it is low cost and relatively small. Therefore, in this paper, we introduce the development process of the controller for indoor swarm flight by using the AR.Drone.

Autoregressive Modeling in Orthogonal Cutting of Glass Fiber Reinforced Composites (2차원 GFRC절삭에서 AR모델링에 관한 연구)

  • Gi Heung Choi
    • Journal of the Korean Society of Safety
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    • v.16 no.1
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    • pp.88-93
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    • 2001
  • This study discusses frequency analysis based on autoregressive (AR) time series model, and process characterization in orthogonal cutting of a fiber-matrix composite materials. A sparsely distributed idealized composite material, namely a glass reinforced polyester (GFRP) was used as workpiece. Analysis method employs a force sensor and the signals from the sensor are processed using AR time series model. The resulting pattern vectors of AR coefficients are then passed to the feature extraction block. Inside the feature extraction block, only those features that are most sensitive to different types of cutting mechanisms are selected. The experimental correlations between the different chip formation mechanisms and AR model coefficients are established.

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