• Korean Journal of Optics and Photonics
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• v.34 no.4
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• pp.157-169
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• 2023

Augmented reality (AR) using a head mounted display (HMD) is used in various fields such as military, medicine, manufacturing, gaming, and education. In this paper, we discuss the design and fabrication of the AR optical system, which is most essential for HMD. The AR optical system for HMD requires a wide transparent area in which the augmented image of the display and the real world can be viewed at the same time. To this end, an AR optical system was designed and manufactured by dividing it into three parts according to each characteristic. Also, the refractive index of the ultra-violet (UV) adhesive layer required to make the three optical systems into one complete AR optical system was considered from the design stage to minimize the optical path shift phenomenon when the input light source passes through the UV adhesive layer. In addition, when designing the AR optical system, two aspheric surfaces were used to compensate for off-axis aberration and to be suitable for mass production. Finally, for HMD mass production, an aspheric AR optical system with a thickness of 11 mm, a diagonal field of view of 40°, and a weight of 11.3 g was designed and manufactured.

• Proceedings of the Optical Society of Korea Conference
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• 1996.09a
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• pp.26-26
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• 1996

• The Optical Journal
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• v.6 no.6 s.34
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• pp.61-70
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• 1994

• Proceedings of the Optical Society of Korea Conference
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• 1995.06a
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• pp.68-74
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• 1995

한국전자통신연구소에서 개발된 바 있는 KrF 엑시머 레이저 스탭퍼의 개발 과정과 그 결과를 보이고, 동시에 현재 개발중인 ArF 엑시머 레이저 스텝퍼의 진행상황을 보고한다. 본 논문에서는 스탭퍼의 주요 구성요소인 조명계, 투영광학계, 웨이퍼 자동초점 및 자동정렬 시스템을 중심으로 설명하여, KrF와 ArF 에시머 레이저 스탭퍼간의 차이점과 그 특성들을 상호 비교한다.

• Proceedings of the Optical Society of Korea Conference
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• 1995.06a
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• pp.59-67
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• 1995

부분간섭조명과 central obscuration의 Optical Transfer Function(OTF) 에의 영향을 조사해보고, 이의 programing 기법을 소개하며, 모든 3차 수차와 5차 구면수차가 제거된 5반사광학계에 적용하여 축소배율(M = +1/5)을 갖는 리소그래피용 광학계로서의 가능성을 알아보았다. 이렇게 하여 얻어진 광학계 central obscuration이 약 31%이고 과월을 ArF excimer 레이저( 파장 0.193$\mu$m) 로 하는 nearly inchorent illumination($\sigma$ = 1.0)인 경우 NA가 0.45이며 분해능이 50% MTF 기준치와 초점심도 0.8$\mu$m에 대해 약 600cycles/mm 정도인 성능을 갖는 시스템이 되었다.

• Proceedings of the Optical Society of Korea Conference
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• 1997.08a
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• pp.65-65
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• 1997

• Information Display
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• v.22 no.3
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• pp.3-14
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• 2021

• Korean Journal of Optics and Photonics
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• v.4 no.1
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• pp.9-14
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• 1993

We chose Bessel beamu[$J_o(ar)}$)l in order to investigate image forming property of the optical system with combined filter of amplitude and phase(CFAP). This paper investigated numerically the influence of number of nodes of these beams on the PSF, encircled energy(E), transmission ratio(TR), gain((;) for an aberrated(1aberration-free) optical system. These results showed that the property of PSF differ considerably from the one of the existing amplitude filter and that Bessel beam has super compensating effect for an optical system with spherical aberration. Particularly, the Bessel beam has less the size of central spot than the radius of Airy disk, this result can therefore be applied to the fabrication of semiconductor device.

• Korean Journal of Optics and Photonics
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• v.8 no.1
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• pp.1-6
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• 1997

The amplitude impulse S(x) of an interferometric optical imaging system for λ=193 nm(ArF laser) and NA=0.5 is derived for the pupil with superposed three Gauss pupils $A_1$($\omega$), $A_{2-}$($\omega$) and $A_{2+}$($\omega$). It is shown that FWHM of S(x) can be far less than the Rayleigh's criterion of resolution $\frac{1}{2}{\epsilon}_R$, where ${\epsilon}_R$ is equal to λ=193 nm in the present case of NA=0.5. The three Gauss pupils are provided in an optical system which consists of a Twyman-Green interferometer and an imaging system. The system is proposed and relevent optical components are discussed. Siloxane polymer is suggested for fabrications of amplitude modulation plates. In the present work, we assumed the system is free from aberration and linear. The case that the system has residual aberrations is important, and further work is necessary.

• Korean Journal of Optics and Photonics
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• v.8 no.3
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• pp.183-188
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• 1997

Cut-off filters would reject all the radiation below and transmit all that above a certain wavelength or vice versa. In this paper, we study design and farbrication of dichroic mirror and broadband high reflective mirror for color separation of white laser beam source to R.G.B color beam source. In laser display system, color separation is very important. We fabricated below specific component for finite color separation of the Kr-Ar laser source. At 45$^{\circ}$ incidence s-polarized light , it is required that - H/R in blue region R>99%, H/T in green and red region T>90% - H/R in green and red region R>99%, H/T in blue region T>90% - H/R in green region R>99%, H/T in red region T>90% We composed the optical system and realize the full color image.