• 한국정밀공학회지
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• 제14권3호
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• pp.122-129
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• 1997

Machining technology has emerged to the point of performing atomic-scale fabrication. In tail paper atomic-scale machining characteristics are investigated by using Molecular Statics simulation method. The cutting model used in this work simulates machining with tools such as an AFM. It is shown that built-up edge formation and cutting forces depend on tool tip geometry. Also, the material flow during cutting is shown for various cutting conditions such as depth of cut, rake angle, and edge radius of tool.

• 전기학회논문지
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• 제66권8호
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• pp.1230-1235
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• 2017

We studied surface texture-etching of glass substrate by using reactive ion etching process with various working pressure (0.7~9.0 mT). With the increase in the pressure, a haze parameter, which means diffusive transmittance/total transmittance, was increased in overall wavelength regions, as measured by spectrophotometer. Also, atomic force microscopy (AFM) study also showed that the surface topography transformed from V-shaped, keen surface to U-shaped, flattened surface, which is beneficial for nanocrystalline silicon semiconductor growth with suppressing defective crack formation. The texture-etched ZnO:Al combined with textured glass exhibited pronounced haze properties that showed 60~90 % in overall spectral wavelength regions. This promising optical properties of double textured, transparent conducting substrate can be widely applied in silicon thin film photovoltaics and other optoelectronic devices.

• 한국고분자학회:학술대회논문집
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• 한국고분자학회 2006년도 IUPAC International Symposium on Advanced Polymers for Emerging Technologies
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• pp.187-187
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• 2006

A new type solid polymer electrolyte (SPE) composed of poly (vinyl alcohol) (PVA) and lithium trifluoromethanesulfonate ($LiCF_{3}SO_{3}$) was prepared by means of the solution cast technique to observe that Li ion can move by ion hopping decoupled from polymer segmental motion inside of the 'fast cationic transport process'. The highest ion conductivity of the SPEs obtained from ac impedance measurements was $1.42{\times}10^{-3}S/cm$ at room temperature for SPE with 80wt% of salt concentration. Using LSV, we found that the SPEs had good electrochemical stabilities and using FT-IR and AFM, we found the formation of network-like structure.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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• pp.656-660
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• 2003

We studied the crystallization behavior of LP-CVD a-Si film using UV pulsed laser. With increase in the shot number of irradiation by fixing its energy density, poly-Si film having a large grain size of $0.5 {\mu}m$ was obtained. By analyzing the crystallized Si films using optical analysis such as Raman spectroscopy or AFM technique etc., conspicuous correlation between the grain size and the resultant film properties such as the stress or the roughness has been found. With the increase in the energy density or the shots number of laser, remarkable grain growth occurred following to the roughness formation corresponding to the increase in the tensile stress.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.58-61
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• 2002

SBT thin films were etched at different content of Cl$_2$in Cl$_2$/Ar plasma. We obtained the maximum etch rate of 883 ${\AA}$/min at Cl$_2$(20%)/Ar(80%). As Cl$_2$ gas increased in Cl$_2$/Ar plasma, the etch rate decreased. The maximum etch rate may be explained by variation of volume density for Cl atoms and by the concurrence of two etching mechanisms such as physical sputtering and chemical reaction with formation of low-volatile products, which can be desorbed only by ion bombardment. The variation of volume density for Cl, F and Ar atoms and ion current density were measured by the optical emission spectroscopy and Langmuir probe. To evaluate the physical damage due to plasma, X-ray diffraction and atomic force microscopy analysis carried out. After etching process, P-E hysteresis loops were measured by ferroelectric workstation.

• 한국전기전자재료학회논문지
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• 제22권8호
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• pp.698-703
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• 2009

We report the studies on the structrural properties of Langmuir Blodgett (LB) films fabricated from the copolymer of vinylidenefluoride (VDF) with trifluoroethylene(TrFE). The formation of nanomesas induced by thermal annealing at $135\;^{\circ}C$ for 1 hour was investigated with the atomic force microscope (AFM) and the X-ray diffractometer (XRD). From the result of surface morphology change in 30 monolayer LB film, we find that the annealing treatment on the P(VDF-TrFE) LB film result in the plastic deformation of crystalline polymer. The ${\beta}$ phase crytalline structure in annealed LB film was clearly confirmed from the XRD peak at $19.7^{\circ}$.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 춘계학술대회 논문집 전기설비전문위원
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• pp.37-39
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• 2009

The physicochemical properties of the fatty acid monomolecular Arachidic Acid, Stearic Acid films surface structure has been studied by AFM. We give pressure stimulation into organic thin films and then manufacture a device under the accumulation condition that the state surface pressure is gas state, liquid state, solid state. Formation that prevent when gas phase state and liquid phase state measure but could know organic matter that molecules form equal and stable film when molecules were not distributed evenly, and accumulated in solid state only.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 춘계학술대회 논문집 전기설비전문위원
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• pp.33-36
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• 2009

In this paper, evaluation of physical properties was made for dielectric relaxation phenomena by the detection of the surface pressures and displacements current on the monolayer films of fatty acid monomolecular Arachidic Acid, Stearic Acid using compressing velocity. LB(Langmuir-Blodgett) thin films were manufacture by detecting deposition for the accumulation and the current was measured after the electric bias was applied across the manufactured MIM device. The physicochemical properties of the fatty acid monomolecular Arachidic Acid, Stearic Acid films surface structure has been studied by AFM. We give pressure stimulation into organic thin films and then manufacture a device under the accumulation condition that the state surface pressure is gas state, liquid state, solid state. Formation that prevent when gas phase state and liquid phase state measure but could know organic matter that molecules form equal and stable film when molecules were not distributed evenly, and accumulated in solid state only.

• Journal of Magnetics
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• 제14권4호
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• pp.172-174
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• 2009

Nanolithography by atomic force microscope local oxidation was applied to the fabrication of planar-type Ni/Ni oxide/Ni junctions from 10 nm-thick Ni films. The junction characteristics were sensitive to the lithography conditions such as the bias voltage. Successful oxidation produced junctions of nonlinear current-voltage characteristics, implying the formation of oxide barriers. Magnetoresistance (MR) at low temperatures resembled that of spin valves.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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• pp.64-67
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• 2004

본 논문에서는 DNA를 이용한 나노 소자에 응용하기 위하여, photo-lithograpy를 사용하여 나노크기(<100)의 간격을 갖는 금 전극을 제작하였다. 그리고 제작되어진 되어진 나노 전극위에 2-Amino ethanthiol(AET)를 코팅하여 AET와 $\lambda$-DNA 사이의 정전기적 상호 작용을 이용, 금 나노전극 사이에 간단하고 고착율을 높이는 실험을 하였다. SEM(Scanning Electron Microscope) 분석을 통해 나노 크기의 전극 간격을 확인하였고, 두 전극사이에 연결되어진 $\lambda$-DNA는 AFM(Atomic force microscope)을 확인하였다.