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http://dx.doi.org/10.5370/KIEE.2017.66.8.1230

Double Texturing of Glass Substrate and ZnO : Al Transparent Electrode Surfaces for High Performance Thin Film Solar Cells  

Kang, Dong-Won (Dept. of Solar & Energy Engineering, Cheongju University)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.66, no.8, 2017 , pp. 1230-1235 More about this Journal
Abstract
We studied surface texture-etching of glass substrate by using reactive ion etching process with various working pressure (0.7~9.0 mT). With the increase in the pressure, a haze parameter, which means diffusive transmittance/total transmittance, was increased in overall wavelength regions, as measured by spectrophotometer. Also, atomic force microscopy (AFM) study also showed that the surface topography transformed from V-shaped, keen surface to U-shaped, flattened surface, which is beneficial for nanocrystalline silicon semiconductor growth with suppressing defective crack formation. The texture-etched ZnO:Al combined with textured glass exhibited pronounced haze properties that showed 60~90 % in overall spectral wavelength regions. This promising optical properties of double textured, transparent conducting substrate can be widely applied in silicon thin film photovoltaics and other optoelectronic devices.
Keywords
Solar energy; Thin film solar cell; Glass substrate; Reactive ion etching; Al-doped ZnO;
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