• Applied Microscopy
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• 제52권
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• pp.1.1-1.8
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• 2022

As semiconductor device architecture develops, from planar field-effect transistors (FET) to FinFET and gate-all-around (GAA), there is an increased need to measure 3D structure sidewalls precisely. Here, we present a 3-Dimensional Atomic Force Microscope (3D-AFM), a powerful 3D metrology tool to measure the sidewall roughness (SWR) of vertical and undercut structures. First, we measured three different dies repeatedly to calculate reproducibility in die level. Reproducible results were derived with a relative standard deviation under 2%. Second, we measured 13 different dies, including the center and edge of the wafer, to analyze SWR distribution in wafer level and reliable results were measured. All analysis was performed using a novel algorithm, including auto fattening, sidewall detection, and SWR calculation. In addition, SWR automatic analysis software was implemented to reduce analysis time and to provide standard analysis. The results suggest that our 3D-AFM, based on the tilted Z scanner, will enable an advanced methodology for automated 3D measurement and analysis.

• 한국공작기계학회논문집
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• 제15권2호
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• pp.81-86
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• 2006

The machining parts must be produced within the specification of drawing and those will be able to meet function and efficiency. At that time, it is very important not only precision machine and machining technique but also the measurement technique. So, the improvement of measurement technique is to be joined together at once with improvement of machining technique. Finally, the quality and value of the parts are decided by precision measurement. This paper aims to study on the machined surfaces characteristics of aluminum alloy by AFM(Atomic force microscope) measurement. The objective is contribution to ultra-precision machining by exhibit foundation data of surface roughness and tool wear when parts are cutting with diamond tool at the factory.

• 한국전기전자재료학회논문지
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• 제20권12호
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• pp.1062-1067
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• 2007

In this paper, we have investigated thermal properties of semiconductive shield materials for power cables. EEA (Ethylene Ethyl Acrylate) was used for base polymer and TGA (Thermal Gravimetric Analysis) and AFM (Atomic Force Microscope) were investigated with various carbon black and CNT (carbon nanotube) contents. When CNT reinforced composites and conventional composite were investigated with TGA, we knew that thermal properties of CNT reinforced composite were better than them of conventional composite. To investigate roughness, we used AFM. Before and after aging, AFM was applied and after aging, roughness was increased. As a result, suitable CNT and CB(carbon black) content is CNT:CB=50:50.

• 대한화장품학회지
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• 제45권4호
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• pp.373-380
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• 2019

얼굴과 하박내측의 피부는 경피수분손실량(TEWL), 피부 수분량, 탄력 등에서 많은 차이를 보이고 있다. 특히, 이전 연구 결과에서 얼굴피부와 하박내측 피부는 수화(hydrating) 과정에 따른 탄력특성의 차이를 보여 주었다. 이에 본 연구에서는 신체부위에 따른 피부특성 차이는 각 신체부위를 구성하고 있는 각질세포 특성과 연관성이 있을 것이라는 가정하에 atomic force microscopy (AFM)을 이용하여 각질세포 표면 특성을 비교 연구하였다. 각질세포 표면의 거칠기(roughness)와 villus-like projections (VPs)을 이용하여 비교 평가 하였다. 더 나아가 얼굴피부, 하박내측, 입술 피부의 각질세포 표면을 정성적으로 비교해 보았다. 각질세포는 8명의 피험자의 얼굴과 하박내측 피부에서 tape-stripping을 이용하여 채취하여, AFM을 이용하여 40 ㎛ × 40 ㎛ 크기로 각질세포의 아랫면 표면 특성(bottom surface of corneocyte)을 측정하였다. 그 결과, 얼굴 각질세포 아랫면 표면 거칠기는 388.34 ± 86.189 nm이었고, 하박내측 각질세포 아랫면 표면 거칠기는 662.27 ± 224.257 nm로 하박내측 각질세포가 얼굴 각질세포보다 더 거친 표면 특성임을 확인하였다(p < 0.001). 관찰된 VPs의 양을 비교해보면, 입술 각질세포가 가장 많았고, 그 다음이 얼굴 각질세포이며, 하박내측 각질세포는 낮은 수준이었다. 이러한 결과를 통해 볼때, 각질세포 표면 특성이 얼굴과 하박내측 피부 사이에 보이는 특성 차이에 어느 정도 관여하고 있음을 확인할 수 있었으며, VPs는 부위별 피부 특성 연구에 유용한 parameter가 될 수 있는 가능성도 확인할 수 있었다. 그리고, AFM은 각질세포 표면의 미세한 구조적 차이를 비교 연구하는데 매우 유용한 기기임을 알 수 있었다. 향후 조금 더 많은 연구가 진행된다면 각질세포에 대한 새로운 화장품 효능 평가법이 개발될 것으로 사료된다.

• 한국재료학회지
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• 제23권6호
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• pp.322-328
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• 2013

The relationship the between electrical properties and surface roughness (Ra) of a wet-etched silicon wafer were studied. Ra was measured by an alpha-step process and atomic force microscopy (AFM) while varying the measuring range $10{\times}10$, $40{\times}40$, and $1000{\times}1000{\mu}m$. The resistivity was measured by assessing the surface resistance using a four-point probe method. The relationship between the resistivity and Ra was explained in terms of the surface roughness. The minimum error value between the experimental and theoretical resistivities was 4.23% when the Ra was in a range of $10{\times}10{\mu}m$ according to AFM measurement. The maximum error value was 14.09% when the Ra was in a range of $40{\times}40{\mu}m$ according to AFM measurement. Thus, the resistivity could be estimated when the Ra was in a narrow range.

• 한국전기전자재료학회논문지
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• 제17권8호
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• pp.875-881
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• 2004

Fundamental results obtained from an atomic force microscope (AFM) chemically-induced direct nano-lithography process are presented, which is regarded as a simple method for fabrication nm-scale devices such as superconducting flux flow transistors (SFFTs) and single electron tunneling transistors (SETs). Si cantilevers with Pt coating and with 30 nm thick TiO coating were used as conducting AFM tips in this study. We observed the surfaces of superconducting strip lines modified by AFM anodization' process. First, superconducting strip lines with scan size 2 ${\mu}{\textrm}{m}$${\times}$2 ${\mu}{\textrm}{m}$ have been anodized by AFM technology. The surface roughness was increased with the number of AFM scanning, The roughness variation was higher in case of the AFM tip with a positive voltage than with a negative voltage in respect of the strip surface. Second, we have patterned nm-scale oxide lines on ${YBa}-2{Cu}_3{O}_{7-x}$ superconducting microstrip surfaces by AFM conductive cantilever with a negative bias voltage. The ${YBa}-2{Cu}_3{O}_{7-x}$ oxide lines could be patterned by anodization technique. This research showed that the critical characteristics of superconducting thin films were be controlled by AFM anodization process technique. The AFM technique was expected to be used as a promising anodization technique for fabrication of an SFFT with nano-channel.

• 대한기계학회논문집A
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• 제25권11호
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• pp.1705-1712
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• 2001

Mechanical component has striation with constant width and SEM can estimate fracture type and loading condition. SEM has benefit to fatigue fracture analysis but striation can be observed according to the kind of material and range of crack growth rate and can't. In this case, it needs AFM that can measure 3-dimensional surface profile with resolution of atomic size. In this study. to find fracture reason of torsion-mounted blade in nuclear plant, we estimate the relation between stress intensity factor range and root mean square roughness in 12% Cr steel by AFM and predict in-service loading condition of turbine blade. failure analysis is performed by finite element method and Goodman diagram on torsion-mounted blade.

• Tribology and Lubricants
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• 제11권5호
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• pp.128-135
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• 1995

Atomic force microscopy/friction force microscopy (AFM/FFM) techniques are increasingly used for tribological studies of engineering surfaces at scales, ranging from atomic and molecular to microscales. These techniques have been used to study surface roughness, adhesion, friction, scratching/wear, indentation, detection of material transfer, and boundary lubrication and for nanofabrication/nanomachining purposes. Micro/nanotribological studies of single-crystal silicon, natural diamond, magnetic media (magnetic tapes and disks) and magnetic heads have been conducted. Commonly measured roughness parameters are found to be scale dependent, requiring the need of scale-independent fractal parameters to characterize surface roughness. Measurements of atomic-scale friction of a freshly-cleaved highly-oriented pyrolytic graphite exhibited the same periodicity as that of corresponding topography. However, the peaks in friction and those in corresponding topography were displaced relative to each other. Variations in atomic-scale friction and the observed displacement has been explained by the variations in interatomic forces in the normal and lateral directions. Local variation in microscale friction is found to correspond to the local slope suggesting that a ratchet mechanism is responsible for this variation. Directionality in the friction is observed on both micro- and macro scales which results from the surface preparation and anisotropy in surface roughness. Microscale friction is generally found to be smaller than the macrofriction as there is less ploughing contribution in microscale measurements. Microscale friction is load dependent and friction values increase with an increase in the normal load approaching to the macrofriction at contact stresses higher than the hardness of the softer material. Wear rate for single-crystal silicon is approximately constant for various loads and test durations. However, for magnetic disks with a multilayered thin-film structure, the wear of the diamond like carbon overcoat is catastrophic. Breakdown of thin films can be detected with AFM. Evolution of the wear has also been studied using AFM. Wear is found to be initiated at nono scratches. AFM has been modified to obtain load-displacement curves and for nanoindentation hardness measurements with depth of indentation as low as 1 mm. Scratching and indentation on nanoscales are the powerful ways to screen for adhesion and resistance to deformation of ultrathin fdms. Detection of material transfer on a nanoscale is possible with AFM. Boundary lubrication studies and measurement of lubricant-film thichness with a lateral resolution on a nanoscale have been conducted using AFM. Self-assembled monolyers and chemically-bonded lubricant films with a mobile fraction are superior in wear resistance. Finally, AFM has also shown to be useful for nanofabrication/nanomachining. Friction and wear on micro-and nanoscales have been found to be generally smaller compared to that at macroscales. Therefore, micro/nanotribological studies may help def'me the regimes for ultra-low friction and near zero wear.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.8-13
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• 1996

A relatively new non-traditional finishing process called Abrasive Flow Machining(AFM) is being used to deburr, polish and radius workpiece or produce compressive residual stresses by flowing an abrasive-laden viscoelastic compound across the surface to be machined. This paper presents the effects of AFM on surfaces of tool steel produced by EDM and W-EDM. Using AFM, white layer produced by EDM is erased almost equally and the amount of metal removal is significantly affected the initally machined surface condition of workpiece. The dimension of workiece is enlarged and its surface roughness is improved as AFM time is increased. The optimal AFM time can be established from the experimental results. It is considered that the grinding method lide AFM is useful to grind complex or slim geometry of workpiece even. Scanning Electron Microscopy(SEM) was used to study the surface characteristics of the workpiece before and after AFM.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 심포지엄 논문집 정보 및 제어부문
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• pp.138-140
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• 2006

A new diagnosis model was constructed by combining atomic force microscopy (AFM), wavelet, and neural network. Plasma faults were characterized by filtering AFM-measured etch surface roughness with wavelet. The presented technique was evaluated with the data collected during the etching of silicon oxynitride thin film. A total of 17 etch experiments were conducted. Applying wavelet to AFM, surface roughness was detailed into vertical, horizon%at, and diagonal components. For each component, neural network recognition models were constructed and evaluated. Comparisons revealed that the vertical component-based model yielded about 30% improvement in the recognition accuracy over others. The presented technique was evaluated with the data collected during the etching of silicon oxynitride thin film. A total of 17 etch experiments were conducted