Change of Surface and Electrical Characteristics of Silicon Wafer by Wet Etching(2) - Relationship between Surface Roughness and Electrical Properties - |
Kim, Jun-Woo
(Kumoh National Institute of Technology)
Kang, Dong-Su (Kumoh National Institute of Technology) Lee, Hyun-Yong (Kumoh National Institute of Technology) Lee, Sang-Hyeon (eCONY) Ko, Seong-Woo (eCONY) Roh, Jae-Seung (Kumoh National Institute of Technology) |
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