• Proceedings of the Korean Society For Composite Materials Conference
• /
• 2005.11a
• /
• pp.129-132
• /
• 2005

This study analyzes the behavior of adhesion and friction according to the pore size of nanohoneycomb structures in atomic force microscope (AFM). Anodic aluminum oxide (AAO) films are fabricated as nanohoneycomb structures. According to the pore diameters of the nanohoneycomb structures, the adhesive forces and the frictional coefficients arc obtained in AFM, and the behaviors are analyzed in the view of the contact area between the sphere particle and nanohoneycomb substrate. The effective Young's moduli of the nanohoneycomb structures are measured from the nanoindentation tests, and the contact areas at zero applied load are calculated by combining the porosity of the nanohoneycomb structures and the contact radius determined from JKR and DMT theory.

• Journal of the Korean Society for Precision Engineering
• /
• v.23 no.4 s.181
• /
• pp.168-175
• /
• 2006

This paper presents surface matching algorithms that can be used to reconstruct the surface topography of an object scanned by an AFM. The essence of the algorithms is to match up neighboring images intentionally overlapped with others. Two performance indexes using the correlation coefficient and the sum of the squared differences are introduced. To compensate for the inaccuracy of the coarse stage implemented to AFM, all the six axes including the rotational degrees of freedom are successively matched so as to maximize the coefficients defined. The results show that the proposed algorithms are useful for measurement range extension of AFM. The results also show that a combined use of the two indexes is beneficial for practical cases.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.07a
• /
• pp.101-104
• /
• 2004

We have fabricated a channel of superconducting flux flow transistor(SFFT) using the voltage-biased atomic force microscope(AFM) TiO tip and performed numerical simulations for the SFFT controlled by the magnetic field with a control current. The critical current density in a channel of the fabricated SFFT was decreased with the applied current by a control line. By comparing the measured with theoretical results, we showed a possibility of fabrication of an SFFT with a nano-channel using AFM anodization process technique.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.10a
• /
• pp.568-571
• /
• 2005

This paper introduces a correlation-based surface matching algorithm that can be used to reconstruct the surface topography of an object that is scanned from multiple overlapping regions by an AFM. The image matching technique is applied to two neighboring images intentionally overlapped with each other. To account for the inaccuracy of the coarse stage implemented in AFM, all the six axes including the rotational degrees of freedom are successively matched to maximize the correlation coefficient. The results show that the proposed 6-axes image matching method is useful for expanding the measurement range of AFM.

• Journal of Welding and Joining
• /
• v.19 no.3
• /
• pp.298-304
• /
• 2001

Turbine blade is subject to force of three types ; the torsional force by torsional mount, the centrifugal force by the rotation of rotor and the cyclic bending force by steam pressure. The cyclic bending force was a main factor on fatigue strength. SEM fractography in root of turbine blade showed micro-clack width was not dependent on stress intensity factor range. Especially, fatigue did not exist on SEM photograph in root of turbine blade. To clear out the fracture mechanism of turbine blade, nanofractography was needed on 3-dimensional crack initiation and crack growth with high magnification. Fatigue striation partially existed on AFM photograph in root of turbine blade. Therefore, to find a fracture mechanism of the torsion-mounted blade in nuclear power plant, the relation between stress intensity factor range and surface roughness measured by AFM was estimated, and then the load amplitude ΔP applied to turbine blade was predicted exactly by root mean square roughness.

• Journal of the Korean Society for Precision Engineering
• /
• v.20 no.3
• /
• pp.5-14
• /
• 2003

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.4
• /
• pp.84-91
• /
• 2005

We measured the pitch of one-dimensional (ID) grating specimens using a metrological atomic force microscope (M-AFM). The ID grating specimens a.e often used as a magnification standard in nano-metrology, such as scanning probe microscopy (SPM) and scanning electron microscopy (SEM). Thus, we need to certify the pitch of grating specimens fur the meter-traceability in nano-metrology. To this end, an M-AFM was setup at KRISS. The M-AFM consists of a commercial AFM head module, a two-axis flexure hinge type nanoscanner with built-in capacitive sensors, and a two-axis heterodyne interferometer to establish the meter-traceability directly. Two kinds of ID grating specimens, each with the nominal pitch of 288 nm and 700 nm, were measured. The uncertainty in pitch measurement was evaluated according to Guide to the Expression of Uncertainty in Measurement. The pitch was calculated from 9 line scan profiles obtained at different positions with 100 ㎛ scan range. The expanded uncertainties (k = 2) in pitch measurement were 0.10 nm and 0.30 nm for the specimens with the nominal pitch of 288 nm and 700 nm. The measured pitch values were compared with those obtained using an optical diffractometer, and agreed within the range of the expanded uncertainty of pitch measurement. We also discussed the effect of averaging in the measurement of mean pitch using M-AFM and main components of uncertainty.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2014.04a
• /
• pp.88-89
• /
• 2014

In dynamic force microscopy, the cantilever oscillates at a resonant frequency, and the tip deflection is measured at this frequency. The cantilever deflection is, however, highly nonlinear, and the surface properties can be embedded in the deflection at the frequencies other than the original resonant frequency of the cantilever. Multifrequency atomic force microscopy includes the excitation and detection of the deflection in two or more frequencies which are higher harmonics or eigenmodes. This can overcome the limitations of conventional atomic force microscope. We reviewed the multifrequency atomic force microscopy and its applications in many fields.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 2003.04a
• /
• pp.50-55
• /
• 2003

Atomic force microscope(AFM) techniques are increasingly used for tribological studies of engineering surfaces at scales ranging from atomic and molecular to microscale. AFM with suitable tips is being used for nanofabrication nanomachining purposes. In this paper, machining characteristics of silicon have been investigated by nano indentation and nano scratch. Mechanisms of material removal on the microscale are studied and the Taguchi method is introduced to acquire optimum parameters for nanomachining. This work shows effectiveness of the Taguchi method in nanomachining. Also, Acoustic Emission(AE) is introduced for the monitoring of nanomachining.

• Journal of the Korean Society for Precision Engineering
• /
• v.21 no.3
• /
• pp.163-170
• /
• 2004

Atomic force microscope (AFM) techniques are increasingly used fur tribological studies of engineering surfaces at scales ranging from atomic and molecular to micro-scale. Recently, AFM with suitable tips is being used for nano fabrication/nano machining purposes. In this paper, machining characteristics of silicon were investigated by nano indentation and nano scratch. Nano-scale material removal mechanisms are studied and the Taguchi method was introduced to acquire optimum parameters for nano machining. Also, Acoustic Emission (AR) is used for the monitoring of nano machining.