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Optimization of Nano Machining Parameters Using Acoustic Emission and the Taguchi Method  

이성환 (한양대학교 기계공학과)
손정무 (한양대학교 정밀공학과 대학원)
Publication Information
Journal of the Korean Society for Precision Engineering / v.21, no.3, 2004 , pp. 163-170 More about this Journal
Abstract
Atomic force microscope (AFM) techniques are increasingly used fur tribological studies of engineering surfaces at scales ranging from atomic and molecular to micro-scale. Recently, AFM with suitable tips is being used for nano fabrication/nano machining purposes. In this paper, machining characteristics of silicon were investigated by nano indentation and nano scratch. Nano-scale material removal mechanisms are studied and the Taguchi method was introduced to acquire optimum parameters for nano machining. Also, Acoustic Emission (AR) is used for the monitoring of nano machining.
Keywords
Atomic force microscope; Acoustic Emission; Taguchi method; Nano machining;
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Times Cited By KSCI : 1  (Citation Analysis)
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